SmartSEM.cs 82 KB

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  1. //时间:20200610
  2. //作者:王琦
  3. //功能:SmartSEM remote API控制
  4. using System;
  5. using System.Collections.Generic;
  6. using System.Linq;
  7. using System.Runtime.InteropServices;
  8. using System.Text;
  9. using System.Threading.Tasks;
  10. using APILib;
  11. using System.Threading;
  12. using System.IO;
  13. using FileManager;
  14. namespace SmartSEMControl
  15. {
  16. //可能遇到的错误提示部分??在log加入之后添加
  17. class SmartSEM : ISEMControl
  18. {
  19. private NLog.Logger log;
  20. #region 返回错误代码枚举
  21. private enum ZeissErrorCode
  22. {
  23. // Failed to translate parameter into an id
  24. API_E_GET_TRANSLATE_FAIL = 1000,
  25. // Failed to get analogue value
  26. API_E_GET_AP_FAIL = 1001,
  27. // Failed to get digital value
  28. API_E_GET_DP_FAIL = 1002,
  29. // Parameter supplied is not analogue nor digital
  30. API_E_GET_BAD_PARAMETER = 1003,
  31. // Failed to translate parameter into an id
  32. API_E_SET_TRANSLATE_FAIL = 1004,
  33. // Failed to set a digital state
  34. API_E_SET_STATE_FAIL = 1005,
  35. // Failed to set a float value
  36. API_E_SET_FLOAT_FAIL = 1006,
  37. // Value supplied is too low
  38. API_E_SET_FLOAT_LIMIT_LOW = 1007,
  39. // Value supplied is too high
  40. API_E_SET_FLOAT_LIMIT_HIGH = 1008,
  41. // Value supplied is is of wrong type
  42. API_E_SET_BAD_VALUE = 1009,
  43. // Parameter supplied is not analogue nor digital
  44. API_E_SET_BAD_PARAMETER = 1010,
  45. // Failed to translate command into an id
  46. API_E_EXEC_TRANSLATE_FAIL = 1011,
  47. // Failed to execute command=
  48. API_E_EXEC_CMD_FAIL = 1012,
  49. // Failed to execute file macro
  50. API_E_EXEC_MCF_FAIL = 1013,
  51. // Failed to execute library macro
  52. API_E_EXEC_MCL_FAIL = 1014,
  53. // Command supplied is not implemented
  54. API_E_EXEC_BAD_COMMAND = 1015,
  55. // Grab command failed
  56. API_E_GRAB_FAIL = 1016,
  57. // Get Stage position failed
  58. API_E_GET_STAGE_FAIL = 1017,
  59. // Move Stage position failed
  60. API_E_MOVE_STAGE_FAIL = 1018,
  61. // API not initialised
  62. API_E_NOT_INITIALISED = 1019,
  63. // Failed to translate parameter to an id
  64. API_E_NOTIFY_TRANSLATE_FAIL = 1020,
  65. // Set notification failed
  66. API_E_NOTIFY_SET_FAIL = 1021,
  67. // Get limits failed
  68. API_E_GET_LIMITS_FAIL = 1022,
  69. // Get multiple parameters failed
  70. API_E_GET_MULTI_FAIL = 1023,
  71. // Set multiple parameters failed
  72. API_E_SET_MULTI_FAIL = 1024,
  73. // Missing API license
  74. API_E_NOT_LICENSED = 1025,
  75. // Reserved or not implemented
  76. API_E_NOT_IMPLEMENTED = 1026,
  77. // Failed to get user name (Remoting Interface only)
  78. API_E_GET_USER_NAME_FAIL = 1027,
  79. // Failed to get user idle state (Remoting Interface only)
  80. API_E_GET_USER_IDLE_FAIL = 1028,
  81. // Failed to get the last remoting connection error string (Remoting Interface Only)
  82. API_E_GET_LAST_REMOTING_CONNECT_ERROR_FAIL = 1029,
  83. // Failed to remotely logon to the EM Server (username and password may be incorrect or EM Server is not running or User is already logged on
  84. API_E_EMSERVER_LOGON_FAILED = 1030,
  85. // Failed to start the EM Server - this may be because the Server is already running or has an internal error.
  86. API_E_EMSERVER_START_FAILED = 1031,
  87. // The command or parameter is currently disabled (you cannot execute or set it).
  88. API_E_PARAMETER_IS_DISABLED = 1032,
  89. // Remoting incorrectly configured, use RConfigure to correct
  90. API_E_REMOTING_NOT_CONFIGURED = 2027,
  91. // Remoting did not connect to the server
  92. API_E_REMOTING_FAILED_TO_CONNECT = 2028,
  93. // Remoting could not start (unknown reason)
  94. API_E_REMOTING_COULD_NOT_CREATE_INTERFACE = 2029,
  95. // Remoting: Remote server is not running currently.
  96. API_E_REMOTING_EMSERVER_NOT_RUNNING = 2030,
  97. // Remoting: Remote server has no user logged in
  98. API_E_REMOTING_NO_USER_LOGGED_IN = 2031,
  99. // Internal Defines, although they may be useful in your own program. TRS.
  100. API_FIRST_REMOTING_ERROR_CODE = API_E_REMOTING_NOT_CONFIGURED,
  101. API_LAST_REMOTING_ERROR_CODE = API_E_REMOTING_NO_USER_LOGGED_IN,
  102. API_FIRST_ERROR_CODE = API_E_GET_TRANSLATE_FAIL,
  103. API_LAST_ERROR_CODE = API_E_REMOTING_NO_USER_LOGGED_IN
  104. }
  105. #endregion
  106. #region 固定参数
  107. //判断这个文件夹是否存在20200826
  108. //private readonly String ELYPATH = @"C:\ProgramData\Carl Zeiss\SmartFIB\API\Drop\";
  109. private readonly String ELYFILENAME = "ApiLayout.ely";
  110. //private readonly String MLFPATH = @"C:\ProgramData\Carl Zeiss\SmartSEM\User\Service\";
  111. private readonly String MLFFILENAME = "Opton.MLF";
  112. private String REMOTEDesELYPATH = @"";
  113. private String REMOTEDesMLFPATH = @"";
  114. #endregion
  115. #region 模拟参数
  116. //放大缩小
  117. private readonly String AP_MAG = "AP_MAG";
  118. //焦距
  119. private readonly String AP_WD = "AP_WD";
  120. //亮度
  121. private readonly String AP_BRIGHTNESS = "AP_BRIGHTNESS";
  122. //对比度
  123. private readonly String AP_CONTRAST = "AP_CONTRAST";
  124. //亮度目标
  125. private readonly String AP_AUTO_BRIGHT = "AP_AUTO_BRIGHT";
  126. //对比度目标
  127. private readonly String AP_AUTO_CONTRAST = "AP_AUTO_CONTRAST";
  128. //消像散X轴
  129. private readonly String AP_STIG_X = "AP_STIG_X";
  130. //消像散Y轴
  131. private readonly String AP_STIG_Y = "AP_STIG_Y";
  132. //角度补偿
  133. private readonly String AP_TILT_ANGLE = "AP_TILT_ANGLE";
  134. //SEM移动X
  135. private readonly String AP_BEAMSHIFT_X = "AP_BEAMSHIFT_X";
  136. //SEM移动Y
  137. private readonly String AP_BEAMSHIFT_Y = "AP_BEAMSHIFT_Y";
  138. //X轴移动到
  139. private readonly String AP_STAGE_GOTO_X = "AP_STAGE_GOTO_X";
  140. //Y轴移动到
  141. private readonly String AP_STAGE_GOTO_Y = "AP_STAGE_GOTO_Y";
  142. //Z轴移动到
  143. private readonly String AP_STAGE_GOTO_Z = "AP_STAGE_GOTO_Z";
  144. //T轴移动到
  145. private readonly String AP_STAGE_GOTO_T = "AP_STAGE_GOTO_T";
  146. //R轴移动到
  147. private readonly String AP_STAGE_GOTO_R = "AP_STAGE_GOTO_R";
  148. //M轴移动到
  149. private readonly String AP_STAGE_GOTO_M = "AP_STAGE_GOTO_M";
  150. //Scan Rotate角度
  151. private readonly String AP_SCANROTATION = "AP_SCANROTATION";
  152. //像素大小
  153. private readonly String AP_PIXEL_SIZE = "AP_PIXEL_SIZE";
  154. //X轴坐标
  155. private readonly String AP_STAGE_AT_X = "AP_STAGE_AT_X";
  156. //Y轴坐标
  157. private readonly String AP_STAGE_AT_Y = "AP_STAGE_AT_Y";
  158. //Z轴坐标
  159. private readonly String AP_STAGE_AT_Z = "AP_STAGE_AT_Z";
  160. //T轴坐标
  161. private readonly String AP_STAGE_AT_T = "AP_STAGE_AT_T";
  162. //R轴坐标
  163. private readonly String AP_STAGE_AT_R = "AP_STAGE_AT_R";
  164. //M轴坐标
  165. private readonly String AP_STAGE_AT_M = "AP_STAGE_AT_M";
  166. //扫描周期
  167. private readonly String AP_FRAME_TIME = "AP_FRAME_TIME";
  168. //FIB缩放
  169. private readonly String AP_FIB_MAGNIFICATION = "AP_FIB_MAGNIFICATION";
  170. //FIB焦距
  171. private readonly String AP_FIB_OBJECTIVE_POTENTIAL = "AP_FIB_OBJECTIVE_POTENTIAL";
  172. //FIB消像散X
  173. private readonly String AP_FIB_STIGMATOR_X = "AP_FIB_STIGMATOR_X";
  174. //FIB消像散Y
  175. private readonly String AP_FIB_STIGMATOR_Y = "AP_FIB_STIGMATOR_Y";
  176. //FIB光束移动X
  177. private readonly String AP_FIB_BEAM_SHIFT_X = "AP_FIB_BEAM_SHIFT_X";
  178. //FIB光束移动Y
  179. private readonly String AP_FIB_BEAM_SHIFT_Y = "AP_FIB_BEAM_SHIFT_Y";
  180. //SEM电压
  181. private readonly String AP_MANUALKV = "AP_MANUALKV";
  182. //SEM电流
  183. private readonly String AP_IPROBE = "AP_IPROBE";
  184. //拉直
  185. private readonly String AP_STAGE_DELTA_R = "AP_STAGE_DELTA_R";
  186. //光束移动位置值
  187. private readonly String AP_BEAM_OFFSET_X = "AP_BEAM_OFFSET_X";
  188. private readonly String AP_BEAM_OFFSET_Y = "AP_BEAM_OFFSET_Y";
  189. private readonly String AP_NR_COEF = "AP_NR_COEF";
  190. #endregion
  191. #region 数字参数
  192. private readonly String DP_SCANRATE = "DP_SCANRATE";
  193. //Scan Rotate开关
  194. private readonly String DP_SCAN_ROT = "DP_SCAN_ROT";
  195. //取消电子束校正
  196. private readonly String DP_TILT_CORRECTION = "DP_TILT_CORRECTION";
  197. //自动亮度对比度
  198. private readonly String DP_AUTO_VIDEO = "DP_AUTO_VIDEO";
  199. //图像解冻
  200. private readonly String DP_FROZEN = "DP_FROZEN";
  201. //图像类型切换
  202. private readonly String DP_DETECTOR_TYPE = "DP_DETECTOR_TYPE";
  203. //图像大小
  204. private readonly String DP_IMAGE_STORE = "DP_IMAGE_STORE";
  205. //样品台状态
  206. private readonly String DP_STAGE_IS = "DP_STAGE_IS";
  207. //自动函数状态
  208. private readonly String DP_AUTO_FUNCTION = "DP_AUTO_FUNCTION";
  209. //FIB模式
  210. private readonly String DP_FIB_MODE = "DP_FIB_MODE";
  211. //FIB_IMAGING
  212. private readonly String DP_FIB_IMAGING = "DP_FIB_IMAGING";
  213. //FIB状态
  214. private readonly String DP_SMARTFIB_API_STATUS = "DP_SMARTFIB_API_STATUS";
