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-OPTON Technology
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-OTSPartA user guide
-VERSION 1, JULY 2020
-   Table of Contents
-1	Introduction	5
-2	Getting started (SysMgrTool)	6
-2.1	Licensing	6
-2.2	Testing the communication between hardware and software	7
-3	Managing Particle Standards (PartSTDManager)	11
-3.1	Particle Standard	11
-3.2	Manage Particle Standard Files	11
-3.3	Working with particle standards	12
-3.3.1	PartSTDManager interface	12
-3.3.2	Working particle standard	13
-3.3.3	Add particle standard	13
-3.3.4	Edit particle standard	14
-3.3.5	Chang order of particle standards	14
-3.3.6	Duplicate particle standard	15
-3.3.7	Copy data from a particle standard of another particle standard file	15
-3.3.8	Copy a particle standard from another particle standard file	15
-3.3.9	Delete a particle standard	16
-3.4	Elemental Identify String Editor	16
-3.5	Sharp Identify String Editor	17
-3.6	Collect Standard x-ray Spectrum	17
-4	Report Mode (ReportModeEditor)	19
-4.1	Report Mode	19
-4.1.1	Table paragraph	19
-4.1.2	Text	19
-4.1.3	Header	19
-4.1.4	Particle characterization table	20
-4.1.5	Particle characterization chart	20
-4.1.6	Elemental analysis table	21
-4.1.7	Elemental analysis chart	21
-4.1.8	Special particle data chart	21
-4.2	Program Type Flag Of Report Mode Files	22
-4.3	Manage Report Mode Files	22
-4.4	Working with report modes  (ReportModeEditor)	23
-4.4.1	ReportModeEditor interface	23
-4.4.2	Working report mode	24
-4.4.3	Add report mode	24
-4.4.4	Edit report mode	25
-4.4.5	Chang order of report modes	25
-4.4.6	Duplicate report mode	25
-4.4.7	Export report mode	26
-4.4.8	Import report mode	26
-4.4.9	Delete report mode	27
-5	Measurements (PartAMeasure)	28
-5.1	Hardware settings	28
-5.1.1	SEM (Scanning Electron Microscope) high voltage supply	28
-5.1.2	BSE brightness and contrast	28
-5.1.3	EDS imaging system calibration	28
-5.1.4	EDS CPS	28
-5.2	Sample stage	28
-5.2.1	OTSPartA sample stage	28
-5.2.2	PartAMeasure digit sample stage	29
-5.2.3	Stage tuning	29
-5.3	PartAMeasure preference	29
-5.4	Sample measurement parameters	30
-5.4.1	General group	30
-5.4.2	Terminate	31
-5.4.3	Scan parameters	31
-5.4.4	Image process parameters	32
-5.4.5	x-ray parameters	33
-5.4.6	SEM data parameters	33
-5.5	Measure area	33
-5.6	PartAMeasure interface	34
-5.7	Manage Sample Measurement Setting Up Files	34
-5.8	Setting up sample measurements	35
-5.8.1	Select sample stage	35
-5.8.2	Add sample measurements	35
-5.8.3	Working sample measurement	35
-5.8.4	Assign measure area	35
-5.8.5	Edit sample measurement parameters	37
-5.8.6	Export/Import sample measurement parameters file	37
-5.8.7	Get SEM Data	37
-5.8.8	Using status tab	38
-5.8.9	Check sample measurement settings	39
-5.8.10	Start / Stop / Resume sample measurements	39
-5.8.11	Instantaneous sample measurements progress	39
-5.8.12	Measure result files	40
-5.9	Sample measurements setting up summary	40
-6	Reporting (PartAReport)	42
-6.1	PartAReport interface	42
-6.2	Manage Report Project Files	42
-6.3	PartAReport Preference	43
-6.3.1	Particle standard file	43
-6.3.2	Particle classes file	43
-6.3.3	Report mode file	43
-6.3.4	Table information	44
-6.4	Manage Sample Measurement Results	44
-6.4.1	Add sample measurements	44
-6.4.2	Remove sample measurement	44
-6.4.3	Set compare sample measurements	45
-6.5	Sample Measurement Result Image View	45
-6.5.1	Image data source	45
-6.5.2	Image view type	45
-6.5.3	Image view display type	46
-6.5.4	Navigate image	46
-6.5.5	Investigating particle	46
-6.5.6	Export image	47
-6.5.7	Select particles	47
-6.6	Sample Measurement Result Data Table	48
-6.6.1	Data table data sources	48
-6.6.2	Data table types	48
-6.6.3	Data table data source types	50
-6.6.4	Selections of data tables	50
-6.6.5	Export data tables	50
-6.7	Sample Measurement Result Data Chart	51
-6.7.1	Data chart data sources	51
-6.7.2	Data chart types	51
-6.7.3	Data chart data source types	52
-6.7.4	Export data tables	52
-6.8	Compared Sample Measurement Results	53
-6.8.1	Select compared sample measurement results data source	53
-6.8.2	Change compare sample measurement results data source order	53
-6.8.3	Compared data table	53
-6.8.4	Compared data chart	53
-6.9	Re-classification	53
-6.10	Reporting	54
-
-Introduction
-OTSPartA is a software package that, coupled with electron microscopy and x-ray analysis hardware, allows for the automated identification and quantification of particles from different industries. 
-The aim of this manual is to guide the user in installing the software, setting up and running measurements and generate basic data.
-This manual is intended for use of the OTSPartA software only and does not give background information for, or instructions on, the use of the SEM or EDS platforms. 
-OTSPartA software consist of 5 Programs:
- 	SysMgrTool
-  	PartSTDManager
- 	ReportModeEditor 
- 	PartAMesuare
- 	PartAReport
-
-The user guide is divided into different sections for easy navigation. Additionally, the following icons are employed to: 
-  Indicate any dangers/risks to consider when performing a specific operation
-  Additional information.
-Getting started (SysMgrTool)
-Licensing
-Install the software by following the installer prompts. Before using the system the software needs to be licenced.
-
-                                       
-                                       
- Request a licence
- Open the SysMgrTool program
- Make "License" tab to active
- Click "Request"  button
-      
-                                       
-      
- Fill information on the license request dialog box
-      Supply a user name and select if  the licence is for an "Online" licence  -  that is a licence to be used on the SEM or "Offline"  that is freestanding PC only used for reporting.
- Click "Save" button to save a license request file
- Send the license request file to OTS software support team via email or WeChat.
- OTS software support team will generate a license file and send it back to you.
- Active a licence
- Click "Active" button on "License" tab 
- Use file open dialog box to load the license file OTS software support team sent you
- Detailed license information will be displayed on "License" tab if the license file is valid
-Testing the communication between hardware and software
-To ensure the system working properly, it is important to select matching hardware platform with the SysMgrTool and hardware and software communicate properly.
-
-                                       
-
- SEM setting 
- Make "Hardware" tab to active
- Sellect SEM matching the SEM hardware platform
- If the SEM hardware platform used is not shown in the list then select the EDS type linked to your platform
- If software connects with the SEM hardware platform via EDS, it will communicate with the SEM hardware platform through the EDS hardware platform
- There is a special SEM setting  -  "Offline" if "Offline" is selected, SEM communication is in simulation mode,  SEM parameters are simulated  
- SEM communication testing
- Click "SEM Test" button to bring up SEM testing dialog box
-  Click "Connect" button on the dialog box 
- If succeed connected to the SEM all testing buttons become active
- A fail connect error message will appear otherwise
- Use "Get" buttons to get parameters from the SEM
- Use "Set" buttons to set the SEM parameters
- Depends on connected SEM platform,  it might not all parameters can be "Get" or "Set"
- Click "Disconnect" button to disconnect the SEM  and software
- Click "Cancel" button to quit test
-     
-                                       
-                                       
-                                          
- EDS Setting 
- Select SEM matching the SEM hardware platform
- Similar as SEM setting, there is a "Offline" EDS setting  if "Offline" is selected, EDS communication is in simulation mode,  images and x-ray data are simulated  
- EDS communication testing
- Click "EDS Test" button to bring up EDS testing dialog box
- Single x-ray testing 
-                                       
-                                       
- Make "x-ray" tab active
- Input suitable x-ray acquisition time 
- Click "Single x-ray" button
- An x-ray spectrum should appear in display
- Note: if SEM scan mode is point, x-ray spectrum is collected from SEM cross position. If SEM scan mode is rectangle, x-ray spectrum is collected from SEM scan rectangle. If SEM scan mode is frame, x-ray spectrum is collected from whole frame of the SEM current image.
- Multiple x-ray testing 
- Make "x-ray" tab active
- Input suitable x-ray acquisition time 
- Click "Multiple x-ray" button
- An x-ray spectrum should appear in display
- Note: multiple x-ray testing will take spectra at two places, top left corner and centre of the frame of the SEM current image. The x-ray spectrum in the display is the second or the centre position spectrum.
- Element quantify testing 
-     
-                                       
- Make "x-ray" tab active
- Input suitable x-ray acquisition time 
- Click "Element quantify" button
- An x-ray spectrum and element quantify result should appear in display
- Note: the way of x-ray analysis of element quantify is same as single x-ray testing. The element quantify result is based on the x-ray analysis.