  215. //FIB,ELY文件确认前,需要将该变量置为2->FIB
  216. private readonly String DP_PATTERNING_MODE = "DP_PATTERNING_MODE";
  217. #endregion
  218. #region 命令
  219. //20201016 设置图像速度 CMD_SCANRATE0...CMD_SCANRATE15
  220. private readonly String CMD_SCANRATE3 = "CMD_SCANRATE3";
  221. private readonly String CMD_SCANRATE4 = "CMD_SCANRATE4";
  222. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  223. private readonly String CMD_SCANRATE5 = "CMD_SCANRATE5";
  224. private readonly String CMD_SCANRATE6 = "CMD_SCANRATE6";
  225. //add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  226. private readonly String CMD_SCANRATE7 = "CMD_SCANRATE7";
  227. private readonly String CMD_SCANRATE8 = "CMD_SCANRATE8";
  228. private readonly String CMD_SCANRATE9 = "CMD_SCANRATE9";
  229. private readonly String CMD_SCANRATE10 = "CMD_SCANRATE10";
  230. private readonly String CMD_LINE_AVG = "CMD_LINE_AVG";
  231. private readonly String CMD_PIXNR = "CMD_PIXNR";
  232. //开启电压
  233. private readonly String CMD_BEAM_ON = "CMD_BEAM_ON";
  234. //关闭电压
  235. private readonly String CMD_EHT_OFF = "CMD_EHT_OFF";
  236. //自动对焦1
  237. private readonly String CMD_AUTO_FOCUS_COARSE = "CMD_AUTO_FOCUS_COARSE";
  238. //自动对焦2
  239. private readonly String CMD_AUTO_FOCUS_FINE = "CMD_AUTO_FOCUS_FINE";
  240. //自动消像散
  241. private readonly String CMD_AUTO_STIG = "CMD_AUTO_STIG";
  242. //样品台急停
  243. private readonly String CMD_STAGE_ABORT = "CMD_STAGE_ABORT";
  244. //FIB模式选择
  245. private readonly String CMD_FIB_MODE_SEM = "CMD_FIB_MODE_SEM";
  246. private readonly String CMD_FIB_MODE_FIB = "CMD_FIB_MODE_FIB";
  247. private readonly String CMD_FIB_MODE_MILL = "CMD_FIB_MODE_MILL";
  248. private readonly String CMD_FIB_MODE_SEM_FIB = "CMD_FIB_MODE_SEM_FIB";
  249. private readonly String CMD_FIB_MODE_MILL_SEM = "CMD_FIB_MODE_MILL_SEM";
  250. private readonly String CMD_FIB_MODE_EXT = "CMD_FIB_MODE_EXT";
  251. private readonly String CMD_FIB_MODE_EXT_SEM = "CMD_FIB_MODE_EXT_SEM";
  252. private readonly String CMD_FIB_MODE_ARGON_SEM = "CMD_FIB_MODE_ARGON_SEM";
  253. private readonly String CMD_FIB_MODE_DRIFT_SEM = "CMD_FIB_MODE_DRIFT_SEM";
  254. private readonly String CMD_FIB_MODE_DRIFT_FIB = "CMD_FIB_MODE_DRIFT_FIB";
  255. private readonly String CMD_FIB_MODE_ARGON = "CMD_FIB_MODE_ARGON";
  256. //FIB加载.ely文件命令
  257. private readonly String CMD_SMARTFIB_LOAD_ELY = "CMD_SMARTFIB_LOAD_ELY";
  258. //FIB确认.ely文件命令
  259. private readonly String CMD_SMARTFIB_PREPARE_EXPOSURE = "CMD_SMARTFIB_PREPARE_EXPOSURE";
  260. //FIB开始.ley文件命令
  261. private readonly String CMD_FIB_START_MILLING = "CMD_FIB_START_MILLING";
  262. #endregion
  263. #region 宏文件命令
  264. private readonly String MCF_FILENAME = "MCF_";
  265. #endregion
  266. #region APILib
  267. private Api CZEMApi = new Api();
  268. private Boolean m_bInitialised = false;
  269. #endregion
  270. #region 构造函数
  271. public SmartSEM()
  272. {
  273. //LogManager.InitHardwareLog();
  274. Init();
  275. //判断ELY默认文件夹是否存在
  276. //if(!Directory.Exists(ELYPATH))
  277. //{
  278. // Directory.CreateDirectory(ELYPATH);
  279. //}
  280. //if (!Directory.Exists(MLFPATH))
  281. //{
  282. // Directory.CreateDirectory(MLFPATH);
  283. //}
  284. }
  285. #endregion
  286. #region 设备初始化
  287. /// <summary>
  288. /// 设备初始化
  289. /// </summary>
  290. /// <returns>return:true or false</returns>
  291. public Boolean Init()
  292. {
  293. log = NLog.LogManager.GetCurrentClassLogger();
  294. long lrt = 0;
  295. #if ROMOTE
  296. lrt = CZEMApi.InitialiseRemoting();
  297. #else
  298. lrt = CZEMApi.Initialise("");
  299. #endif
  300. if (lrt != 0)
  301. {
  302. log.Error("CZEMApi.Initialise Faild - " + ErrorToString(lrt), false);
  303. m_bInitialised = false;
  304. return false;
  305. }
  306. else
  307. {
  308. m_bInitialised = true;
  309. float testmag = GetMagnification();
  310. if(!float.IsNaN(testmag))
  311. {
  312. log.Info("CZEMApi.Initialise Success!", true);
  313. return true;
  314. }
  315. else
  316. {
  317. log.Error("CZEMApi.Initialise Faild - Disconnect", false);
  318. m_bInitialised = false;
  319. return false;
  320. }
  321. }
  322. }
  323. #endregion
  324. #region 设备远程初始化
  325. /// <summary>
  326. /// 设备远程初始化
  327. /// </summary>
  328. /// <returns>return:true or false</returns>
  329. public Boolean InitRemoting()
  330. {
  331. long lrt = CZEMApi.InitialiseRemoting();
  332. if (lrt != 0)
  333. {
  334. m_bInitialised = false;
  335. return false;
  336. }
  337. else
  338. {
  339. m_bInitialised = true;
  340. return true;
  341. }
  342. }
  343. #endregion
  344. #region 连接状态
  345. public Boolean ConnectStatus()
  346. {
  347. return m_bInitialised;
  348. }
  349. #endregion
  350. #region 关闭设备
  351. /// <summary>
  352. /// 关闭设备
  353. /// </summary>
  354. /// <returns>true or false</returns>
  355. public Boolean Dispose()
  356. {
  357. if (m_bInitialised)
  358. {
  359. long lrt = CZEMApi.ClosingControl();
  360. if (lrt != 0)
  361. {
  362. log.Error("CZEMApi.ClosingControl Faild - " + ErrorToString(lrt), false);
  363. return false;
  364. }
  365. else
  366. {
  367. log.Info("CZEMApi.ClosingControl Success!", true);
  368. m_bInitialised = false;
  369. return true;
  370. }
  371. }
  372. else
  373. {
  374. return false;
  375. }
  376. }
  377. #endregion
  378. #region 读参数函数
  379. private Boolean ReadParams(String str_param, ref float value)
  380. {
  381. if (m_bInitialised)
  382. {
  383. object varfloat = new VariantWrapper((float)0.0f);
  384. long lrt = CZEMApi.Get(str_param, ref varfloat);
  385. if (lrt != 0)
  386. {
  387. log.Error("Get " + str_param + " Faild - " + ErrorToString(lrt), false);
  388. return false;
  389. }
  390. else
  391. {
  392. value = Convert.ToSingle(varfloat);
  393. return true;
  394. }
  395. }
  396. else
  397. {
  398. log.Error("ReadParams m_bInitialised = false", false);
  399. return false;
  400. }
  401. }
  402. #endregion
  403. #region 写模拟参数函数
  404. private Boolean WriteParams(String str_param, float value)
  405. {
  406. if (m_bInitialised)
  407. {
  408. //先取范围
  409. object varMin = new VariantWrapper((float)0.0f);
  410. object varMax = new VariantWrapper((float)0.0f);
  411. long lrt = CZEMApi.GetLimits(str_param, ref varMin, ref varMax);
  412. if (lrt != 0)
  413. {
  414. log.Error("GetLimits " + str_param + " Faild - " + ErrorToString(lrt), false);
  415. return false;
  416. }
  417. if (value <= Convert.ToSingle(varMax) && value >= Convert.ToSingle(varMin))
  418. {
  419. object varFloat = new VariantWrapper(value);
  420. lrt = CZEMApi.Set(str_param, ref varFloat);// set value
  421. if (lrt != 0)
  422. {
  423. log.Error("Set " + str_param + " Faild - " + ErrorToString(lrt), false);
  424. return false;
  425. }
  426. return true;
  427. }
  428. else
  429. {
  430. log.Error("Set " + str_param + " Faild - Out to range", false);
  431. return false;
  432. }
  433. }
  434. else
  435. {
  436. log.Error("ReadParams m_bInitialised = false", false);
  437. return false;
  438. }
  439. }
  440. #endregion
  441. #region 写数字参数函数
  442. private Boolean WriteDataParams(String str_param, float value)
  443. {
  444. if (m_bInitialised)
  445. {
  446. object varFloat = new VariantWrapper(value);
  447. long lrt = CZEMApi.Set(str_param, ref varFloat);// set value
  448. if (lrt != 0)
  449. {
  450. log.Error("Set " + str_param + " Faild - " + ErrorToString(lrt), false);
  451. return false;
  452. }
  453. return true;
  454. }
  455. else
  456. {
  457. log.Error("ReadParams m_bInitialised = false", false);
  458. return false;
  459. }
  460. }
  461. #endregion
  462. #region 执行命令
  463. private Boolean ExecuteCmd(String cmd)
  464. {
  465. if (m_bInitialised)
  466. {
  467. long lrt = CZEMApi.Execute(cmd);// execute command
  468. if (lrt != 0)
  469. {
  470. log.Error("ExecuteCmd " + cmd + " Faild - " + ErrorToString(lrt), false);
  471. return false;
  472. }
  473. else
  474. {
  475. return true;
  476. }
  477. }
  478. else
  479. {
  480. return false;
  481. }
  482. }
  483. #endregion
  484. #region SEM缩放
  485. /// <summary>
  486. /// 读取缩放倍数
  487. /// </summary>
  488. /// <returns>true:float or false:NaN</returns>
  489. public float GetMagnification()
  490. {
  491. float ret = 0;
  492. if(ReadParams(AP_MAG, ref ret))
  493. {
  494. log.Info("GetMagnification " + ret.ToString() + " Success!", true);
  495. return ret;
  496. }
  497. else
  498. {
  499. log.Error("GetMagnification Faild!", false);
  500. return float.NaN;
  501. }
  502. }
  503. /// <summary>
  504. /// 设置缩放倍数
  505. /// </summary>
  506. /// <param name="set">倍数</param>
  507. /// <returns>true or false</returns>
  508. public Boolean SetMagnification(float set)
  509. {
  510. Boolean ret = WriteParams(AP_MAG, set);
  511. log.Info("SetMagnification = " + set.ToString(), ret);