- Imaging testing 
-     
-                                       
-
- Make "Image" tab active
- Input suitable resolution data
- Select suitable dwell time 
- Click "Imaging" button
- A BSE image should appear in display
-  
-
-
-Managing Particle Standards (PartSTDManager)
- PartSTDManager is used to maintain particle standard file  -  one of key components of the system. The extensions of particle standard files are "PartSTD".
-Particle Standard
-A particle file contains of a list of particle standards. Particle standards are used to identify particles with their elemental compositions, x-ray spectra, and sharp etc. information. 
-Each particle standard consists of:
- Name
- Note: name can't be an empty string and OTS system reserved particle names such as hole, crack, unknown etc. 
- Note: it is not allowed that there are same name particle standards in a particle standard file.
- Represent colour
- Elemental identify rule string
- Sharp identify rule string
- Standard spectrum
- Elemental compositions
- Density
-The system will use elemental identify rule string and/or sharp identify rule string to identify larger particles, standard spectrum to identify smaller particles. 
-Manage Particle Standard Files
-(Icon "New")
- Create a new particle standard file
- A new particle standard file is created when PartSTDManager starts
- Or click "New" button or select "New" menu item 
- A new particle standard file is an untitled file 
-(Icon "Open")
- Open file
- Click "Open" button or select "Open" menu item
- An open file dialog will appear
- Use the dialog box to open a particle standard file
- Note: if the current working particle standard file is modified, a warning message appears to remained user to save the modifications if needs to.
-(Icon "Save")
- Save file 
- Click "Save" button or select "Save" menu item to save the current working file
-(Icon "Save As")
- Save as
- Click "Save As" button or select "Save As" menu item
- A save file dialog 
- Note: if the current working file is a new file (untitled), save file will work as same as save as. 
-Working with particle standards
-Except characterising data such as name, density, element compositions etc. a particle standard contains two important parts.   
-PartSTDManager interface
-
-                        (Screenshot of PartSTDManager)
-
-PartSTDManager has four Windows. Positions of these Windows can be changed. Simply drag the Window to where it you like.
- Main frame
-Provides system menu and main tools.
- Particle standard list window
-Display particle standards of the current working file. 
- Spectrum chart window
-Spectrum chart window displays the spectrum charts of the working particle and selected reference particle standard(s).
- Reference particle standard file window
-Reference particle standards window displays information of reference particle standards. 
- Property window
-Property window is used to edit properties of the working particle standard including its elemental identify rule string. 
-Working particle standard
- Working particle standard is current selected item on the particle standard list 
- Click particle standard on the particle standard list to change the working particle standard
- Press "Up" or "Down" arrow keys will also change working particle standard if Particle standard list window is active
-Add particle standard
-(Icon "Add")
- Click "Add" button or select "Add" particle standard list popup menu item
-(Screenshot of "Particle standard list window" with a new particle standard item)
- A new empty particle standard item will be created
- The new particle standard item will be inserted just below the working particle standard item
- The new particle standard item will become the working particle standard
-(Screenshot of "Property window")
- Name the new particle standard item and set represent colour for it with property window
-(Screenshot of "Elemental identify rule string editor")
- Set elemental identify rule string for the new particle standard item with the elemental identify rule string editor
- Note: how to use identify rule string editor please see 3.4 
- (Screenshot of "Sharp identify rule string editor")
- Set sharp identify rule string for the new particle standard item with the sharp identify rule string editor
- Note: how to use sharp identify rule string editor please see 3.5 
- (Icon "Collect")
- Collect standard x-ray spectrum for the new particle standard 
- Note: collect standard x-ray spectrum procedure please see 3.6 
-(Screenshot of "Spectrum chart window")
- Collected x-ray spectrum will appear the spectrum chart window
-(Screenshot of "Property window")
- Set other characterisation data such as element compositions, density etc. for the new particle standard with property window
-Edit particle standard
-(Screenshot "particle standard list window" with a highlighted particle standard item)
- Select the particle standard item on the particle standard list window to set it as the working particle standard
-(Screenshot of "Property window")
- Elemental identify rule string and sharp identify rule string of the particle standard item are displayed on the property window
-(Screenshot of "Spectrum chart window")
- x-ray spectrum of the particle standard item is displayed  on the spectrum chart window
-(Screenshot of "Property window")
- Other characterisation data such as element compositions, density etc. of the particle standard item is displayed on the property window
-(Screenshot of the elemental identify rule string editor with data)
- Edit the elemental identify rule string for the new particle standard item with the elemental identify rule string editor
-(Screenshot of the sharp identify rule string editor with data)
- Edit the sharp identify rule string for the new particle standard item with the sharp identify rule string editor
-(Screenshot of "Property window")
- Edit the name, element compositions, density etc. of the new particle standard with the property window
-Chang order of particle standards
- Note: order of particle standards in a particle standard file is very important. In general, more important, tighter rule particle standards should be in front. 
-(Screenshot of "Particle standard list window" with a highlighted particle standard item)
- Select the particle standard item on the particle standard list window to set it as the working particle standard
- Drag the particle standard item to the desired position
-(Icon "Up", "Down")
- Or use move tool to move the particle standard to the desired position
-Duplicate particle standard
-(Screenshot of "Particle standard list window" with a highlighted particle standard item)
- Select the particle standard item on the particle standard list window to set it as the working particle standard
- Hold "Ctrl" and drag the particle standard item to a desired position
- The particle standard item is duplicated at where it is dragged
- The new particle standard will be renamed based on its original name
-Iron rich to Iron rich1 for instance.
-Copy data from a particle standard of another particle standard file 
-(Screenshot of "Reference particle standard file window")
- Open a particle standard of another particle standard file
-(Screenshot of "Particle standard list window" with a highlighted particle standard item)
- Select the particle standard item on the particle standard list window, set it as the working particle standard
-(Screenshot of the popup menu of "Reference particle standard file window")
- Right click a particle standard item on the particle standard list window to bring up the popup menu of "Reference particle standard file window"
- Select "Copy Data" menu item to copy data of the particle standard of "Reference particle standard file window" to the working particle standard
- Or other individual data item menu item to copy the related data of the particle standard of "Reference particle standard file window" to the working particle standard
-For instance, "Elemental identify rule" menu item to copy the elemental identify rule string of the particle standard of "Reference particle standard file window" to the working particle standard.
-Copy a particle standard from another particle standard file 
-(Screenshot of "Reference particle standard file window")
- Open a particle standard of another particle standard file
-(Screenshot of "Particle standard list window" with a highlighted particle standard item)
- Select the particle standard item on the particle standard list window, set it as the working particle standard
-(Screenshot of the popup menu of "Reference particle standard file window")
- Right click a particle standard item on the particle standard list window to bring up the popup menu of "Reference particle standard file window"
- Select "Insert" menu item 
- A  copy of the selected the particle standard of "Reference particle standard file window" will be generated and inserted into the particle standard list just under the working particle standard
- The new particle standard will become new working particle standard
-Delete a particle standard
- (Screenshot of "Particle standard list window" with a highlighted particle standard item)
- Select the particle standard item on the particle standard list window to set it as the working particle standard
-(Icon "Delete")
- Click "Delete" tool button
-(Screenshot of "Particle standard list window")
- Or right click the particle standard to be deleted
-(Screenshot of "Particle standard list window" popup menu)
- Select "Delete" menu item 
-(Screenshot of delete warning message)
- Delete warning message appears
- Click "OK" button to confirm deleting
- Note: particle standard can't be recovered once it is deleted. 
-Elemental Identify String Editor
-Element identify strings are used to identify the particle type for particles with elemental compositions of particles.
-Element identify strings consists of:
-  Element symbols
-"Al", "Si" and "O" etc.
- Special element symbols
-First_El (the element has smallest atomic number in elements list), Second_El and Last_El etc.
-  Arithmetic operators
-"+", "-", "*", "/", "(" etc.
- Logical operators
-"<", ">=", "&" etc.
- Numbers (including decimal point)
-A typical element identify string:
-First_El = 26 & Fe > 40 & Fe / (Cr + Mn + Ni) >= 28 & (Cr + Mn) > 0.5 & Zn < 10 & Cu < 5 & Ti < 3 & Si < 5
-(Screenshot of "Element identify string editor")
-Sharp Identify String Editor
-Sharp identify strings are used to identify the particle type for particles with their sharp features.
-Sharp identify strings consists of:
- Sharp symbols
-"DMAX", "DMIN", "DPERP", "Aspect" etc.
- Arithmetic operators
-"+", "-", "*", "/", "(" etc.
- Logical operators
-"<", ">=", "&" etc.
- Numbers (including decimal point)
- A typical sharp identify string:
-DMAX / DPERP <= 1.2 & Aspect > 5
- (Screenshot of "Sharp identify string editor")
-Collect Standard x-ray Spectrum 
-(Screenshot of "Spectrum chart window" with x-ray spectrum chart of a particle standard)
-Standard x-ray spectra of particle standards are used to identify particle types of smaller particles. Important rules have to follow when collect standard x-ray spectrum:
- Use right KV (same as measure samples)
- Use large particle to collect x-ray spectrum
- Get enough counts 
-Procedure of collecting standard x-ray spectrum:
- Make sure SEM is in right working condition especial its KV
- Drive SEM to the particle
- Set SEM scan mode to point and move the cross to the centre of the particle 
- Select the particle standard item on the particle standard list window to set it as the working particle standard
- Make sure the AQ time is right
-  (Icon "Collect")
- Click "Collect" button
- The x-ray spectrum chart of x-ray collected from the particle appears in the spectrum chart window 
- Note: a warning message will appears if the counts of the standard x-ray spectrum is not in the standard x-ray spectrum counts range. Adjust the AQ time and redo collecting until it is right.