  512. return ret;
  513. }
  514. #endregion
  515. #region SEM焦距
  516. /// <summary>
  517. /// 读取工作距离
  518. /// </summary>
  519. /// <returns>true:float or false:NaN</returns>
  520. public float GetWorkingDistance()
  521. {
  522. float ret = 0;
  523. if (ReadParams(AP_WD, ref ret))
  524. {
  525. log.Info("GetWorkingDistance " + ret.ToString() + " Success!", true);
  526. return ret;
  527. }
  528. else
  529. {
  530. log.Error("GetWorkingDistance Faild!", false);
  531. return float.NaN;
  532. }
  533. }
  534. /// <summary>
  535. /// 设置焦距
  536. /// </summary>
  537. /// <param name="set">焦距</param>
  538. /// <returns>true or false</returns>
  539. public Boolean SetWorkingDistance(float set)
  540. {
  541. Boolean ret = WriteParams(AP_WD, set);
  542. log.Info("SetWorkingDistance = " + set.ToString(), ret);
  543. return ret;
  544. }
  545. #endregion
  546. #region 亮度
  547. /// <summary>
  548. /// 读取亮度
  549. /// </summary>
  550. /// <returns>true:float or false:NaN</returns>
  551. public float GetBrightness()
  552. {
  553. float ret = 0;
  554. if (ReadParams(AP_BRIGHTNESS, ref ret))
  555. {
  556. log.Info("GetBrightness " + ret.ToString() + " Success!", true);
  557. return ret;
  558. }
  559. else
  560. {
  561. log.Error("GetBrightness Faild!", false);
  562. return float.NaN;
  563. }
  564. }
  565. /// <summary>
  566. /// 设置亮度
  567. /// </summary>
  568. /// <param name="set">亮度</param>
  569. /// <returns>true or false</returns>
  570. public Boolean SetBrightness(float set)
  571. {
  572. Boolean ret = WriteParams(AP_BRIGHTNESS, set);
  573. log.Info("SetBrightness = " + set.ToString(), ret);
  574. return ret;
  575. }
  576. #endregion
  577. #region 对比度
  578. /// <summary>
  579. /// 读取对比度
  580. /// </summary>
  581. /// <returns>true:float or false:NaN</returns>
  582. public float GetContrast()
  583. {
  584. float ret = 0;
  585. if (ReadParams(AP_CONTRAST, ref ret))
  586. {
  587. log.Info("GetContrast " + ret.ToString() + " Success!", true);
  588. return ret;
  589. }
  590. else
  591. {
  592. log.Error("GetContrast Faild!", false);
  593. return float.NaN;
  594. }
  595. }
  596. /// <summary>
  597. /// 设置对比度
  598. /// </summary>
  599. /// <param name="set">对比度</param>
  600. /// <returns>true or false</returns>
  601. public Boolean SetContrast(float set)
  602. {
  603. Boolean ret = WriteParams(AP_CONTRAST, set);
  604. log.Info("SetContrast = " + set.ToString(), ret);
  605. return ret;
  606. }
  607. #endregion
  608. #region 自动亮度对比度
  609. /// <summary>
  610. /// 读取自动亮度对比度状态
  611. /// </summary>
  612. /// <returns>true:float or false:NaN</returns>
  613. public float GetAutoVideo()
  614. {
  615. float ret = 0;
  616. if (ReadParams(DP_AUTO_VIDEO, ref ret))
  617. {
  618. log.Info("GetAutoVideo " + ret.ToString() + " Success!", true);
  619. return ret;
  620. }
  621. else
  622. {
  623. log.Error("GetAutoVideo Faild!", false);
  624. return float.NaN;
  625. }
  626. }
  627. /// <summary>
  628. /// 设置自动亮度对比度状态
  629. /// </summary>
  630. /// <param name="set">0:off;1:B(亮度);2:C(对比度);3:BC</param>
  631. /// <returns>true or false</returns>
  632. public Boolean SetAutoVideoOff()
  633. {
  634. Boolean ret = WriteDataParams(DP_AUTO_VIDEO, (float)0);
  635. log.Info("SetAutoVideoOff", ret);
  636. return ret;
  637. }
  638. public Boolean SetAutoVideoBrightness()
  639. {
  640. Boolean ret = WriteDataParams(DP_AUTO_VIDEO, (float)1);
  641. log.Info("SetAutoVideoBrightness", ret);
  642. return ret;
  643. }
  644. public Boolean SetAutoVideoContrast()
  645. {
  646. Boolean ret = WriteDataParams(DP_AUTO_VIDEO, (float)2);
  647. log.Info("SetAutoVideoContrast", ret);
  648. return ret;
  649. }
  650. public Boolean SetAutoVideoBrightnessAndContrast()
  651. {
  652. Boolean ret = WriteDataParams(DP_AUTO_VIDEO, (float)3);
  653. log.Info("SetAutoVideoBrightnessAndContrast", ret);
  654. return ret;
  655. }
  656. #endregion
  657. #region 亮度目标
  658. /// <summary>
  659. /// 读取亮度目标
  660. /// </summary>
  661. /// <returns>true:float or false:NaN</returns>
  662. public float GetAutoBright()
  663. {
  664. float ret = 0;
  665. if (ReadParams(AP_AUTO_BRIGHT, ref ret))
  666. {
  667. log.Info("GetAutoBright " + ret.ToString() + " Success!", true);
  668. return ret;
  669. }
  670. else
  671. {
  672. log.Info("GetAutoBright Faild!", false);
  673. return float.NaN;
  674. }
  675. }
  676. /// <summary>
  677. /// 设置亮度目标
  678. /// </summary>
  679. /// <param name="set">亮度</param>
  680. /// <returns>true or false</returns>
  681. public Boolean SetAutoBright(float set)
  682. {
  683. Boolean ret = WriteParams(AP_AUTO_BRIGHT, set);
  684. log.Info("SetAutoBright = " + set.ToString(), ret);
  685. return ret;
  686. }
  687. #endregion
  688. #region 对比度目标
  689. /// <summary>
  690. /// 读取对比度目标
  691. /// </summary>
  692. /// <returns>true:float or false:NaN</returns>
  693. public float GetAutoContrast()
  694. {
  695. float ret = 0;
  696. if (ReadParams(AP_AUTO_CONTRAST, ref ret))
  697. {
  698. log.Info("GetAutoContrast " + ret.ToString() + " Success!", true);
  699. return ret;
  700. }
  701. else
  702. {
  703. log.Error("GetAutoContrast Faild!", false);
  704. return float.NaN;
  705. }
  706. }
  707. /// <summary>
  708. /// 设置对比度目标
  709. /// </summary>
  710. /// <param name="set">对比度目标</param>
  711. /// <returns>true or false</returns>
  712. public Boolean SetAutoContrast(float set)
  713. {
  714. Boolean ret = WriteParams(AP_AUTO_CONTRAST, set);
  715. log.Info("SetAutoContrast = " + set.ToString(), ret);
  716. return ret;
  717. }
  718. #endregion
  719. #region SEM消像散
  720. /// <summary>
  721. /// 读取消像散X
  722. /// </summary>
  723. /// <returns>true:float or false:NaN</returns>
  724. public float GetAstigmatismX()
  725. {
  726. float ret = 0;
  727. if (ReadParams(AP_STIG_X, ref ret))
  728. {
  729. log.Info("GetAstigmatismX " + ret.ToString() + " Success!", true);
  730. return ret;
  731. }
  732. else
  733. {
  734. log.Error("GetAstigmatismX Faild!", false);
  735. return float.NaN;
  736. }
  737. }
  738. /// <summary>
  739. /// 读取消像散Y
  740. /// </summary>
  741. /// <returns>true:float or false:NaN</returns>
  742. public float GetAstigmatismY()
  743. {
  744. float ret = 0;
  745. if (ReadParams(AP_STIG_Y, ref ret))
  746. {
  747. log.Info("GetAstigmatismY " + ret.ToString() + " Success!", true);
  748. return ret;
  749. }
  750. else
  751. {
  752. log.Error("GetAstigmatismY Faild!", false);
  753. return float.NaN;
  754. }
  755. }
  756. /// <summary>
  757. /// 设置消像散X
  758. /// </summary>
  759. /// <param name="set">对比度</param>
  760. /// <returns>true or false</returns>
  761. public Boolean SetAstigmatismX(float set)
  762. {
  763. Boolean ret = WriteParams(AP_STIG_X, set);
  764. log.Info("SetAstigmatismX = " + set.ToString(), ret);
  765. return ret;
  766. }
  767. /// <summary>
  768. /// 设置消像散Y
  769. /// </summary>
  770. /// <param name="set">对比度</param>
  771. /// <returns>true or false</returns>
  772. public Boolean SetAstigmatismY(float set)
  773. {
  774. Boolean ret = WriteParams(AP_STIG_Y, set);
  775. log.Info("SetAstigmatismY = " +set.ToString(), ret);
  776. return ret;
  777. }
  778. #endregion
  779. #region 角度补偿
  780. /// <summary>
  781. /// 读取角度补偿
  782. /// </summary>
  783. /// <returns>true:float or false:NaN</returns>
  784. public float GetTiltAngle()
  785. {
  786. float ret = 0;
  787. if (ReadParams(AP_TILT_ANGLE, ref ret))
  788. {
  789. log.Info("GetTiltAngle " + ret.ToString() + " Success!", true);
  790. return ret;
  791. }
  792. else
  793. {
  794. log.Error("GetTiltAngle Faild!", false);
  795. return float.NaN;
  796. }
  797. }
  798. /// <summary>
  799. /// 角度补偿解锁
  800. /// </summary>
  801. /// <returns></returns>
  802. public Boolean SetTiltAngleOn()
  803. {
  804. Boolean ret = WriteDataParams(DP_TILT_CORRECTION, 1);
  805. log.Info("Set DP_TILT_CORRECTION = 1.", ret);
  806. return ret;
  807. }
  808. /// <summary>
  809. /// 角度补偿锁定
  810. /// </summary>
  811. /// <returns></returns>
  812. public Boolean SetTiltAngleOff()
  813. {
  814. Boolean ret = WriteDataParams(DP_TILT_CORRECTION, 0);
  815. log.Info("Set DP_TILT_CORRECTION = 0.", ret);
  816. return ret;
  817. }
  818. /// <summary>
  819. /// 设置角度补偿
  820. /// </summary>
  821. /// <param name="set">角度补偿</param>
  822. /// <returns>true or false</returns>
  823. public Boolean SetTiltAngle(float set)
  824. {
  825. Boolean ret = false;
  826. //ret = WriteDataParams(DP_TILT_CORRECTION, 1);
  827. //log.Info("Set DP_TILT_CORRECTION = 1.", ret);
  828. ret = WriteParams(AP_TILT_ANGLE, set);
  829. log.Info("SetTiltAngle = " + set.ToString(), ret);
  830. //ret = WriteDataParams(DP_TILT_CORRECTION, 0);
  831. //log.Info("Set DP_TILT_CORRECTION = 0.", ret);
  832. return ret;
  833. }
  834. #endregion