-Report Mode (ReportModeEditor)
-ReportModeEditor is used to maintain report modes. OTSPartA applications can use report modes and sample measure results to generate result reports in different formats such as PDF, Excel, and Word etc. Report modes are saved as report mode files and can be reused. The extensions of report mode files are "RepMode".
-Report Mode
-A report mode file contains a list of report mode blocks. Except "Table paragraph" report mode block, each report mode block will generate a section in a sample measure result report combined with sample measure results. All report mode block can be exported as an individual file and be imported, reused later on.
-There are possible eight types of report mode blocks in a report mode file.
-Table paragraph
-There is only one and has to have one table paragraph block in a report mode. It defines formats of all tables in reports generated with the report mode. This block will be in the report mode file when it is created and is always at the top of report modes block, can't be deleted. Properties of "table paragraph block" are:
- Table title font
- Title fill 
- Table font
- Alignment
- Row line
- Column line
- Boundary line
-Text
-A test block represents a paragraph text in the report. It will not relate to sample measure result. Properties of "text block" are:
- Font
- Alinement
- Indentation
- Before Text
- By
- Text string
-Header
-Herder block descripts the table contains information related to the measured sample, and SEM condition and so on. This table has a two columns.  Orders of data on the table is re-arranged. 
-
-                                       
-
-Properties of "header block" are:
- Table name string
- Data list
- Analysis Date
- Used time
- KV
- Magnification
- Scan Area
- Pixel size
- ......
- Note string
-Particle characterization table
-Particle characterization table block descripts particle characterization table which summarizes OTSPartA sample analysis results.
-                                       
-Properties of "particle characterization table block" are:
- Table name string
- Classify file (or use base classify file)
- Size calculation mothed
- Size class
- Note string
-Particle characterization chart
-Particle characterization chart block descripts particle characterization chart which represents the particle characterization analysis result in data chart format. 
-               (Screenshot of a particle characterization chart)
-Properties of "particle characterization chart block" are:
- Chart name string
- Classify file (or use base classify file)
- Particle type (defined in the classify file or total)
- Size calculation mothed
- Size class
- Chart format
-Elemental analysis table
-Element analysis table block descripts element analysis table which is another important result OTSPartA sample analysis provided. 
-                                       
-Properties of "elemental analysis table block" are:
- Table name string
- Classify file (or use base classify file)
- Elements list
- Note string
-Elemental analysis chart
-Element analysis chart block descripts element analysis chart which chart which represents the element analysis result in data chart format. 
-                   (Screenshot of an element analysis chart)
-Properties of "element analysis chart block" are:
- Chart name string
- Classify file (or use base classify file)
- Particle type (defined in the classify file or total)
- Elements list
- Chart format
-Special particle data chart
-Special particle data chart is the most important result OTSPartA sample analysis provided. 
-
-                                       
-
-Properties of "special particle data chart block" are:
- Data chart name string
- Classify file (or use base classify file)
- Particle type (or all particle types)
- Shown particle number
- Size calculation mothed
- Particle size data list
- Elements list
-Program Type Flag Of Report Mode Files
-All report mode files have program type flags indicating what OTS application package it works for. Applications of certain OTS software package can only use its own report mode files. ReportModeEditor is an application working for whole OTS series. It can create and edit report mode files which have different program type flags. What OTS software package ReportModeEditor working for at a certain time is decided by the program type flag in the preference file (setting file) of ReportModeEditor. 
-To observe or change the program type flag:
-(Icon "Options")
- Click "Options" in the system menu 
-(Screenshot of "Option" dialog box)
- ReportModeEditor Options dialog box appears
- In "Program type", active radio button indicates ReportModeEditor type flag is at the moment
- Click and active radio button of the application desired 
-Manage Report Mode Files
-(Icon "New")
- Create a new report mode file
- A new report mode file is created when ReportModeEditor starts
- Or click "New" button or select "New" menu item 
- A new report mode file is an untitled file 
- New file will have the same program flag with the one in the preference file of ReportModeEditor
- The file will have a default table paragraph report mode in it
-(Icon "Open")
- Open file
- Click "Open" button or select "Open" menu item
- An open file dialog will appear
- Use the dialog box to open a report mode file
- Note: if the current working report mode file is modified, a warning message appears to remained user to save the modifications if needs to. 
- Note: "Open" will fail and a warning message will appear if the file is an invalid report mode file or its program flag is different with the preference file of ReportModeEditor.
-(Icon "Save")
- Save file 
- Click "Save" button or select "Save" menu item to save the current working file
-(Icon "Save As")
- Save as
- Click "Save As" button or select "Save As" menu item
- A save file dialog 
-Note: if the current working file is a new file (untitled), save file will work as same as save as.
-Working with report modes  (ReportModeEditor)
-ReportModeEditor interface
-
-                       (Screenshot of ReportModeEditor)
-
-ReportModeEditor has three Windows. Positions of these Windows can be changed. Simply drag the Window to where it you like.
- Main frame
-Provides system menu and main tools.
- Report mode tool list window
-Display report mode blocks list listing all available report modes for the OST software package.   
- Main window
-There are two areas in the main window separated by a split bar.
- Report modes list window
-      Report modes list window lists report modes of the working report mode file. It is also operating tool to maintain report modes.
- Report preview window
-      Report preview window shows an empty report which the report mode will produce.
- Property window
-Property window is used to edit properties of the working report mode. 
-Working report mode
- Working report mode is current selected item on the report modes list 
- Click report mode on the report modes list to change the working report mode
- Press "Up" or "Down" arrow keys will also change the working report mode if Report modes list window is active
-Add report mode
- Using "Add" Icon
- (Icon "Add")
- Click "Add" button 
- (Screenshot of "Report mode add" dialog box) 
-  "Report mode add" dialog box appears
- Select desired report mode on the report mode section
- Click "Ok" button on the dialog box
- The desired report mode is added under the working report mode
- The newly  added report mode will become new working report mode
-("Add" drop down icons)
- Using "Add" drop down Icons
- Select desired "report mode" drop down Icon
- The desired report mode is added under the working report mode
- The newly  added report mode will become new working report mode
-(Screenshot of "Report mode tool list window")
- Using "Report mode tool list window"
- Report mode tool list lists all types of report modes of the OTS software package
- Drag the desired report mode from the report mode tool list window and place it into the report modes list (of the working file) where it should be
- The newly  added report mode will become new working report mode
-(Screenshot of "report modes list popup menu")
- Using the report modes list popup menu
- On the report modes list right click the report mode which wish add the new report mode under it to bring the report modes list popup menu
- Select the desired report mode adding menu item
- A new report mode will add under the clicked report mode
- The newly  added report mode will become new working report mode
-Edit report mode
-(Screenshot "report modes list window" with a highlighted a report mode item)
- Select the report mode item on the report modes list window to set item as the working report mode
-(Screenshot of "Property window")
- Properties of the working report mode will be displayed on the property window
- Different type of report modes properties are different
- Note: regarding properties of different report modes please see 4.1
-Chang order of report modes
-Except the table paragraph block, each report modes in a report mode file represent a section in the reports created with the report mode. Order of those report sections is same with the report modes in a report mode file. 
-(Screenshot of "Report modes list window" with a highlighted report mode item)
- Select the report mode item on the report modes list window to set it as the working report mode
- Drag the item to the desired position
-(Icon "Up", "Down")
- Or use move tool to move the particle standard to the desired position
-Duplicate report mode
-(Screenshot of "Report modes list window" with a highlighted report mode item)
- Select the report mode item on the report modes list window to set it as the working report mode
- Hold "Ctrl" and drag the report mode item to the desired position
- The report mode item is duplicated at where it is dragged
- The new report mode is set as new working report mode 
- Note: the table paragraph report mode can't be duplicated.
-Export report mode 
-(Screenshot of "Report modes list window")
- Select the report mode item on the report modes list window to set it as the working report mode
-(Screenshot of system menu)
- Select "Export" menu item of the system menu
-(Screenshot of "Report modes list window" popup menu)
- Or right click on the report item to bring up "Report modes list window" popup menu
- Select "Export" menu item of the popup menu
- Save as dialog appears
- Using the dialog box to save the report mode to report mode file.
-Import report mode
-(Screenshot of "Report modes list window")
- Select the report mode item on the report modes list window to set it as the working report mode
-(Screenshot of system menu)
- Select "Import" menu item of the system menu
-(Screenshot of "Report modes list window" popup menu)
- Or right click on the report item wishing to bring up "Report modes list window" popup menu
- Select "Import" menu item of the popup menu
- Open file dialog appears
- Using the dialog box to open a report mode file.
- Imported report mode appears below the working report mode (or right clicked report mode) if the report mode file is valid to the working report mode file
- The imported report mode will become the new working report mode
- Note: if the imported report mode is table paragraph block it will replace the table paragraph block of the report mode file and the table paragraph block will become the working report mode.
- Note: if the imported report mode file is valid to the working report mode file or not depending on :
- The report mode type is fitted to the OTS software package
- If the properties of the report mode type is fitted to the working report mode file
-Delete report mode
- (Screenshot of "Report modes list window" with a highlighted report mode item)
- Select the particle standard item on the particle standard list window to set it as the working particle standard
-(Icon "Delete")
- Click "Delete" tool button
-(Screenshot of "Report modes list window")
- Or right click the report mode to be deleted
-(Screenshot of "Report modes list window" popup menu)
- Select "Delete" menu item 
-(Screenshot of delete warning message)
- Delete warning message appears
- Click "OK" button to confirm deleting
- Note: report mode can't be recovered once it is deleted. 
- Note: the table paragraph report mode can't be deleted
-
-   
-Measurements (PartAMeasure)
- PartAMeasure is used to create, defined, execute measurements. Results of measurements will be loaded in PartAReport program to generate sample measure reports.  
-Hardware settings 
-It is very important to set hardware (SEM and EDS) in conditions suitable for measurements.
-SEM (Scanning Electron Microscope) high voltage supply 
-Different SEM high voltage supply ranges can be different. Most common is 1~30KV. Accelerating voltage used for the measurement must match the x-ray standard. If the x-ray standard for a sample was collected at a certain accelerating voltage then the measurement must be done with the same accelerating voltage. 
-General guidelines: 20KV
-BSE brightness and contrast
-OTSPartA uses BES images to identify particles. It is very important to calibrate SEM BSE brightness and contrast before measurements. 
-General guidelines: grey levels of all interest objects (particles and blackguards) are between 10~250
-EDS imaging system calibration
-As OTSPartA gets BSE images through the imaging system of EDS detector (EDS), it is very important to calibrate the EDS imaging system well. In general, EDS imaging system calibration is be done when the hardware is installed by install engineer and don't need to be redone unless the hardware changes.
-General guidelines:  1. Grey levels of BSE images getting through the EDS imaging system need to be as same as getting through SEM 2. Sizes of BSE images getting through the EDS imaging system need to be as same as getting through SEM
-EDS CPS
-One of the key performance figures of EDS is counts per second (CPS). Bigger CPS will be beneficial to measurements. Working distance is one of factors to effect CPS. Systems have to be working on certain working distance range to get bigger CPS.
-Sample stage
-OTSPartA sample stage
-(Image of OTSPartA sample stage)
-OTSPartA sample stage can hold three samples. It also provides a standard sample to help setting up SEM (EDS imaging system calibration). 
-PartAMeasure digit sample stage
-PartAMeasure has a digit sample stage which has to be set matching the sample stage installed in the SEM.  
-(Icon of system "Options")
-To change the sample stage:
- Select system "Options" 
-(Screenshot of "Options" dialog box)
- "Option" dialog appears
- Click "Stage" file selection button 
- "Open file" dialog box appears  
- Select a stage file matching the sample stage installed in the SEM
-Stage tuning
-(Screenshot of a sample stage with incorrect angle)
-As manufacture reason, stage might needs to turn certain angle to make it level. This process needs to be done only once to a sample stage.
- Make sure the digit stage matching the sample stage installed in the SEM
-(Screenshot of sample hole right click popup menu)
- Right click on a sample hole to bring up sample hole right click popup menu
- Select "Overview" menu item
-(Screenshot of a sample overview image)
- PartAMasure will take an overview image of the sample hole
- Observe the sample overview image to see if it matches the sample hole well
- Turn SEM stage angle if necessary
- Repeat above steps until the sample overview image matches the sample hole 
- Remember the turning angle value 
- Turn the stage with the turning angle value every time this sample stage is used
-PartAMeasure preference
-To access PartAMeasure preference:
-(Icon of system "Options")
- Default measurement settings can be defined for user cases where measurements are routine.  Select system "Options" 
-(Screenshot of "Options" dialog box)
- "Option" dialog appears
-PartAMeasure preference contains a few key program settings:
- PartAMeasure digit stage (see 5.2.2)
- Particle standard file (see 3.)
-PartAMeasure uses the standard to identify all particles (large and small). To change the database:
- Click "Particle Identify Database" file selection button 
- "Open file" dialog box appears  
- Select the particle identify database to be used
- Default sample measurement parameters 
-PartAMeasure preference defines a set of default sample measurement parameters which are assigned as measurement parameters of new samples (sample measurement parameters see 5.4). 
- Parameter appearing switches
-Most of sample measurement parameters have appearing switches attached. All parameters with their appearing switches are on, will appear on the property window and user can modify them, default values will be used otherwise.
-Sample measurement parameters
-In PartAMeasure, a sample is defied by serval group of sample measurement parameters. 
-General group
- Sample name
-Sample name has to be a legal file name string. PartAMeasure is not allow sample with same sample name appear at same time. Sample name is defined as sample name base plus a number initially. Sample name base is one of default sample measurement parameters. For instance: Sample name base is "Sample", the default sample name could be "Sample1", "Sample2" etc.
- Sample hole
- Name of attached sample hole.
- Execute switch 
- Sample measurement will be executed in the next measure run.
- Sample type
- ??????
-Terminate
- Sample terminate
- Cover measure area
-      Will complete the entire area selected for the sample measurement before terminating. 
- Fields 
-      Specify the number of fields to measure.
- Large particles
-      Specify the number of large particles to measure.
- Parameters (Sample)
- Fields number value
- Large particle number value
- Field terminate
-One of reducing measurement time is to reduce measuring small particles. 
- All
-      Measure all small particles.
- Area %
-      Specify field percentage in which small particles will be measured. 
- Particles
-      Specify the member of small particles in field.
- Parameters (Field)
- Area % value
- Particle number value
-Scan parameters
- Start Position
-Where the measurement will start from. 
- Centre
-      Centre off, spiralling out.
- Top down 
-      Top down, in Maeander order.
- Bottom up
-      Bottom up, in Maeander order.
- Image resolution
-Image resolution defines BSE image resolution. If a field width is 500 micros and image resolution is 512x384, pixel size is just under 1 micro (500/512). If image resolution is 1024x768 in other word, pixel size is below 0.5 micro (500/768). 
- Note: large image resolution value makes small and results of measurements more accurate.
- Note: large image resolution value makes measurements slower.
-General guidelines: pixel size is 0.25~0.5 times size of the minimum interest particle
- 2048x1536
- 1024x768
- 512x384
- 256x192
- Dwell time
- Note: increase dwell time will increase scan image quality.
- Note: increase dwell time will increase scan image time.
-General guidelines: use recommend dwell time which is tested during installation.
- 64
- 32
- 16
- 8
- 4
-Image process parameters
- Background remove method
- Automatic
-      PartAMeasure defines background and removes it automatically.
- Background range
-      User defines background range.
- Automatic removing parameters
-Appears only "Background range" background remove method selected.
- Downward
-      Defines background grey level range and redefines background from 0 to the range up band.
- Upward
-      Defines background grey level range and redefines background from the range low band to 255.
- Range
-      Defines background grey level range and uses it directly.
- Background range parameters
-Appears only "Background range" background remove method selected.
- Maximum background range value.
- Minimum background range value.
- Particle Size 
-Particles their area sizes are not in the particle size range will be exclusive. 
- Maximum
- Minimum 
-x-ray parameters
- Large particle size cutting of value
-All particles that sizes are above this value will be counted as larger particles and will be x-ray elemental analysed. 
- x-ray elemental analysis method
- Area
- Point
- x-ray elemental analysis acquire time 
- Small particle size cutting of value
-All particles that sizes are between "Large particle size cutting of value" and "Small particle size cutting of value" will be x-ray analysed (point scan). All particles that sizes are below this value will be ignored or counted as "Not x-rayed".
- x-ray analysis acquire time
-SEM data parameters
-SEM data parameters record SEM setting up parameters when sample measurements are set up and set them back when sample measurements are executed. Some of the parameters are un-editable and can only get from SEM via PartAMeasure.
- Magnification
- Pixel size
-Pixel size is related with magnification and image resolution value. Bigger magnification and image resolution value will make pixel size smaller. 
-Edit magnification will change pixel size. Edit pixel size are the same. 
- Working distance
- Measure area size
- Cover measure area field number
-Measure area
-Each sample measurement has a measure area. Measure area sharp can be circle or rectangle. User can change measure area with tool provides by the main window.
-PartAMeasure interface
-(Screenshot of PartAMeasure)
-PartAMeasure interface consists of four parts:
- Main frame
-Provides system menu and main tools.
- Sample measurements list
-Display sample measurements list. Provide sample measurement management tools.
- Main window
-Display PartAMeasure digit sample stage. Provide sample measurement management, sample measurement parameters setting up, sample measurements progress instantaneous tools.
- Property window
-Display properties of working sample measurement and allow user to edit them.
-Manage Sample Measurement Setting Up Files
-Sample measurement setting up file is PartAMeasure working file.
-(Icon "New")
- Create a new sample measurement setting up file
- A new sample measurement setting up file is created when PartAMeasure starts
- Or click "New" button or select "New" menu item in the system menu
- A new sample measurement setting up file is an untitled file 
-(Icon "Open")
- Open file
- Click "Open" button or select "Open" menu item
- An open file dialog will appear
- Use the dialog box to open a sample measurement setting up file
- Note: if the current working sample measurement setting up file is modified, a warning message appears to remained user to save the modifications if needs to.