  835. #region 图像大小
  836. public int[] GetImageStore()
  837. {
  838. int[] i_ret = new int[2];
  839. float ret = 0;
  840. if (ReadParams(DP_IMAGE_STORE, ref ret))
  841. {
  842. switch (ret)
  843. {
  844. case 0:
  845. i_ret[0] = 1024;
  846. i_ret[1] = 768;
  847. break;
  848. case 1:
  849. i_ret[0] = 512;
  850. i_ret[1] = 384;
  851. break;
  852. case 2:
  853. i_ret[0] = 2048;
  854. i_ret[1] = 1536;
  855. break;
  856. case 3:
  857. i_ret[0] = 3072;
  858. i_ret[1] = 2304;
  859. break;
  860. case 4:
  861. i_ret[0] = 4096;
  862. i_ret[1] = 3072;
  863. break;
  864. case 5:
  865. i_ret[0] = 5120;
  866. i_ret[1] = 3840;
  867. break;
  868. case 6:
  869. i_ret[0] = 6144;
  870. i_ret[1] = 4608;
  871. break;
  872. case 7:
  873. i_ret[0] = 8192;
  874. i_ret[1] = 6144;
  875. break;
  876. case 8:
  877. i_ret[0] = 12288;
  878. i_ret[1] = 9216;
  879. break;
  880. case 9:
  881. i_ret[0] = 16384;
  882. i_ret[1] = 12288;
  883. break;
  884. case 10:
  885. i_ret[0] = 24576;
  886. i_ret[1] = 18432;
  887. break;
  888. case 11:
  889. i_ret[0] = 32768;
  890. i_ret[1] = 24576;
  891. break;
  892. default:
  893. i_ret[0] = 0;
  894. i_ret[1] = 0;
  895. break;
  896. }
  897. log.Info("GetImageStore=" + i_ret[0].ToString() + "*" + i_ret[1].ToString(), true);
  898. }
  899. else
  900. {
  901. log.Error("GetImageStore Faild!", false);
  902. i_ret[0] = 0;
  903. i_ret[1] = 0;
  904. }
  905. return i_ret;
  906. }
  907. public Boolean SetImageStore(float set)
  908. {
  909. Boolean ret = WriteDataParams("DP_IMAGE_STORE", set);
  910. log.Info("SetImageStore = " + set.ToString(), ret);
  911. return ret;
  912. }
  913. #endregion
  914. #region 扫描周期
  915. public float GetCycleTime()
  916. {
  917. float ret = 0;
  918. if (ReadParams(AP_FRAME_TIME, ref ret))
  919. {
  920. log.Info("GetCycleTime=" + ret.ToString(), true);
  921. }
  922. else
  923. {
  924. log.Error("GetCycleTime Faild!", false);
  925. }
  926. return ret;
  927. }
  928. #endregion
  929. #region SEM电压
  930. /// <summary>
  931. /// 读取电压
  932. /// </summary>
  933. /// <returns>true:float or false:NaN</returns>
  934. public float GetSEMVoltage()
  935. {
  936. float ret = 0;
  937. if (ReadParams(AP_MANUALKV, ref ret))
  938. {
  939. log.Info("SEM_Voltage " + ret.ToString() + " Success!", true);
  940. return ret;
  941. }
  942. else
  943. {
  944. log.Error("SEM_Voltage Faild!", false);
  945. return float.NaN;
  946. }
  947. }
  948. /// <summary>
  949. /// 设置电压
  950. /// </summary>
  951. /// <param name="set">电压</param>
  952. /// <returns>true or false</returns>
  953. public Boolean SetSEMVoltage(float set)
  954. {
  955. Boolean ret = WriteParams(AP_MANUALKV, set);
  956. log.Info("SetSEMVoltage = " + set.ToString(), ret);
  957. return ret;
  958. }
  959. #endregion
  960. #region SEM电流
  961. /// <summary>
  962. /// 读取电流
  963. /// </summary>
  964. /// <returns>true:float or false:NaN</returns>
  965. public float GetSEMIPROBE()
  966. {
  967. float ret = 0;
  968. if (ReadParams(AP_IPROBE, ref ret))
  969. {
  970. log.Info("SEM_IPROBE " + ret.ToString() + " Success!", true);
  971. return ret;
  972. }
  973. else
  974. {
  975. log.Error("SEM_IPROBE Faild!", false);
  976. return float.NaN;
  977. }
  978. }
  979. /// <summary>
  980. /// 设置电流
  981. /// </summary>
  982. /// <param name="set">电流</param>
  983. /// <returns>true or false</returns>
  984. public Boolean SetSEMIPROBE(float set)
  985. {
  986. Boolean ret = WriteParams(AP_IPROBE, set);
  987. log.Info("SetSEMIPROBE = " + set.ToString(), ret);
  988. return ret;
  989. }
  990. #endregion
  991. #region 抓取图像
  992. /// <summary>
  993. /// 抓取图像
  994. /// </summary>
  995. /// <returns>true:float or false:NaN</returns>
  996. public Boolean GrabImage(String filename, short xoff,short yoff, short width,short height,short type)
  997. {
  998. if (m_bInitialised)
  999. {
  1000. long lrt = CZEMApi.Grab(xoff, yoff, width, height, type, filename);
  1001. if (lrt != 0)
  1002. {
  1003. log.Error("GrabImage Faild!", false);
  1004. return false;
  1005. }
  1006. else
  1007. {
  1008. log.Info("GrabImage Filename=" + filename + ",x,y,w,h,type=" + xoff.ToString() + "," +
  1009. yoff.ToString() + "," + width.ToString() + "," + height.ToString() + "," + type.ToString(), true);
  1010. while (true)
  1011. {
  1012. Thread.Sleep(1000);
  1013. float sta = GetImageFrozen();
  1014. if (sta == 1)
  1015. {
  1016. log.Info("ImageLive", true);
  1017. ImageLive();
  1018. break;
  1019. }
  1020. }
  1021. return true;
  1022. }
  1023. }
  1024. else
  1025. {
  1026. log.Error("GrabImage m_bInitialised = False!", false);
  1027. return false;
  1028. }
  1029. }
  1030. #endregion
  1031. #region 小面积抓取图像
  1032. /// <summary>
  1033. /// 小面积抓取图像
  1034. /// </summary>
  1035. /// <returns>true:float or false:NaN</returns>
  1036. public Boolean GrabZoneImage(String filename, short xoff, short yoff, short width, short height, short type)
  1037. {
  1038. if (m_bInitialised)
  1039. {
  1040. float frametime = 0;
  1041. ReadParams("AP_FRAME_TIME", ref frametime);
  1042. ExecuteCmd("CMD_UNFREEZE_ZONE");
  1043. Thread.Sleep((int)frametime + 200);
  1044. ExecuteCmd("CMD_FREEZE_ZONE");
  1045. Thread.Sleep((int)frametime + 200);
  1046. CZEMApi.Grab(xoff, yoff, width, height, type, filename);
  1047. return true;
  1048. }
  1049. else
  1050. {
  1051. log.Error("GrabImage m_bInitialised = False!", false);
  1052. return false;
  1053. }
  1054. }
  1055. #endregion
  1056. #region 图像解冻
  1057. public float GetImageFrozen()
  1058. {
  1059. float ret = 0;
  1060. if (ReadParams(DP_FROZEN, ref ret))
  1061. {
  1062. log.Info("GetImageFrozen " + ret.ToString() + " Success!", true);
  1063. return ret;
  1064. }
  1065. else
  1066. {
  1067. log.Error("GetImageFrozen Faild!", false);
  1068. return float.NaN;
  1069. }
  1070. }
  1071. public Boolean ImageFrozen()
  1072. {
  1073. Boolean ret = WriteDataParams(DP_FROZEN, (float)1);
  1074. log.Info("ImageFrozen!", ret);
  1075. return ret;
  1076. }
  1077. public Boolean ImageLive()
  1078. {
  1079. Boolean ret = WriteDataParams(DP_FROZEN, (float)0);
  1080. log.Info("ImageLive!", ret);
  1081. return ret;
  1082. }
  1083. #endregion
  1084. #region 图像类型切换
  1085. public Boolean DetectorType(float set)
  1086. {
  1087. Boolean ret = WriteDataParams(DP_DETECTOR_TYPE, set);
  1088. log.Info("DetectorType = " + set.ToString(), ret);
  1089. return ret;
  1090. }
  1091. #endregion
  1092. #region SEM电子束移动接口
  1093. /// <summary>
  1094. /// 获取电子束移动接口X
  1095. /// </summary>
  1096. /// <returns>true:float or false:NaN</returns>
  1097. public float GetBeamShiftX()
  1098. {
  1099. float ret = 0;
  1100. if (ReadParams(AP_BEAMSHIFT_X, ref ret))
  1101. {
  1102. log.Info("GetBeamShiftX " + ret.ToString() + " Success!", true);
  1103. return ret;
  1104. }
  1105. else
  1106. {
  1107. log.Error("GetBeamShiftX Faild!", false);
  1108. return float.NaN;
  1109. }
  1110. }
  1111. /// <summary>
  1112. /// 获取电子束移动接口Y
  1113. /// </summary>
  1114. /// <returns>true:float or false:NaN</returns>
  1115. public float GetBeamShiftY()
  1116. {
  1117. float ret = 0;
  1118. if (ReadParams(AP_BEAMSHIFT_Y, ref ret))
  1119. {
  1120. log.Info("GetBeamShiftY " + ret.ToString() + " Success!", true);
  1121. return ret;
  1122. }
  1123. else
  1124. {
  1125. log.Error("GetBeamShiftY Faild!", false);
  1126. return float.NaN;
  1127. }
  1128. }
  1129. /// <summary>
  1130. /// 设置电子束移动接口X
  1131. /// </summary>
  1132. /// <param name="set">X坐标</param>
  1133. /// <returns>true or false</returns>
  1134. public Boolean SetBeamShiftX(float set)
  1135. {
  1136. Boolean ret = WriteParams(AP_BEAMSHIFT_X, set);
  1137. log.Info("SetBeamShiftX=" + set.ToString(), ret);
  1138. return ret;
  1139. }
  1140. /// <summary>
  1141. /// 设置电子束移动接口Y
  1142. /// </summary>
  1143. /// <param name="set">X坐标</param>
  1144. /// <returns>true or false</returns>
  1145. public Boolean SetBeamShiftY(float set)
  1146. {
  1147. Boolean ret = WriteParams(AP_BEAMSHIFT_Y, set);
  1148. log.Info("SetBeamShiftY=" + set.ToString(), ret);
  1149. return ret;
  1150. }
  1151. #endregion
  1152. #region SEM电子束移动距离接口
  1153. /// <summary>
  1154. /// 获取电子束移动距离接口X值
  1155. /// </summary>
  1156. /// <returns>true:float or false:NaN</returns>
  1157. public float GetBeamOffsetX()
  1158. {
  1159. float ret = 0;
  1160. if (ReadParams(AP_BEAM_OFFSET_X, ref ret))
  1161. {
  1162. log.Info("AP_BEAM_OFFSET_X " + ret.ToString() + " Success!", true);
  1163. return ret;
  1164. }
  1165. else
  1166. {
  1167. log.Error("AP_BEAM_OFFSET_X Faild!", false);
  1168. return float.NaN;
  1169. }
  1170. }
  1171. /// <summary>
  1172. /// 获取电子束移动距离接口Y值
  1173. /// </summary>
  1174. /// <returns>true:float or false:NaN</returns>
  1175. public float GetBeamOffsetY()