-(Icon "Save")
- Save file 
- Click "Save" button or select "Save" menu item to save the current working file
-(Icon "Save As")
- Save as
- Click "Save As" button or select "Save As" menu item
- A save file dialog 
- Note: if the current working file is a new file (untitled), save file will work as same as save as. 
- Note: sample measurements cannot run if current working file is a new file (untitled).
-Setting up sample measurements
-With OTSPartA sample stage, OSTPartA can measure multiple samples at once. 
- Select sample stage
-(Screenshot of PartAMeasure digit sample stage)
-The first step in setting up sample measurements is to make sure that the correct sample stage is used which means that PartAMeasure digit sample stage needs to match OTSPartA sample stage installed in SEM (How to change PartAMeasure digit sample stage please see 5.2.2). 
-Add sample measurements
-Sample measurements can be added in the three ways:
- 
- Add sample tool 
-(Sample measurements list popup up menu item)
- "Add sample" menu item of sample measurements list popup up menu
-A new sample measurement appears on sample measurements list and an empty sample hole of sample stage of the sample stage in main window.
- "Add sample" menu item of popup menu of an empty sample hole 
-A new sample measurement appears the empty sample hole and on sample measurements list.
-Working sample measurement
-(Screenshot of the sample measurements list with a highlight sample measurement)
-Along all sample measurements in the sample measurements list, the working sample measurement is the highlight sample measurement. 
-Click the desired sample measurement on the sample measurement lint will set it to the working sample measurement.
-(Screenshot of the sample stage with at least two sample measurements)
-Click the desired sample measurement on the sample stage will also set it to the working sample measurement.
-Assign measure area
-Default measure area
-(Screenshot of a sample hole of the working sample)
-When a sample measurement is added, a default measure area is assigned to the sample measurement. The default measure area is defined in the preference (see 5.3). PartAMeasure provides to assign, modify measure area for sample measurements.
-Re-assign measure area
-(Measure area drawing tool icons)
-Two re-assign measure area tools: 
- Rectangle
- Circle 
-(Screenshot of drawing a measure area)
-To re-assign measure area: 
- Click a desired tool to active it
- Draw a measure area for the sample measurement
-Move measure area
-(Move mouse point)
- Point to the inside measure area
- Hold Ctrl key 
- Mouse point change to move mouse point
- Drag the measure area to move the measure area to the desired position
-Resize measure area
-(Re-size mouse point)
- Point in the edge of the measure area or a corner if it is a rectangle measure area
- Hold Ctrl key 
- Mouse point change to re-size mouse point
- Drag the edge or corner to re-size the measure area
-Use overview image
-It is a good ideal to use overview image to set measure area especially non-standard samples.  
- Right click on the desired sample on the sample stage  
-(Screenshot of sample hole popup menu)
- Sample hole popup menu appears
- Select "Overview" menu item
- PartAMeasure will take an overview image of the sample hole
- Assign measure area with the overview image
-Edit sample measurement parameters
-(Screenshot of property window with a sample measurement parameters displayed)
-Property window is major tool to editing sample measurement parameters. It displays sample measurement parameters of the working sample measurement. Sample measurement parameters are divided to several groups. 
-Layout of property window is changed depended on:
- PartAMeasure preference parameter appearing switches 
-Many parameters can be hidden by turning off their appearing switches in PartAMeasure preference. In this case, the default values of these parameters will be used.
-(Screenshot of terminate group with sample terminate is "Cover measure area")
-(Screenshot of terminate group with sample terminate is "Fields")
- Appearances of some parameters depends on values of other parameters
-Fields number value in Terminate group only appears if sample terminate parameter is set to "Fields"
-(Screenshot of SEM data parameters group with SEM data didn't recorded")
-(Screenshot of SEM data parameters group with SEM data recorded")
- Layout of SEM data parameters group is deferent if SEM data id recorded or not
-Export/Import sample measurement parameters file
-(Export sample measurement parameters tool icon)
-Sample measurement parameters can be exported to a sample measurement parameters file and be reused by importing the file when editing parameters for sample measurement.
-Get SEM Data
-Before a sample can be measured, the SEM data (magnification, working distance, KV, contrast, and brightness) must be reordered. This needs to be done for all sample measurements.
- Check hardware settings (how to check hardware settings please see 5.1)
- Right click on the desired sample on the sample stage  
-(Screenshot of sample hole popup menu)
- Sample hole popup menu appears
- Select "Dive to centre" menu item
- SEM move to the centre of the sample
- Make sure focus right for the sample measurement with SEM software
- Set magnification for the sample measurement with SEM software
- Right click the sample to bring up the popup menu again
- Select "Get SEM data"
- The measure area of the sample measurement will be covered by field grids
- SEM data parameter group is updated
- Make sure pixel size meet the measurement resolution requirement
-Using status tab
-PartAMeasure provides a useful tool -- "Status tab" in the main window to help the user to set up image process parameters (see 5.4.4).
-(Screenshot of the status tab with a BSE image)
- Right click on the measure area of the desired sample measurement in the sample stage to bring up the popup menu
- Select dive to measure area centre menu item
- Click the status tab to active it
- Right click the inside of  the status tab to bring up the popup menu
- Select "Collect BSE image" menu item
- A BSE image appears in the status tab
- Make sure there are a few particles on the BSE image
-(Screenshot of the status tab with a removed background BSE image)
- Right click on the BSE image to bring up the popup menu
- Select "Remove background" menu item
- The program uses the image process parameters to remove the background of the BES image
- A background removed BSE image appears in the status tab
-(Screenshot of the status tab with an x-ray chart)
-The status tab can also be used to test x-ray parameters.
- Make sure SEM position is not changed after the BSE image is collected
- Right click on the desired particle which x-ray is collected 
- The popup menu appears 
- Select "x-ray element analysis" menu item
- The program will do x-ray element analysis for the desired particle with x-ray element analysis parameters
- An x-ray chart and element analysis results appear in the status tab
- Or select "x-ray analysis" menu item
- The program will do x-ray analysis for the desired particle with x-ray element analysis parameters
- An x-ray chart appears in the status tab
-Check sample measurement settings
-(Check sample measurement setting icon)
- Click checking sample measurement setting
- Checking sample measurement setting dialog box appears
- Checking results appear on the dialog box
-Start / Stop / Resume sample measurements
-(Start sample measurements icon)
- Click start sample measurements tool 
- PartAMeasure will do sample measurement settings checking automatically
- Sample measurements start if sample measurement settings checking found no errors and warnings
- Checking sample measurement setting dialog box appears if sample measurement settings checking found errors and/or warnings
- Checking sample measurement setting dialog box allows the user to continue start sample measurements exclusive sample measurements with setting errors 
-(Stop sample measurements icon)
- Click stop sample measurements tool 
- Sample measurements stop
- Results of sample measurements already measured are valid
- Results of fields of the current sample measurement already measured are valid
-(Start sample measurements icon)
- Click start sample measurements tool 
- Sample measurements resume from where it was stopped
-Instantaneous sample measurements progress
-Basic sample measurement results can be viewed in the PartAMeasure program, this results are updated as sample measurements progresses.
-(Screenshot of the results tab of the main window)
- Click the results tab of the main window
- The results tab of the main window display updated sample measurement results as sample measurement progresses
-Measure result files
- Sample measurement results are stored in the folder where the setting file saved (see 5.7.9)
- Each sample measurement will generate a child folder
- The child folder is named with the sample name
- Results of the sample measurement is stored in the child folder
-Sample measurements setting up summary
-Procedure of running sample measurements:
- Samples place on the PartAMeasure stage 
- Turn on SEM
- Wait SEM to stable
- Calibrate SEM (KV, Brightness and contract)
- Start PartAMeasure program
- Make sure PartAMeasure digit stage matching the PartAMeasure stage
- Add samples on the PartAMeasure digit stage
- Note:  samples on the PartAMeasure digit stage have to match the samples on the PartAMeasure stage
- Setting up sample measurement 
- All parameters are default values
- Assign measure area
- Dive SEM to the centre of the measure area
- Set magnification for the sample measurement with SEM software
- Set focus for the sample measurement with SEM software
- Record SEM data
- Edit sample measurement parameters 
- Make sure pixel size matching the requirement of the resolution of the sample measurement
- Repeat above for all sample measurements
- Save sample measurements settings
- Checking sample measurements settings
- Start sample measurements
- Instantaneous sample measurements progress with the results tab of the main window
- Sample measurements process can be stopped at any time by clicking stop tool and restarted by clicking start tool
- Each sample measurement will create a child folder inside the folder where the sample measurements settings file is and sample measurement results will be stored there
-Reporting (PartAReport)
- PartAReport is used to view the sample measurement results and generate reports with them.
-PartAReport interface
-(Screenshot of PartAReport with a few sample measurements opened) 
-PartAReport interface consists of four parts:
- Main frame
-Provides system menu and main tools.
- Sample measurements results list
-Manage opened sample measurements list. Select the working sample measurement. Allow the user to select compare sample measurements.
- Main window
- Image view
- Data table
- Data chart
- Property window
-Show properties of main windows display. Change properties will change main windows display.
-Manage Report Project Files
-Report project file is PartAReport working file.
- (Icon "New")
- Create a new report project file
- A new report project file is created when PartAReport starts
- Or click "New" button or select "New" menu item in the system menu
- A new report project file is an untitled file 
-(Icon "Open")
- Open file
- Click "Open" button or select "Open" menu item
- An open file dialog will appear
- Use the dialog box to open a sample measurement setting up file
- Note: if the current working report project file is modified, a warning message appears to remained user to save the modifications if needs to.