  1176. {
  1177. float ret = 0;
  1178. if (ReadParams(AP_BEAM_OFFSET_Y, ref ret))
  1179. {
  1180. log.Info("AP_BEAM_OFFSET_Y " + ret.ToString() + " Success!", true);
  1181. return ret;
  1182. }
  1183. else
  1184. {
  1185. log.Error("AP_BEAM_OFFSET_Y Faild!", false);
  1186. return float.NaN;
  1187. }
  1188. }
  1189. /// <summary>
  1190. /// 设置电子束移动距离接口X值
  1191. /// </summary>
  1192. /// <param name="set">X坐标</param>
  1193. /// <returns>true or false</returns>
  1194. public Boolean SetBeamOffsetX(float set)
  1195. {
  1196. Boolean ret = WriteParams(AP_BEAM_OFFSET_X, set);
  1197. log.Info("AP_BEAM_OFFSET_X=" + set.ToString(), ret);
  1198. return ret;
  1199. }
  1200. /// <summary>
  1201. /// 设置电子束移动接口Y
  1202. /// </summary>
  1203. /// <param name="set">X坐标</param>
  1204. /// <returns>true or false</returns>
  1205. public Boolean SetBeamOffsetY(float set)
  1206. {
  1207. Boolean ret = WriteParams(AP_BEAM_OFFSET_Y, set);
  1208. log.Info("AP_BEAM_OFFSET_Y=" + set.ToString(), ret);
  1209. return ret;
  1210. }
  1211. #endregion
  1212. #region 样品台移动接口
  1213. /// <summary>
  1214. /// 返回样品台坐标数组
  1215. /// </summary>
  1216. /// <returns>Lenght=6</returns>
  1217. public float[] GetStagePosition()
  1218. {
  1219. object retx = new VariantWrapper((float)0.0f);
  1220. object rety = new VariantWrapper((float)0.0f);
  1221. object retz = new VariantWrapper((float)0.0f);
  1222. object rett = new VariantWrapper((float)0.0f);
  1223. object retr = new VariantWrapper((float)0.0f);
  1224. object retm = new VariantWrapper((float)0.0f);
  1225. float[] ret = new float[6];
  1226. if (m_bInitialised)
  1227. {
  1228. CZEMApi.GetStagePosition(ref retx, ref rety, ref retz, ref rett, ref retr, ref retm);
  1229. ret[0] = Convert.ToSingle(retx);
  1230. ret[1] = Convert.ToSingle(rety);
  1231. ret[2] = Convert.ToSingle(retz);
  1232. ret[3] = Convert.ToSingle(rett);
  1233. ret[4] = Convert.ToSingle(retr);
  1234. ret[5] = Convert.ToSingle(retm);
  1235. log.Info("GetStagePosition x,y,z,t,r,m = " + retx.ToString() + "," + rety.ToString() +
  1236. "," + retz.ToString() + "," + rett.ToString() + "," + retr.ToString() + "," + retm.ToString(), true);
  1237. }
  1238. else
  1239. {
  1240. ret[0] = float.NaN;
  1241. ret[1] = float.NaN;
  1242. ret[2] = float.NaN;
  1243. ret[3] = float.NaN;
  1244. ret[4] = float.NaN;
  1245. ret[5] = float.NaN;
  1246. log.Error("GetStagePosition Faild!", false);
  1247. }
  1248. return ret;
  1249. }
  1250. /// <summary>
  1251. /// 设置样品台坐标数组
  1252. /// </summary>
  1253. /// <returns>Lenght=6</returns>
  1254. private Boolean SetStagePosition(float[] set)
  1255. {
  1256. if (m_bInitialised)
  1257. {
  1258. long lrt = CZEMApi.MoveStage(set[0], set[1], set[2], set[3], set[4], set[5]);
  1259. if(lrt==0)
  1260. {
  1261. log.Info("SetStagePosition x,y,z,t,r,m = " + set[0].ToString() + "," + set[1].ToString() +
  1262. "," + set[2].ToString() + "," + set[3].ToString() + "," + set[4].ToString() + "," + set[5].ToString(), true);
  1263. return true;
  1264. }
  1265. else
  1266. {
  1267. log.Error("SetStagePosition Faild!", false);
  1268. return false;
  1269. }
  1270. }
  1271. else
  1272. {
  1273. log.Error("SetStagePosition m_bInitialised = false!", false);
  1274. return false;
  1275. }
  1276. }
  1277. /// <summary>
  1278. /// 样品台位置 X轴
  1279. /// </summary>
  1280. /// <returns>true:float or false:NaN</returns>
  1281. public float GetStageAtX()
  1282. {
  1283. float ret = 0;
  1284. if (ReadParams(AP_STAGE_AT_X, ref ret))
  1285. {
  1286. log.Info("GetStageAtX Success!", true);
  1287. return ret;
  1288. }
  1289. else
  1290. {
  1291. log.Error("GetStageAtX Faild!", false);
  1292. return float.NaN;
  1293. }
  1294. }
  1295. /// <summary>
  1296. /// 样品台位置 Y轴
  1297. /// </summary>
  1298. /// <returns>true:float or false:NaN</returns>
  1299. public float GetStageAtY()
  1300. {
  1301. float ret = 0;
  1302. if (ReadParams(AP_STAGE_AT_Y, ref ret))
  1303. {
  1304. log.Info("GetStageAtY Success!", true);
  1305. return ret;
  1306. }
  1307. else
  1308. {
  1309. log.Error("GetStageAtY Faild!", false);
  1310. return float.NaN;
  1311. }
  1312. }
  1313. /// <summary>
  1314. /// 样品台位置 Z轴
  1315. /// </summary>
  1316. /// <returns>true:float or false:NaN</returns>
  1317. public float GetStageAtZ()
  1318. {
  1319. float ret = 0;
  1320. if (ReadParams(AP_STAGE_AT_Z, ref ret))
  1321. {
  1322. log.Info("GetStageAtZ Success!", true);
  1323. return ret;
  1324. }
  1325. else
  1326. {
  1327. log.Error("GetStageAtZ Faild!", false);
  1328. return float.NaN;
  1329. }
  1330. }
  1331. /// <summary>
  1332. /// 样品台位置 T轴
  1333. /// </summary>
  1334. /// <returns>true:float or false:NaN</returns>
  1335. public float GetStageAtT()
  1336. {
  1337. float ret = 0;
  1338. if (ReadParams(AP_STAGE_AT_T, ref ret))
  1339. {
  1340. log.Info("GetStageAtT Success!", true);
  1341. return ret;
  1342. }
  1343. else
  1344. {
  1345. log.Error("GetStageAtT Faild!", false);
  1346. return float.NaN;
  1347. }
  1348. }
  1349. /// <summary>
  1350. /// 样品台位置 R轴
  1351. /// </summary>
  1352. /// <returns>true:float or false:NaN</returns>
  1353. public float GetStageAtR()
  1354. {
  1355. float ret = 0;
  1356. if (ReadParams(AP_STAGE_AT_R, ref ret))
  1357. {
  1358. log.Info("GetStageAtR Success!", true);
  1359. return ret;
  1360. }
  1361. else
  1362. {
  1363. log.Error("GetStageAtR Faild!", false);
  1364. return float.NaN;
  1365. }
  1366. }
  1367. /// <summary>
  1368. /// 样品台位置 M轴
  1369. /// </summary>
  1370. /// <returns>true:float or false:NaN</returns>
  1371. public float GetStageAtM()
  1372. {
  1373. float ret = 0;
  1374. if (ReadParams(AP_STAGE_AT_M, ref ret))
  1375. {
  1376. log.Info("GetStageAtM Success!", true);
  1377. return ret;
  1378. }
  1379. else
  1380. {
  1381. log.Error("GetStageAtM Faild!", false);
  1382. return float.NaN;
  1383. }
  1384. }
  1385. /// <summary>
  1386. /// 样品台位置 X轴
  1387. /// </summary>
  1388. /// <param name="set">X轴移动坐标</param>
  1389. /// <returns></returns>
  1390. public Boolean SetStageGotoX(float set)
  1391. {
  1392. Boolean ret = WriteParams(AP_STAGE_GOTO_X, set);
  1393. log.Info("SetStageGotoX = " + set.ToString(), ret);
  1394. return ret;
  1395. }
  1396. /// <summary>
  1397. /// 样品台位置 Y轴
  1398. /// </summary>
  1399. /// <param name="set">Y轴移动坐标</param>
  1400. /// <returns></returns>
  1401. public Boolean SetStageGotoY(float set)
  1402. {
  1403. Boolean ret = WriteParams(AP_STAGE_GOTO_Y, set);
  1404. log.Info("SetStageGotoY = " + set.ToString(), ret);
  1405. return ret;
  1406. }
  1407. /// <summary>
  1408. /// 样品台位置 Z轴
  1409. /// </summary>
  1410. /// <param name="set">Y轴移动坐标</param>
  1411. /// <returns></returns>
  1412. public Boolean SetStageGotoZ(float set)
  1413. {
  1414. Boolean ret = WriteParams(AP_STAGE_GOTO_Z, set);
  1415. log.Info("SetStageGotoZ = " + set.ToString(), ret);
  1416. return ret;
  1417. }
  1418. /// <summary>
  1419. /// 样品台位置 T轴
  1420. /// </summary>
  1421. /// <param name="set">Y轴移动坐标</param>
  1422. /// <returns></returns>
  1423. public Boolean SetStageGotoT(float set)
  1424. {
  1425. Boolean ret = WriteParams(AP_STAGE_GOTO_T, set);
  1426. log.Info("SetStageGotoT = " + set.ToString(), ret);
  1427. return ret;
  1428. }
  1429. /// <summary>
  1430. /// 样品台位置 R轴
  1431. /// </summary>
  1432. /// <param name="set">Y轴移动坐标</param>
  1433. /// <returns></returns>
  1434. public Boolean SetStageGotoR(float set)
  1435. {
  1436. Boolean ret = WriteParams(AP_STAGE_GOTO_R, set);
  1437. log.Info("SetStageGotoR = " + set.ToString(), ret);
  1438. return ret;
  1439. }
  1440. /// <summary>
  1441. /// 样品台位置 R轴拉直
  1442. /// </summary>
  1443. /// <param name="set">R轴拉直角度</param>
  1444. /// <returns></returns>
  1445. public Boolean SetStageDeltaR(float set)
  1446. {
  1447. Boolean ret = WriteParams(AP_STAGE_DELTA_R, set);
  1448. log.Info("AP_STAGE_DELTA_R = " + set.ToString(), ret);
  1449. return ret;
  1450. }
  1451. /// <summary>
  1452. /// 样品台位置 M轴
  1453. /// </summary>
  1454. /// <param name="set">M轴移动坐标</param>
  1455. /// <returns></returns>
  1456. public Boolean SetStageGotoM(float set)
  1457. {
  1458. Boolean ret = WriteParams(AP_STAGE_GOTO_M, set);
  1459. log.Info("SetStageGotoM = " + set.ToString(), ret);
  1460. return ret;
  1461. }
  1462. #endregion
  1463. #region 移动样品台XY轴
  1464. public Boolean MoveStageXY(float x,float y)
  1465. {
  1466. //先取范围
  1467. object xMin = new VariantWrapper((float)0.0f);
  1468. object xMax = new VariantWrapper((float)0.0f);
  1469. long lrt = CZEMApi.GetLimits(AP_STAGE_GOTO_X, ref xMin, ref xMax);
  1470. if (lrt != 0)
  1471. {
  1472. log.Error("GetLimits AP_STAGE_GOTO_X Faild!", false);
  1473. return false;
  1474. }
  1475. if (x > Convert.ToSingle(xMax) || x < Convert.ToSingle(xMin))
  1476. {
  1477. log.Error("GetLimits AP_STAGE_GOTO_X Max,Min,x = " + xMax.ToString() + "," + xMin.ToString() +
  1478. "," + x.ToString(), false);
  1479. return false;
  1480. }
  1481. object yMin = new VariantWrapper((float)0.0f);
  1482. object yMax = new VariantWrapper((float)0.0f);
  1483. lrt = CZEMApi.GetLimits(AP_STAGE_GOTO_Y, ref yMin, ref yMax);
  1484. if (lrt != 0)
  1485. {
  1486. log.Error("GetLimits AP_STAGE_GOTO_Y Faild!", false);
  1487. return false;
  1488. }
  1489. if (y > Convert.ToSingle(yMax) || y < Convert.ToSingle(yMin))
  1490. {
  1491. log.Error("GetLimits AP_STAGE_GOTO_Y Max,Min,y = " + yMax.ToString() + "," + yMin.ToString() +
  1492. "," + y.ToString(), false);
  1493. return false;
  1494. }
  1495. float[] gsp = GetStagePosition();
  1496. gsp[0] = x;
  1497. gsp[1] = y;
  1498. return SetStagePosition(gsp);
  1499. }
  1500. #endregion
  1501. #region 样品台急停
  1502. public Boolean CmdStageAbort()
  1503. {
  1504. Boolean ret = ExecuteCmd(CMD_STAGE_ABORT);
  1505. log.Info("CmdStageAbort!", ret);
  1506. return ret;
  1507. }
  1508. #endregion
  1509. #region Scan Rotate角度接口
  1510. /// <summary>
  1511. /// 获取Scan Rotate角度接口
  1512. /// </summary>
  1513. /// <returns>true:float or false:NaN</returns>
  1514. public float GetScanRotation()
  1515. {
  1516. float ret = 0;
  1517. if (ReadParams(AP_SCANROTATION, ref ret))
  1518. {
  1519. log.Info("GetScanRotation Success!", true);
  1520. return ret;
  1521. }
  1522. else
  1523. {
  1524. log.Error("GetScanRotation Faild!", false);
  1525. return float.NaN;
  1526. }
  1527. }
  1528. /// <summary>
  1529. /// ScanRotation解锁
  1530. /// </summary>
  1531. /// <returns></returns>
  1532. public Boolean SetScanRotationOn()
  1533. {
  1534. Boolean ret = WriteDataParams(DP_SCAN_ROT, 1);
  1535. log.Info("SetScanRotation DP_SCAN_ROT = 1", ret);
  1536. return ret;
  1537. }
  1538. /// <summary>
  1539. /// ScanRotation锁定
  1540. /// </summary>
  1541. /// <returns></returns>
  1542. public Boolean SetScanRotationOff()
  1543. {
  1544. Boolean ret = WriteDataParams(DP_SCAN_ROT, 0);
  1545. log.Info("SetScanRotation DP_SCAN_ROT = 0", ret);
  1546. return ret;
  1547. }
  1548. /// <summary>
  1549. /// 设置Scan Rotate角度接口
  1550. /// </summary>
  1551. /// <param name="set">角度补偿</param>
  1552. /// <returns>true or false</returns>
  1553. public Boolean SetScanRotation(float set)
  1554. {
  1555. Boolean ret = false;
  1556. //ret = WriteDataParams(DP_SCAN_ROT, 1);
  1557. //log.Info("SetScanRotation DP_SCAN_ROT = 1", ret);
  1558. ret = WriteParams(AP_SCANROTATION, set);
  1559. log.Info("SetScanRotation = " + set.ToString(), ret);
  1560. //ret = WriteDataParams(DP_SCAN_ROT, 0);
  1561. //log.Info("SetScanRotation DP_SCAN_ROT = 0", ret);
  1562. return ret;
  1563. }
  1564. #endregion
  1565. #region 像素读取PixelSize
  1566. /// <summary>
  1567. /// 获取Pixel Size 接口,只读
  1568. /// </summary>
  1569. /// <returns>true:float or false:NaN</returns>
  1570. public float GetPixelSize()
  1571. {
  1572. float ret = 0;
  1573. if (ReadParams(AP_PIXEL_SIZE, ref ret))
  1574. {
  1575. log.Info("GetPixelSize " + ret.ToString() + " Success!", true);
  1576. return ret;
  1577. }
  1578. else
  1579. {
  1580. log.Info("GetPixelSize Faild!", false);
  1581. return float.NaN;
  1582. }
  1583. }
  1584. #endregion
  1585. #region 电子束校正设置
  1586. /// <summary>
  1587. /// 读取电子束校正状态
  1588. /// </summary>
  1589. /// <returns></returns>
  1590. public float GetTiltCorrection()
  1591. {
  1592. float ret = 0;
  1593. if (ReadParams(DP_TILT_CORRECTION, ref ret))
  1594. {
  1595. log.Info("GetTiltCorrection " + ret.ToString() + " Success!", true);
  1596. return ret;
  1597. }
  1598. else
  1599. {
  1600. log.Error("GetTiltCorrection Faild!", false);
  1601. return float.NaN;
  1602. }
  1603. }
  1604. /// <summary>
  1605. /// 设置电子束校正状态
  1606. /// </summary>
  1607. /// <param name="set"></param>
  1608. /// <returns></returns>
  1609. public Boolean SetTiltCorrectionOff()
  1610. {
  1611. Boolean ret = WriteDataParams(DP_TILT_CORRECTION, (float)0);
  1612. log.Info("SetTiltCorrectionOff!", ret);
  1613. return ret;
  1614. }
  1615. public Boolean SetTiltCorrectionOn()
  1616. {
  1617. Boolean ret = WriteDataParams(DP_TILT_CORRECTION, (float)1);
  1618. log.Info("SetTiltCorrectionOn!", ret);
  1619. return ret;
  1620. }
  1621. #endregion
  1622. #region 开启电压
  1623. public Boolean CmdOpenVoltage()
  1624. {
  1625. Boolean ret = ExecuteCmd(CMD_BEAM_ON);
  1626. log.Info("CmdOpenVoltage!", ret);
  1627. return ret;
  1628. }
  1629. #endregion
  1630. #region 关闭电压
  1631. public Boolean CmdCloseVoltage()
  1632. {
  1633. Boolean ret = ExecuteCmd(CMD_EHT_OFF);
  1634. log.Info("CmdCloseVoltage!", ret);
  1635. return ret;
  1636. }
  1637. #endregion
  1638. #region 自动对焦1
  1639. public Boolean CmdAutoFocusCoarse()
  1640. {
  1641. Boolean ret = ExecuteCmd(CMD_AUTO_FOCUS_COARSE);
  1642. log.Info("CmdAutoFocusCoarse!", ret);
  1643. return ret;
  1644. }
  1645. #endregion
  1646. #region 自动对焦2
  1647. public Boolean CmdAutoFocusFine()
  1648. {
  1649. Boolean ret = ExecuteCmd(CMD_AUTO_FOCUS_FINE);
  1650. log.Info("CmdAutoFocusFine!", ret);
  1651. return ret;
  1652. }
  1653. #endregion
  1654. #region 自动消像散
  1655. public Boolean CmdAutoStig()
  1656. {
  1657. Boolean ret = ExecuteCmd(CMD_AUTO_STIG);
  1658. log.Info("CmdAutoStig!", ret);
  1659. return ret;
  1660. }
  1661. #endregion
  1662. #region 调用宏文件命令
  1663. public Boolean CMDMCFFilename(String _MLFFullFileName)
  1664. {
  1665. //String CMDMCF = MCF_FILENAME + filename;
  1666. //Boolean ret = ExecuteCmd(CMDMCF);
  1667. //log.Info("CMDMCFFilename = " + filename, ret);
  1668. //return ret;
  1669. if (File.Exists(_MLFFullFileName) )
  1670. {
  1671. //移动文件
  1672. //if (_MLFFullFileName != (MLFPATH + MLFFILENAME))
  1673. //{
  1674. // File.Copy(_MLFFullFileName, MLFPATH + MLFFILENAME, true);
  1675. // log.Info("CmdFIBLoadMLF Copy FileName:" + _MLFFullFileName + " To " + MLFPATH + MLFFILENAME, true);
  1676. // try
  1677. // {
  1678. if (REMOTEDesMLFPATH != "")
  1679. {
  1680. File.Copy(_MLFFullFileName, REMOTEDesMLFPATH + MLFFILENAME, true);
  1681. log.Info("CmdFIBLoadELY Success Execute " + _MLFFullFileName + "to " + REMOTEDesMLFPATH + MLFFILENAME);
  1682. }
  1683. // }
  1684. // catch { }
  1685. //}
  1686. Boolean ret = ExecuteCmd(MCF_FILENAME + MLFFILENAME.Substring(0,MLFFILENAME.Length-4));
  1687. log.Info("CmdFIBLoadMLF Success Execute " + _MLFFullFileName, true);
  1688. return ret;
  1689. }
  1690. else
  1691. {
  1692. log.Error("CmdFIBLoadMLF Faild:" + _MLFFullFileName + " Is Not Exists!", false);
  1693. return false;
  1694. }
  1695. }
  1696. #endregion
  1697. #region 读取样品台状态
  1698. public float GetStageIs()
  1699. {
  1700. float ret = 0;
  1701. if (ReadParams(DP_STAGE_IS, ref ret))
  1702. {
  1703. log.Info("GetStageIs " + ret.ToString() + " Success!", true);
  1704. return ret;
  1705. }
  1706. else
  1707. {
  1708. log.Error("GetStageIs Faild!", false);
  1709. return float.NaN;
  1710. }
  1711. }
  1712. #endregion
  1713. #region 读取自动函数的状态
  1714. public float GetAutoFunction()
  1715. {
  1716. float ret = 0;
  1717. if (ReadParams(DP_AUTO_FUNCTION, ref ret))
  1718. {
  1719. log.Info("GetAutoFunction " + ret.ToString() + " Success!", true);
  1720. return ret;
  1721. }
  1722. else
  1723. {
  1724. log.Error("GetAutoFunction Faild!", false);
  1725. return float.NaN;
  1726. }
  1727. }
  1728. #endregion
  1729. #region FIB缩放
  1730. /// <summary>
  1731. /// 读取缩放倍数
  1732. /// </summary>
  1733. /// <returns>true:float or false:NaN</returns>
  1734. public float GetFIBMagnification()
  1735. {
  1736. float ret = 0;
  1737. if (ReadParams(AP_FIB_MAGNIFICATION, ref ret))
  1738. {
  1739. log.Info("GetFIBMagnification " + ret.ToString() + " Success!", true);
  1740. return ret;
  1741. }
  1742. else
  1743. {
  1744. log.Error("GetFIBMagnification Faild!", false);
  1745. return float.NaN;
  1746. }
  1747. }
  1748. /// <summary>
  1749. /// 设置缩放倍数
  1750. /// </summary>
  1751. /// <param name="set">倍数</param>
  1752. /// <returns>true or false</returns>
  1753. public Boolean SetFIBMagnification(float set)
  1754. {
  1755. Boolean ret = WriteParams(AP_FIB_MAGNIFICATION, set);
  1756. log.Info("GSetFIBMagnification = " + set.ToString(), ret);
  1757. return ret;
  1758. }
  1759. #endregion
  1760. #region FIB焦距
  1761. /// <summary>
  1762. /// 读取工作距离AP_FIB_OBJECTIVE_POTENTIAL
  1763. /// </summary>
  1764. /// <returns>true:float or false:NaN</returns>
  1765. public float GetFIBObjectivePotential()
  1766. {
  1767. float ret = 0;
  1768. if (ReadParams(AP_FIB_OBJECTIVE_POTENTIAL, ref ret))
  1769. {
  1770. log.Info("GetFIBObjectivePotential " + ret.ToString() + " Success!", true);
  1771. return ret;
  1772. }
  1773. else
  1774. {