-(Icon "Save")
- Save file 
- Click "Save" button or select "Save" menu item to save the current working file
-(Icon "Save As")
- Save as
- Click "Save As" button or select "Save As" menu item
- A save file dialog 
- Note: if the current working file is a new file (untitled), save file will work as same as save as. 
-PartAReport Preference
-PartAReport preference defines a few critical files used by the application. 
-To access PartAReport preference:
-(Icon of system "Options")
- Select system "Options" 
-(Screenshot of PartAReport preference dialog)
-  "Option" dialog appears
-Particle standard file
-Particle standard file (see 3.) defines the particle standard file used to identify particles.
-To change the particle standard file:
- Click particle standard file set up button
- Open dialog box appears
- Open a new particle standard file with the dialog box
- Note: change particle standard file should only be done there is no sample measurement result file opened. It might need to do re-classification to those opened sample measurement result files.
-Particle classes file
-Particle class file defines the particle class used in calculations which need particle size classes such as particle analysis table. 
-To change the particle classes file:
- Click particle class file set up button
- Open dialog box appears
- Open a new particle class file with the dialog box
-Report mode file
-Report mode file (see 4.) defines the report mode used to export sample measurement results. 
-To change the report mode file:
- Click report mode file set up button
- Open dialog box appears
- Open a new report mode file with the dialog box
-Table information 
-Table information defines parameters used in calculations.
- Particle area / measure area display radio
- Default particle size calculation base
- DMAX
- DMIN
- Equivalent circle
- Ferret diameter
- ......
- Display elements list
- Display particle size parameters list
-Manage Sample Measurement Results
-(Screenshot of sample measurements list with a few sample measurements opened)
-Sample measurements list is major tool for managing data sources.
-Add sample measurements
- Right click on the sample measurements list
- (Screenshot of sample measurements list)
- Sample measurements list popup menu appears
- Select "Add sample" menu item
- Open file dialog box appears
- Open a sample measurement result file with the dialog box
- Note: PartAReport doesn't allow to open two sample measurement result files classified with different particle standard files at same time. 
-Remove sample measurement
- Right click on the sample measurement to be removed on the sample measurements list
- (Screenshot of sample measurements list)
- Sample measurements list popup menu appears
- Select "Remove sample" menu item
- The sample measurement is removed from the sample measurements list
-Set compare sample measurements
-(Screenshot of sample measurements list)
- Turn the compare sample measurement switch of the desired sample measurement on 
- The sample measurement becomes a compare sample measurement
-Sample Measurement Result Image View
-Image data source
-(Screenshot of image tab with a sample measurement result image)
-Image tab of the main window displays the image of the working sample measurement. 
- Click the image tab of the main window
- Click the desired sample measurement result on the sample measurements list 
- The sample measurement becomes the working sample measurements
-(Screenshot of the property window)
- Or select the desired sample measurement result on the property window data source selection 
- Sample measurement result image displays in the image tab
-Image view type
-General image view
-(Screenshot of image view of a sample measurement result)
-General image view of a sample measurement result provides an overview of the measured area of the sample measurement.
-(Screenshot of property window displaying image tab properties)
-To display image view:
- Select image view in the image type property in property window
-General image view can display field boundaries:
- Turn field boundary on/off with field boundary switch in "View" tab of tool bar
-Particle grid view
-(Screenshot of particle grid view of a sample measurement result)
-Particle grid view of a sample measurement result sorts particles as certain rules and displays them in grids.
-(Screenshot of property window displaying image tab properties)
-To display particle grid view:
- Select particle grid view in the image type property in property window
- Particle can be sorted as
- Particle type 
- Particle size class
-(Screenshot of property window displaying image tab properties)
- Particle grid sorting type can be selected in the image type property in property window
-Image view display type
-(Screenshot of property window displaying image tab properties)
-Both image view and particle view can be displayed as two display types:
- BSE image
- Classified image
- Display type is one of the properties in the image type property in property window
-Navigate image
- Images can be zoomed with mouse middle wheel
- Images can be dragged by mouse
- Two fitting tools
- Fitting whole image in view
- Fitting image width in view
-Investigating particle
-View particle in details
-(Screenshot of a particle BSE image and classified image)
- Double click the desired particle on image view
- The particle is full view on image view
-Review particle classification information
-(Screenshot of a particle x-ray chart)
- Point on a desired particle on image view or particle grid view
- The x-ray chart and classify information of the particle displays at the bottom of the view
-Revisit particle
-(Screenshot of the particle popup menu)
- Right click on a desired particle on image view or particle grid view
- Particle popup menu appears
- Select "Drive to particle" menu item
- SEM moves to the particle position
-Export image
-PartAReport uses "copy -- paste" to export images from to other applications such as Word, Excel etc. 
-Copy view image
-(Copy icon)
- Click "Copy" tool when image view tab is active
-(Screenshot of image popup menu)
- Or right click image
- Image popup menu appears
- Select "Copy view image" menu item
- Image in view is copied
-Copy whole image
-(Copy icon)
- Hold Shift key  and click "Copy" tool when image view tab is active 
-(Screenshot of image popup menu)
- Or right click image
- Image popup menu appears
- Select "Copy whole image" menu item
- Whole image is copied
-Select particles
-(Screenshot of selected particles)
-PartAReport allows users to select particles in images, creates data sets with the selected particles and displays data grids, charts based on these data sets.
- Draw a rectangle with mouse
- Holds Shift key and draw a rectangle in images
- Particles in the rectangle become 
- Use particle grid view popup menu
- Right click in a group particles in particle grid view
- Particle grid view popup menu appears
- Select "Select particles" menu item
- Add more particles in selected particles set
- Holds Shift + Ctrl keys and draw a rectangle in images
- Particles in the rectangle be added into selected particles sets
-      Or
- Right click in a group particles in particle grid view
- Particle grid view popup menu appears
- Select "Add particles in selection" menu item
- Cancel selection
- Press ESC key when image view tab is active 
-Sample Measurement Result Data Table
-Data table data sources
-(Screenshot of data table tab with a sample measurement result data table)
-Data table tab of the main window displays data grids of the working sample measurement or compared sample measurements. 
- Click the data table tab of the main window
- Click the desired sample measurement result on the sample measurements list 
- The sample measurement becomes the working sample measurements
-(Screenshot of the property window)
- Or select the desired sample measurement result on the property window data source selection 
- Or select the compared option on the property window data source selection
- Data table displays in the data table tab
-Data table types
-(Screenshot of the property window)
- General information table
- Particle composition table
- Particle size distribution table
- Particle elemental distribution table
- Elemental composition table
- Special particles table
- Data table type is one of the properties in property window 
- Properties in property window varies as selected table type
- Data source types (see 6.6.3)
- Size calculate base
- Elements list
- ......
-General information table
-(Screenshot of a general table)
-Data might display on general information table are decided by PartAReport preference include:
- Measure start time  
- Measure end time
- Measured area
- Total particles 
- Special measure radio (particle area/measured area * radio)
- KV
- ......
-Particle composition table
-(Screenshot of a particle composition table)
-Data display on particle composition table for each particle type include:
- Type name
- Represent colour
- Total Particle number
- Area
- Area %
- Largest particle size
- Average particle size
-Particle size distribution table
-(Screenshot of a particle composition table)
-Data display on particle size distribution table for each particle type include:
- Type name
- Represent colour
- Total particle number
- Particle number in each size class
-Particle elemental distribution table
-(Screenshot of a particle elemental distribution table)
-Data display on particle elemental distribution table for each particle type include:
- Type name
- Represent colour
- % on each desired elements
-Elemental composition table
-(Screenshot of an elemental composition table)
-Data display on elemental composition table include:
- % on each desired element
-Special particle list table
-(Screenshot of a special particle list table)
-Special particle list table displays data of certain number particles listed according their sizes include:
- Image
- Size data 
- % on each desired elements
-Data table data source types
-(Screenshot of the property window)
-Most of data tables can be created based two different data types.
- All particles
- Selected particles
- Data type is one of the properties in property window
-Selections of data tables
-(Screenshot of a data table with a selection)
- Holds Shift key and draw a rectangle in the data table
- The rectangle covered cells become selection of data table
- Press ESC key when data tab is active to cancel selection
-Export data tables
-PartAReport uses "copy -- paste" to export data table from to other applications such as Word, Excel etc. 
-Copy selection of a data table 
-(Copy icon)
- Click "Copy" tool when data table tab is active
-(Screenshot of data table popup menu)
- Or right click data table
- data table popup menu appears
- Select "Copy" menu item
- Selection of the data table is copied
-Copy whole data table
-(Copy icon)
- Hold Shift click "Copy" tool when data table tab is active 
-(Screenshot of data table popup menu)
- Or right click data table
- data table popup menu appears
- Select "Copy whole data table" menu item
- Whole data table is copied
-Sample Measurement Result Data Chart
-Data chart data sources
-(Screenshot of data chart tab with a sample measurement result data chart)
-Data chart tab of the main window displays data chart of the working sample measurement or compared sample measurements. 