  1775. log.Error("GetFIBObjectivePotential Faild!", false);
  1776. return float.NaN;
  1777. }
  1778. }
  1779. /// <summary>
  1780. /// 设置焦距
  1781. /// </summary>
  1782. /// <param name="set">焦距</param>
  1783. /// <returns>true or false</returns>
  1784. public Boolean SetFIBObjectivePotential(float set)
  1785. {
  1786. Boolean ret = WriteParams(AP_FIB_OBJECTIVE_POTENTIAL, set);
  1787. log.Info("SetFIBObjectivePotential = " + set.ToString(), ret);
  1788. return ret;
  1789. }
  1790. #endregion
  1791. #region FIB消像散
  1792. /// <summary>
  1793. /// 读取消像散X
  1794. /// </summary>
  1795. /// <returns>true:float or false:NaN</returns>
  1796. public float GetFIBAstigmatismX()
  1797. {
  1798. float ret = 0;
  1799. if (ReadParams(AP_FIB_STIGMATOR_X, ref ret))
  1800. {
  1801. log.Info("GetFIBAstigmatismX " + ret.ToString() + " Success!", true);
  1802. return ret;
  1803. }
  1804. else
  1805. {
  1806. log.Error("GetFIBAstigmatismX Faild!", false);
  1807. return float.NaN;
  1808. }
  1809. }
  1810. /// <summary>
  1811. /// 读取消像散Y
  1812. /// </summary>
  1813. /// <returns>true:float or false:NaN</returns>
  1814. public float GetFIBAstigmatismY()
  1815. {
  1816. float ret = 0;
  1817. if (ReadParams(AP_FIB_STIGMATOR_Y, ref ret))
  1818. {
  1819. log.Info("GetFIBAstigmatismY " + ret.ToString() + " Success!", true);
  1820. return ret;
  1821. }
  1822. else
  1823. {
  1824. log.Error("GetFIBAstigmatismY Faild!", false);
  1825. return float.NaN;
  1826. }
  1827. }
  1828. /// <summary>
  1829. /// 设置消像散X
  1830. /// </summary>
  1831. /// <param name="set">对比度</param>
  1832. /// <returns>true or false</returns>
  1833. public Boolean SetFIBAstigmatismX(float set)
  1834. {
  1835. Boolean ret = WriteParams(AP_FIB_STIGMATOR_X, set);
  1836. log.Info("SetFIBAstigmatismX = " + set.ToString(), ret);
  1837. return ret;
  1838. }
  1839. /// <summary>
  1840. /// 设置消像散Y
  1841. /// </summary>
  1842. /// <param name="set">对比度</param>
  1843. /// <returns>true or false</returns>
  1844. public Boolean SetFIBAstigmatismY(float set)
  1845. {
  1846. Boolean ret = WriteParams(AP_FIB_STIGMATOR_Y, set);
  1847. log.Info("SetFIBAstigmatismY = " + set.ToString(), ret);
  1848. return ret;
  1849. }
  1850. #endregion
  1851. #region FIB电子束移动接口
  1852. /// <summary>
  1853. /// 获取电子束移动接口X
  1854. /// </summary>
  1855. /// <returns>true:float or false:NaN</returns>
  1856. public float GetFIBBeamShiftX()
  1857. {
  1858. float ret = 0;
  1859. if (ReadParams(AP_FIB_BEAM_SHIFT_X, ref ret))
  1860. {
  1861. log.Info("GetFIBBeamShiftX " + ret.ToString() + " Success!", true);
  1862. return ret;
  1863. }
  1864. else
  1865. {
  1866. log.Error("GetFIBBeamShiftX Faild!", false);
  1867. return float.NaN;
  1868. }
  1869. }
  1870. /// <summary>
  1871. /// 获取电子束移动接口Y
  1872. /// </summary>
  1873. /// <returns>true:float or false:NaN</returns>
  1874. public float GetFIBBeamShiftY()
  1875. {
  1876. float ret = 0;
  1877. if (ReadParams(AP_FIB_BEAM_SHIFT_Y, ref ret))
  1878. {
  1879. log.Info("GetFIBBeamShiftY " + ret.ToString() + " Success!", true);
  1880. return ret;
  1881. }
  1882. else
  1883. {
  1884. log.Error("GetFIBBeamShiftY Faild!", false);
  1885. return float.NaN;
  1886. }
  1887. }
  1888. /// <summary>
  1889. /// 设置电子束移动接口X
  1890. /// </summary>
  1891. /// <param name="set">X坐标</param>
  1892. /// <returns>true or false</returns>
  1893. public Boolean SetFIBBeamShiftX(float set)
  1894. {
  1895. Boolean ret = WriteParams(AP_FIB_BEAM_SHIFT_X, set);
  1896. log.Info("SetFIBBeamShiftX = " + set.ToString(), ret);
  1897. return ret;
  1898. }
  1899. /// <summary>
  1900. /// 设置电子束移动接口Y
  1901. /// </summary>
  1902. /// <param name="set">X坐标</param>
  1903. /// <returns>true or false</returns>
  1904. public Boolean SetFIBBeamShiftY(float set)
  1905. {
  1906. Boolean ret = WriteParams(AP_FIB_BEAM_SHIFT_Y, set);
  1907. log.Info("SetFIBBeamShiftX = " + set.ToString(), ret);
  1908. return ret;
  1909. }
  1910. #endregion
  1911. #region FIB模式
  1912. /// <summary>
  1913. /// 获取FIB模式
  1914. /// </summary>
  1915. /// <returns>true:float or false:NaN</returns>
  1916. public float GetFIBMode()
  1917. {
  1918. float ret = 0;
  1919. if (ReadParams(DP_FIB_MODE, ref ret))
  1920. {
  1921. log.Info("GetFIBMode " + ret.ToString() + " Success!", true);
  1922. return ret;
  1923. }
  1924. else
  1925. {
  1926. log.Error("GetFIBMode Faild!", false);
  1927. return float.NaN;
  1928. }
  1929. }
  1930. #endregion
  1931. #region 工作模式选择
  1932. //SEM模式
  1933. public Boolean CmdFIBModeSEM()
  1934. {
  1935. Boolean ret = ExecuteCmd(CMD_FIB_MODE_SEM);
  1936. log.Info("CmdFIBModeSEM = SEM!", ret);
  1937. return ret;
  1938. }
  1939. //FIB模式
  1940. public Boolean CmdFIBModeFIB()
  1941. {
  1942. Boolean ret = ExecuteCmd(CMD_FIB_MODE_FIB);
  1943. log.Info("CmdFIBModeSEM = FIB!", ret);
  1944. return ret;
  1945. }
  1946. //铣削模式
  1947. public Boolean CmdFIBModeMILL()
  1948. {
  1949. Boolean ret = ExecuteCmd(CMD_FIB_MODE_MILL);
  1950. log.Info("CmdFIBModeSEM = MILL!", ret);
  1951. return ret;
  1952. }
  1953. //SEM+FIB模式
  1954. public Boolean CmdFIBModeSEMAndFIB()
  1955. {
  1956. return ExecuteCmd(CMD_FIB_MODE_SEM_FIB);
  1957. }
  1958. //铣削+SEM模式
  1959. public Boolean CmdFIBModeMILLAndSEM()
  1960. {
  1961. return ExecuteCmd(CMD_FIB_MODE_MILL_SEM);
  1962. }
  1963. //EXT模式
  1964. public Boolean CmdFIBModeEXT()
  1965. {
  1966. return ExecuteCmd(CMD_FIB_MODE_EXT);
  1967. }
  1968. //EXT+SEM模式
  1969. public Boolean CmdFIBModeEXTAndSEM()
  1970. {
  1971. return ExecuteCmd(CMD_FIB_MODE_EXT_SEM);
  1972. }
  1973. //Argon(氩)+SEM模式
  1974. public Boolean CmdFIBModeARGONAndSEM()
  1975. {
  1976. return ExecuteCmd(CMD_FIB_MODE_ARGON_SEM);
  1977. }
  1978. //DRIFT(流)+SEM模式
  1979. public Boolean CmdFIBModeDRIFTAndSEM()
  1980. {
  1981. return ExecuteCmd(CMD_FIB_MODE_DRIFT_SEM);
  1982. }
  1983. //DRIFT(流)+FIB模式
  1984. public Boolean CmdFIBModeDRIFTAndFIB()
  1985. {
  1986. return ExecuteCmd(CMD_FIB_MODE_DRIFT_FIB);
  1987. }
  1988. //Argon(氩)模式
  1989. public Boolean CmdFIBModeARGON()
  1990. {
  1991. return ExecuteCmd(CMD_FIB_MODE_ARGON);
  1992. }
  1993. #endregion
  1994. #region 工作模式读取
  1995. /// <summary>
  1996. /// 工作模式读取
  1997. /// </summary>
  1998. /// <returns>0:SEM 1:FIB 2:MILL</returns>
  1999. public float GetFIBIMAGING()
  2000. {
  2001. float ret = 0;
  2002. if (ReadParams(DP_FIB_IMAGING, ref ret))
  2003. {
  2004. log.Info("GetFIBIMAGING " + ret.ToString() + " Success!", true);
  2005. return ret;
  2006. }
  2007. else
  2008. {
  2009. log.Error("GetFIBIMAGING Faild!", false);
  2010. return float.NaN;
  2011. }
  2012. }
  2013. #endregion
  2014. #region FIB工作状态
  2015. public float GetFIBApiStatus()
  2016. {
  2017. float ret = 0;
  2018. if (ReadParams(DP_SMARTFIB_API_STATUS, ref ret))
  2019. {
  2020. log.Info("GetFIBApiStatus " + ret.ToString() + " Success!", true);
  2021. return ret;
  2022. }
  2023. else
  2024. {
  2025. log.Error("GetFIBApiStatus Faild!", false);
  2026. return float.NaN;
  2027. }
  2028. }
  2029. #endregion
  2030. #region FIB加载.ely文件
  2031. public Boolean CmdFIBLoadELY(String _ELYFullFileName)
  2032. {
  2033. if (File.Exists(_ELYFullFileName) )
  2034. {
  2035. if (REMOTEDesELYPATH != "")
  2036. {
  2037. File.Copy(_ELYFullFileName, REMOTEDesELYPATH + ELYFILENAME, true);
  2038. log.Info("copy " + _ELYFullFileName + " to " + REMOTEDesELYPATH + ELYFILENAME);
  2039. }
  2040. Boolean ret = ExecuteCmd(CMD_SMARTFIB_LOAD_ELY);
  2041. log.Info("CmdFIBLoadELY Success Execute " + _ELYFullFileName, true);
  2042. return ret;
  2043. }
  2044. else
  2045. {
  2046. log.Error("CmdFIBLoadELY Faild:" + _ELYFullFileName + " Is Not Exists!", false);
  2047. return false;
  2048. }
  2049. }
  2050. #endregion
  2051. #region FIB确认.ely文件
  2052. public Boolean CmdFIBEXPOSUREELY()
  2053. {
  2054. Boolean ret = WriteDataParams(DP_PATTERNING_MODE, 2);
  2055. log.Info("DP_PATTERNING_MODE = 2", ret);
  2056. ret = ExecuteCmd(CMD_SMARTFIB_PREPARE_EXPOSURE);
  2057. log.Info("CMD_SMARTFIB_PREPARE_EXPOSURE", ret);
  2058. return ret;
  2059. }
  2060. #endregion
  2061. #region FIB执行.ely文件
  2062. public Boolean CmdFIBSTARTELY()
  2063. {
  2064. Boolean ret = ExecuteCmd(CMD_FIB_START_MILLING);
  2065. log.Info("CMD_FIB_START_MILLING", ret);
  2066. return ret;
  2067. }
  2068. #endregion
  2069. #region 错误代码转义
  2070. private String ErrorToString(long lError)
  2071. {
  2072. string strError;
  2073. switch ((ZeissErrorCode)lError)
  2074. {
  2075. case 0:
  2076. strError = "OK";
  2077. break;
  2078. case ZeissErrorCode.API_E_GET_TRANSLATE_FAIL:
  2079. strError = "Failed to translate parameter into an ID";
  2080. break;
  2081. case ZeissErrorCode.API_E_GET_AP_FAIL:
  2082. strError = "Failed to get analogue value";
  2083. break;
  2084. case ZeissErrorCode.API_E_GET_DP_FAIL:
  2085. strError = "Failed to get digital value";
  2086. break;
  2087. case ZeissErrorCode.API_E_GET_BAD_PARAMETER:
  2088. strError = "Parameter supplied is neither analogue nor digital";
  2089. break;
  2090. case ZeissErrorCode.API_E_SET_TRANSLATE_FAIL:
  2091. strError = "Failed to translate parameter into an ID";
  2092. break;
  2093. case ZeissErrorCode.API_E_SET_STATE_FAIL:
  2094. strError = "Failed to set a digital state";
  2095. break;
  2096. case ZeissErrorCode.API_E_SET_FLOAT_FAIL:
  2097. strError = "Failed to set a float value";
  2098. break;
  2099. case ZeissErrorCode.API_E_SET_FLOAT_LIMIT_LOW:
  2100. strError = "Value supplied is too low";
  2101. break;
  2102. case ZeissErrorCode.API_E_SET_FLOAT_LIMIT_HIGH:
  2103. strError = "Value supplied is too high";
  2104. break;
  2105. case ZeissErrorCode.API_E_SET_BAD_VALUE:
  2106. strError = "Value supplied is of wrong type";
  2107. break;
  2108. case ZeissErrorCode.API_E_SET_BAD_PARAMETER:
  2109. strError = "Parameter supplied is not analogue nor digital";
  2110. break;
  2111. case ZeissErrorCode.API_E_EXEC_TRANSLATE_FAIL:
  2112. strError = "Failed to translate command into an ID";
  2113. break;
  2114. case ZeissErrorCode.API_E_EXEC_CMD_FAIL:
  2115. strError = "Failed to execute command";
  2116. break;
  2117. case ZeissErrorCode.API_E_EXEC_MCF_FAIL:
  2118. strError = "Failed to execute file macro";
  2119. break;
  2120. case ZeissErrorCode.API_E_EXEC_MCL_FAIL:
  2121. strError = "Failed to execute library macro";
  2122. break;
  2123. case ZeissErrorCode.API_E_EXEC_BAD_COMMAND:
  2124. strError = "Command supplied is not implemented";
  2125. break;
  2126. case ZeissErrorCode.API_E_GRAB_FAIL:
  2127. strError = "Grab command failed";
  2128. break;
  2129. case ZeissErrorCode.API_E_GET_STAGE_FAIL:
  2130. strError = "Get Stage position failed";
  2131. break;
  2132. case ZeissErrorCode.API_E_MOVE_STAGE_FAIL:
  2133. strError = "Move Stage position failed";
  2134. break;
  2135. case ZeissErrorCode.API_E_NOT_INITIALISED:
  2136. strError = "API not initialised";
  2137. break;
  2138. case ZeissErrorCode.API_E_NOTIFY_TRANSLATE_FAIL: // 1020L
  2139. strError = "Failed to translate parameter to an ID";
  2140. break;
  2141. case ZeissErrorCode.API_E_NOTIFY_SET_FAIL:
  2142. strError = "Set notification failed";
  2143. break;
  2144. case ZeissErrorCode.API_E_GET_LIMITS_FAIL:
  2145. strError = "Get limits failed";
  2146. break;
  2147. case ZeissErrorCode.API_E_GET_MULTI_FAIL:
  2148. strError = "Get multiple parameters failed";
  2149. break;
  2150. case ZeissErrorCode.API_E_SET_MULTI_FAIL:
  2151. strError = "Set multiple parameters failed";
  2152. break;
  2153. case ZeissErrorCode.API_E_NOT_LICENSED:
  2154. strError = "Missing API license";
  2155. break;
  2156. case ZeissErrorCode.API_E_NOT_IMPLEMENTED:
  2157. strError = "Reserved or not implemented";
  2158. break;
  2159. case ZeissErrorCode.API_E_GET_USER_NAME_FAIL:
  2160. strError = "Failed to get user name";
  2161. break;
  2162. case ZeissErrorCode.API_E_GET_USER_IDLE_FAIL:
  2163. strError = "Failed to get user idle state";
  2164. break;
  2165. case ZeissErrorCode.API_E_GET_LAST_REMOTING_CONNECT_ERROR_FAIL:
  2166. strError = "Failed to get the last remoting connection error string";
  2167. break;
  2168. case ZeissErrorCode.API_E_EMSERVER_LOGON_FAILED:
  2169. strError = "Failed to remotely logon to the EM Server. Username and password may be incorrect or EM Server is not running or User is already logged on";
  2170. break;
  2171. case ZeissErrorCode.API_E_EMSERVER_START_FAILED:
  2172. strError = "Failed to start the EM Server. This may be because the Server is already running or has an internal error.";
  2173. break;
  2174. case ZeissErrorCode.API_E_REMOTING_NOT_CONFIGURED:
  2175. strError = "Remoting incorrectly configured, use RConfigure to correct";
  2176. break;
  2177. case ZeissErrorCode.API_E_REMOTING_FAILED_TO_CONNECT:
  2178. strError = "Remoting did not connect to the server";
  2179. break;
  2180. case ZeissErrorCode.API_E_REMOTING_COULD_NOT_CREATE_INTERFACE:
  2181. strError = "Remoting could not start (unknown reason)";
  2182. break;
  2183. case ZeissErrorCode.API_E_REMOTING_EMSERVER_NOT_RUNNING:
  2184. strError = "EMServer is not running on the remote machine";
  2185. break;
  2186. case ZeissErrorCode.API_E_REMOTING_NO_USER_LOGGED_IN:
  2187. strError = "No user is logged into EM Server on the remote machine";
  2188. break;
  2189. default:
  2190. strError = string.Format("Unknown error code {0}", lError);
  2191. break;
  2192. }
  2193. return strError;
  2194. }
  2195. #endregion
  2196. //20201016 扫图速度
  2197. #region Focus rate add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭
  2198. public Boolean CmdFocusRate(int mFocusSpeed)
  2199. {
  2200. string mTempSpeed = CMD_SCANRATE4;
  2201. switch (mFocusSpeed)
  2202. {
  2203. case 3:
  2204. mTempSpeed= CMD_SCANRATE3; break;
  2205. case 4:
  2206. mTempSpeed = CMD_SCANRATE4; break;
  2207. case 5:
  2208. mTempSpeed = CMD_SCANRATE5; break;
  2209. case 6:
  2210. mTempSpeed = CMD_SCANRATE6; break;
  2211. case 7:
  2212. mTempSpeed = CMD_SCANRATE7; break;
  2213. case 8:
  2214. mTempSpeed = CMD_SCANRATE8; break;
  2215. case 9:
  2216. mTempSpeed = CMD_SCANRATE9; break;
  2217. case 10:
  2218. mTempSpeed = CMD_SCANRATE10; break;
  2219. default:
  2220. break;
  2221. }
  2222. Boolean ret = ExecuteCmd(mTempSpeed);
  2223. log.Info("调整扫描速度为====="+ mTempSpeed + "===是否成功"+ ret, true); //CMD_SCANRATE4!
  2224. return ret;
  2225. }
  2226. public Boolean CmdFocusScanSpeed(String mFocusSpeed)
  2227. {
  2228. Boolean ret = ExecuteCmd(mFocusSpeed);
  2229. log.Info("调整扫描速度为 " + mFocusSpeed + " " + ret.ToString(), true);
  2230. return ret;
  2231. }
  2232. #endregion add by sun 2020-12-15 拍截面图调用蔡司接口时,要保证扫描速度5以上,自动亮度对比度功能关闭 end
  2233. #region Save rate
  2234. public Boolean CmdSaveRate()
  2235. {
  2236. //Boolean ret = ExecuteCmd(CMD_SCANRATE6);
  2237. //log.Info("CMD_SCANRATE6!", ret);
  2238. Boolean ret = ExecuteCmd(CMD_SCANRATE7);
  2239. log.Info("CMD_SCANRATE7!", ret);
  2240. //Boolean ret = ExecuteCmd(CMD_SCANRATE8);
  2241. //log.Info("CMD_SCANRATE8!", ret);
  2242. //Boolean ret = ExecuteCmd(CMD_SCANRATE9);
  2243. //log.Info("CMD_SCANRATE9!", ret);
  2244. return ret;
  2245. }
  2246. #endregion
  2247. #region Save best rate
  2248. public Boolean CmdSaveBestRate()
  2249. {
  2250. Boolean ret = ExecuteCmd(CMD_SCANRATE8);
  2251. log.Info("CMD_SCANRATE8!", ret);
  2252. return ret;
  2253. }
  2254. #endregion
  2255. #region line scan
  2256. public Boolean CmdLineScan()
  2257. {
  2258. Boolean ret = ExecuteCmd(CMD_LINE_AVG);
  2259. log.Info("CMD_LINE_AVG!", ret);
  2260. Thread.Sleep(200);
  2261. CZEMApi.Set("DP_SCANRATE", new VariantWrapper((float)3));
  2262. Thread.Sleep(200);
  2263. CZEMApi.Set("AP_NR_COEFF", new VariantWrapper((float)30));
  2264. Thread.Sleep(200);
  2265. return ret;
  2266. }
  2267. #endregion
  2268. #region pixel scan
  2269. public Boolean CmdPixelScan()
  2270. {
  2271. Boolean ret = ExecuteCmd(CMD_PIXNR);
  2272. log.Info("CMD_PIXNR!", ret);
  2273. Thread.Sleep(200);
  2274. CZEMApi.Set("DP_SCANRATE", new VariantWrapper((float)3));
  2275. Thread.Sleep(200);
  2276. return ret;
  2277. }
  2278. #endregion
  2279. //20201102 远程服务地址
  2280. public void SetRemoteDesELYPath(String path)
  2281. {
  2282. this.REMOTEDesELYPATH = path;
  2283. }
  2284. public void SetRemoteDesMLFPath(String path)
  2285. {
  2286. this.REMOTEDesMLFPATH = path;
  2287. }
  2288. public void SetReduced(int x, int y, int W, int H)
  2289. {
  2290. CZEMApi.Execute("CMD_MODE_NORMAL");
  2291. int X = (int)Math.Floor((double)((1024 - W) / 2.0));
  2292. int Y = (int)Math.Floor((double)((768 - H) / 2.0));
  2293. CZEMApi.Set("AP_RED_RASTER_W", new VariantWrapper((float)W));
  2294. CZEMApi.Set("AP_RED_RASTER_H", new VariantWrapper((float)H));
  2295. CZEMApi.Set("AP_RED_RASTER_POSN_X", new VariantWrapper((float)X));
  2296. CZEMApi.Set("AP_RED_RASTER_POSN_Y", new VariantWrapper((float)Y));
  2297. Thread.Sleep(100);
  2298. CZEMApi.Execute("CMD_MODE_REDUCED");
  2299. Thread.Sleep(100);
  2300. }
  2301. public void SetReduced1(int x, int y, int W, int H)
  2302. {
  2303. CZEMApi.Execute("CMD_MODE_NORMAL");
  2304. CZEMApi.Set("AP_RED_RASTER_W", new VariantWrapper((float)W));
  2305. CZEMApi.Set("AP_RED_RASTER_H", new VariantWrapper((float)H));
  2306. CZEMApi.Set("AP_RED_RASTER_POSN_X", new VariantWrapper((float)x));
  2307. CZEMApi.Set("AP_RED_RASTER_POSN_Y", new VariantWrapper((float)y));
  2308. Thread.Sleep(100);
  2309. CZEMApi.Execute("CMD_MODE_REDUCED");
  2310. Thread.Sleep(100);
  2311. }
  2312. public void CloseReduced()
  2313. {
  2314. CZEMApi.Execute("CMD_MODE_NORMAL");
  2315. Thread.Sleep(200);
  2316. }
  2317. }
  2318. }