- Click the data chart tab of the main window
- Click the desired sample measurement result on the sample measurements list 
- The sample measurement becomes the working sample measurements
-(Screenshot of the property window)
- Or select the desired sample measurement result on the property window data source selection 
- Or select the compared option on the property window data source selection
- Data chart displays in the data chart tab
-Data chart types
-(Screenshot of the property window)
- Particle composition chart
- Particle size distribution chart
- Particle elemental distribution chart
- Elemental composition chart
- Data chart type is one of the properties in property window 
- Properties in property window varies as selected chart type
- Data source types (see 6.6.3)
- Particle type
- Size calculate base
- Elements list
- ......
-Particle composition chart
-(Screenshot of a particle composition chart)
-Particle composition chart uses particle area % to draw the data chart.
-Particle size distribution chart
-(Screenshot of a particle composition chart)
-Particle size distribution chart uses a particle class of one of particle types or total particles to draw the data chart.
-Particle elemental distribution chart
-(Screenshot of a particle elemental distribution chart)
-Particle elemental distribution chart uses elemental distribution of one of particle types or all particle types to draw the data chart.
-Elemental composition chart
-(Screenshot of an elemental composition chart)
-Elemental composition chart uses elemental composition data to draw the data chart.
-Data chart data source types
-(Screenshot of the property window)
-Most of data charts can be created based two different data types.
- All particles
- Selected particles
- Data type is one of the properties in property window
-Export data tables
-PartAReport uses "copy -- paste" to export data chart from to other applications such as Word, Excel etc. 
- (Copy icon)
- Click "Copy" tool when data chart tab is active
-(Screenshot of data chart popup menu)
- Or right click data chart
- data chart popup menu appears
- Select "Copy" menu item
- Data table is copied
-Compared Sample Measurement Results
-Select compared sample measurement results data source
-(Screenshot of sample measurements list with a few sample measurement results) 
-Checked sample measurement results in sample measurements list will be selected as compared sample measurement results data sources.
-Change compare sample measurement results data source order
-(Screenshot of sample measurements list with a few sample measurement results) 
-Sample measurement data source appeared on the top will be appeared first in compared data table or compare data chart.
- Drag sample measurement data source in sample measurements list to change compared sample measurement results data source order
-Compared data table
-(Screenshot of data table tab with a compared data table)
- Click data table tab
-(Screenshot of property window)
- Select "Compared" in the data source property in the property window
-Compared data chart
-(Screenshot of data chart tab with a compared data chart)
- Click data chart tab
-(Screenshot of property window)
- Select "Compared" in the data source property in the property window
-Re-classification
-Re-classification will use a new particle standard to replace PartAReport app particle standard stored in the application reference and re do particle classification for all opened sample measurements data sources.
-(Re-classification tool icon)
- Click "Re-classification" tool 
- Open file dialog appears
- Select a particle standard file with the dialog box
- A warning message box appears to remind that re-classification process will occur if the particle standard file is valid
- Click "OK" on the warning message box
- The current active tab will be repaint after re-classification process complete
-Reporting
-(Screenshot of a report)
-PartAReport can use report mode (see 4.) to generate a measurement result report.
-(Report tool icon)
- Click "Report" tool
-(Screenshot of the sample measurement list popup menu)
- Or right click the sample measurement list to bring up its popup menu
- Select "Reporting" menu item
-(Screenshot of reporting dialog)
- Reporting dialog box appears
- Select data source in the data source list (by default selected data source is the working sample measurement)
- Select "Report mode" with the "Report mode" select button (the default report mode is selected in PartAReport preference)
- Select export file name and file format
- Click Ok button on the dialog
- A measurement result report file will be generated

Document/RJL Micro & Analytic - Software Requirements SELPA OTS - v1.1.docx

@@ -1,177 +0,0 @@
-MAKING THE WORLD'S BEST SEM-EDX PARTICLE 
-ANALYSER FOR CLEANLINESS TESTING
-
-
-Compiled by: Markus J. Heneka
-Addressed to: Jieshi Tong, Junhee Lee
-Last Edited: 9/19/2019
-Version Number: 1.1
-
-
-
-
-
-Part 1  -  Automated Feature Collection Software ("Measure")
-
-1.1 Ease of Use
-The automotive industry will accept the instrument only if it is easy to use. Therefore, we should aim for a simplistic user interface the allows the operator to start the routine measurement easily. Also, the OTS software needs to come up with automated functions that ensure the quality and reproducibility of the result. 
-In the ideal case, the standard user will open the OTS Measure software, type-in the sample information and load a pre-defined protocol for each position and press Start. FEI has made a big effort reach this point in their latest edition of the ASPEX Perception. 
-On the other hand, we need to provide another user interface for the expert user that will enable this user to adapt the parameters in the protocol. In most cases, the expert user will be an application specialist from Opton, Coxem, RJL or from the local distributor. It is our job to adapt the protocol to the needs of the different customers.
-
-1.2 Speed
-The automotive industry will accept the instrument only if the result is obtained fast. On a 47 mm membrane, we can obtain the result for particles > 50 um typically in 30-45 minutes, for particles from 5 um in 4 hours with the ASPEX. In order to make the particle measurement speedy, RJL has developed a very successful strategy for the ASPEX that uses several runs at different magnifications which has proven to be very successful. 
-1.2.1 Concept of Multiple Runs
-The large particles are scanned a lowest magnification (for example 40x), the smaller particles are scanned at higher magnification (for example 80x and 160x). In cleanliness analysis, the large particles are decisive for the cleanliness level of the component, and therefore, we must collect all the particles > 50 um on the filter. The smaller particles < 50 um have a mere statistical character, it is often enough to scan a representative part of the filter and project the result to the total filter area. 
-It is very important to compute the filter area from which the particles are collected precisely because this number is needed to project the number to the total filter area. For the report, all runs from one membrane will be fused to a single representation. 
-A typical SEM-EDX filter scan consists of 1, 2 or 3 runs. In the SELPA, we will have four membrane positions (sample A, B, C, D) and one additional position for standards (see also filter holder drawing as proposed by RJL). In total, we will have 16 runs at maximum (A#1 to D#3). 
-1.2.2 Stopping Criteria for the Individual Runs
-It is very important to implement criteria to stop the current run and proceed to the next scheduled analysis. The individual criteria need check boxes to be turned on and off.
- Proceed to the next field after ___ particles are collected for EDS.
- Proceed to the next field after ___ percent of the particles are collected for EDS.
- Proceed to the next field after ___ percent of field is collected for EDS.
- Proceed to the next field after ___ seconds of collection.
- Proceed to the next run after ___ particles are collected for EDS.
- Proceed to the next run after ___ percent of the particles are collected for EDS.  
- Proceed to the next run after ___ percent total area is collected for EDS.  
- Proceed to the next run after ___ fields are completed.  
- Proceed to the next run after ___ percent of the fields are completed.
- Proceed to the next run after ___ minutes of total collection.
-1.2.3 Field Scan Order
-From our experience, the best way to do the scanning of the fields is in Maeander order. This approach is fast and it reduces the backlash errors of the mechanical stage. 
-
-1.2.4 Standard and New Fast Acquisition Mode
-The magnification used in the runs #2 and #3 are typically a multiple of the magnification used in the first run #1. This will ensure that the field borders of the individual runs will stay aligned to each other.
-The standard approach to perform the three runs will be a serial sequence from low to high magnification, shown in the figure in blue, green and red color. In each run, we can choose to measure up to 100% of the particles or less to make it faster. It is a very flexible approach but we have to move the stage three times over the membrane. 
-
-For SELPA, we propose to implement an additional new method that will be faster. The idea is to acquire the three runs in parallel. On each field, we will collect data for run #1, then switch to magnifications from run #2 and #3 and collect data without moving the stage. It means that we will not be able to cover 100% of the area in run #2 and #3 but this is anyway intended for most of the cases. 
-
-
-1.3 Reproducibility
-The reproducibly is closely related to the stability of the SEM instrument. Coxem will make their best effort to provide a stable instrument. However, we believe that it will be impossible to get an instrument that is perfectly stable over many hours (for example 24 hours). Therefore, we need to implement routines to maintain stability.
-1.3.1 Video Level and Threshold
-In order to get reproducible results of counting and sizing, we need to ensure a stable video level of the image and threshold for the particle detection. 
-As we cannot guarantee 100% stability of the SEM instrument, we need to use an automated function to regularly set brightness and contrast. In order to do so, we need to implement a standard sample for video setup, typically Carbon and Copper in the case of organic filter membranes. The BE signal of the two materials can be used to regulate brightness and contrast of the SEM instrument to achieve stable video levels.
-Also, we recommend to use not only absolute thresholds values but also thresholds that are calculated relative to the BE background peak of the filter material. We have implemented this method in our optical scanner and it works very reliable.
-1.3.2 Focus
-Another issue is the focus on the filter. From our experience, the users do not want to setup the focus because it requires expert knowledge and every user will do it a bit different. Therefore, an automated focus function is crucial for better reproducibility. The particle membranes from cleanliness analysis can be quite uneven, therefore, there they focus should be able to be setup several times during one scan of a membrane.
-1.3.3 EDX Stability
-Although the EDX manufacturers claim stability of the energy peak position, we know that this is not really the case because of temperature changes in the pre-amplifier. At least once a day, we should calibrate the energy range. The ASPEX tool offered an automated calibration of the peak position on Copper that can be carried out before starting the analysis automatically. Very helpful!
-Another equally important issue is the sensitivity of the EDX detector that changes due to contamination of the window. In cleanliness testing, we have residual oil and grease in the membrane and these will contaminate the EDX window with a growing carbon layer over time (not to be avoided). Thus, the low-energy sensitivity is changed over time. This will affect the ability to distinguish between metals and oxides or carbides. For example: Aluminum is an uncritical particle because metallic Aluminum is soft. However, Corundum is Aluminum Oxide and it is one of the hardest minerals in cleanliness testing. If the detector is contaminated, the Oxygen content is measured too low and we will classify Corundum as Aluminum. Ouch! The same is true with Silicon Carbide and many others. We need to implement a function to avoid this (very critical, needs to be discussed).
-1.3.4 Warm-up phase
-In case that the SEM was turned off before the analysis, it will take some time for the system to reach a stable working temperature. The user shall be able to start the automated particle collection and specify a delay time before the actual particle collection will start.
-
-1.4 Particle Features to be Measured
-1.4.1 Parameters from Imaging
-From the BSE image, we propose a minimum set of parameters to be computed and saved for each particle:
- AREA: Surface area of the particle
- PERIMETER
- D_MAX: Maximum Feret Diameter (equal to "length" according to VDA and ISO norm)
- D_MIN: Minimum Feret Diameter (equal to "width" according to VDA and ISO norm)
- D_PERP: Diameter perpendicular on DMAX
- D_INSCR: Maximum Inscribed Circle Diameter
- D_MEAN: Mean value of all Inscribed Circle Diameters
- D_ELONG: Elongation is the stretched length of a fiber or particle with curled shape 
- ASPECT_MAX: Aspect Ratio is DMAX divided by DMEAN 
- ASPECT_ELONG: Aspect Ratio is DELONG divided by DMEAN
- VIDEO: Mean gray value of the particle
- X and Y: Coordinates of the center of mass of the particle 
-1.4.2 Parameters from Spectroscopy
-From the BSE image, we propose a minimum set of parameters to be measured and saved for each particle:
- Original spectrum data
- Quantitative data for elements
- Material as classified by data base (see Part 2)
-For larger particles, it is best to acquire the EDX spectrum within the complete surface area of the particles (mind to use safety boundary a 5-10 um on the edge). For smaller particles, point mode EDX acquisition has proven to be more stable. Both options should be possible. 
-1.4.3 Particles in Multiple Fields
-In cleanliness, we will have to deal with large particles that stretch over two or more fields. It is mandatory that we detect the particle fragments and stitch them together to a single feature. 
-We propose a post-processing step that is taking place after the acquisition. First, the images of the field shall be used to compose a large mosaic image. On the mosaic image, the fragments that belong to a single particle can be detected easily. Then, the particle fragments need to be stitched to a single particle and the parameters in section 1.4.1 and 1.4.2 need to be updated for the particle. The spectral data of the fragments can be fused by adding the results weighted by the particle surface area.
-The computing process is time consuming, therefore, we propose that the stitching takes place in an independent process in parallel to the acquisition in order to gain speed.
-Stitching might not be needed for the very small particles. Therefore, we recommend that the stitching can be turned on and off for the individual runs in order to save time in the post-processing.
-
-1.4.4 Multiple Runs 
-In cleanliness, we have the strategy to use several runs to make the analysis of the membrane fast. The aim is to collect all large particles but only a fraction of the smaller particles. The number of the smaller particles will be projected to the total filter area. However, the data of all runs will be displayed in a common report. 
-At the end of each run, a projection number must be calculated that is equal to the total filter area divided by the scanned area. For all histograms and diagrams, the number of particles need to be multiplied with the correct projection number.
-Upon the fusion of two or three runs, there is a risk that we measure duplicate particles. The X and Y coordinates and the D_INSCR in section 1.4.1 need to be used to sort out and exclude the duplicate particles. 
-
-1.5 Re-Visiting Particles
-It is an important requirement in the VDA and ISO norm that the operator is able to re-visit particles and change the measurements by hand. The user needs to check the critical particles (for example the large particles or the very hard particles) and verify that sizing and classification is correct. 
-Typically, the user will sort the particles by size and/or classification and check the individual particles either by looking at the acquired data ("offline") or by driving the instrument to the particle and doing a SEM-EDX analysis in case of any doubt. 
-In both cases, the user needs to be able to edit the measurement by hand:
- Ruler tool for D_MAX and D_MIN measurement
- Duplicate particle tool, it will allow to separate two overlapping particles an do separate measurements
- Acquisition of a new EDX spectrum by hand
- Manual re-classification of particle material 
- Enter user comment for each particle 
-
-
-1.6 Other Important Features
-1.6.1 Status and Log
-During the scanning, the user needs to able to see basic information on the actual status of the instrument and analysis:
- time that the current run and total analysis is already running
- estimated time to finish the current run and the total analysis
- material classes and particle numbers acquired so far in the current run
- critical messages regarding the workflow and stability of the system
-Also, the information needs to be written into a log file, so the user can scroll retrospectively to check whether the last work has been completed successfully:
- including a summary of the completed runs, particle counts, material classes and warning messages 
-1.6.2 Particle Sizing Only
-It is a regular requirement for some customers to do analysis without EDX. We need to offer an option for particle counting and sizing only. Basic material classification can be done using the gray value of the particle.
-1.6.3 Stop Analysis by User Command
-At any point during the analysis, the user needs to have the possibility to stop the particle collection. The reason is that in an industrial production scenario, there will come up critical tasks which need urgent priority. This will require to stop the current analysis. The data from the run that is stopped shall not be discarded but rather saved and closed properly to be used for later reporting as it might contain valuable data. 
-Also, the stopping feature is a very important feature for the development and testing of new protocols.
-1.6.4 Alternative Membranes
-The typical substrates are membranes made from cellulose, plastic mesh or carbon tape. However, about 10% of the analysis is carried out on metallic membranes (for example silver or gold) which will enable to use SEM-EDX to detect light-weight materials such as plastics and abrasive minerals more easily. Please make sure that the thresholds can be applied to dark and bright background.
-1.6.5 Identification Strings
-In the user interface, the user needs to enter strings to identify sample, customer, laboratory and operator. The laboratory is a general information that has to be entered independent from the sample (general information tab). The other information needs to be entered for each analysis. We recommend to use these fields:
- Sample Position (A, B, C, D)
- Analysis Reference Number
- Customer Name
- Sample Name
- Sample Description
- Operator Name
- Comment
-1.6.6 Protocol templates
-All the parameters that define the measuring protocol of one analysis containing up to three runs and including the identification strings from section 1.6.5 shall be stored in a template file for later re-use. In the expert user mode, the customer can edit all parameters and save new protocols. in the standard user mode, only the identification strings can be edited and a protocol template file can be loaded.
-
-
-Part 2  -  EDX-Classification and Hierarchical Data Base ("Classify")
-
-2.1 Element Selection
-In cleanliness, we use membranes to collect the particles and these membranes are either organic or metallic. If we measure an EDX spectrum in low pressure vacuum condition, we will get signal from the surrounding membrane because of stray electrons. In order to exclude these signals, we need to have an element selector that allows to unselect specific elements. For example, we would unselect Carbon on organic membranes. Also, we can unselect all rare elements that can be excluded by pure logic.
-2.2 Hierarchical Data Base and Rule Interpretation
-We propose to use a hierarchical data base that sorts particles into classes by means of user-editable rules. A rule is logical description of the material class that can be verified or falsified for individual particles. Hierarchical means that the particle will be checked against each rule on the list from top to bottom. The particle will be sorted into the class of the first rule that matches. 
-The rules are very powerful if we can use Boolean and elementary arithmetical operators to combine elemental with geometrical properties. Here is an example rule for a glass fiber detection:
-"(Si+Al+Na) > 60 and O > 15 and ASPECT > 10 and D_MEAN < 20"
-This rule shall be interpreted like this: The particle will be classified if the sum of the contents of Silicon, Aluminum and Sodium is larger than 60% and the Oxygen content is larger than 15% and the aspect ratio is larger than 10 and the mean inner circle diameter is smaller than 20. 
-The advantage of the hierarchical data base concept is that we can use very specific rules in the top of the data base to classify for example certain steel types ("18Mn-18Cr"). On the bottom of the list, we can use very simple rules to classify the remaining steel particles into a general class ("Iron rich particles"). By this way, we can remove almost all "unclassified" particles that will occur with non-hierarchical data base systems from our competitors (Oxford, Zeiss). Here is an example rule for an iron rich particle:
-"Element#1=Fe"
-This rule shall be interpreted like this: The particle will be classified if the element with highest content is Iron. 
-2.3 Refined EDX Collection Time
-During the measurement process, the data base rules can be used to refine the EDX analysis for individual particles. For example, if we find a steel particle containing mainly Iron, we want to know the composition of the steel. Using a short EDX measurement time, it will be impossible to accurately measure the alloy contents. Of course, it is not an option to use a longer EDX acquisition times for all particles because it will make the overall time too long. 
-Therefore, we need an option to define extra EDX acquisition time (2 times, 3 times, X times) for the individual classes. If the particle is recorded, the OTS-Measure software will call the rule interpreter to classify the particle and add EDX measurement time in case the option is checked for the specific class. 
-
-
-2.4 False Element Contents
-In cleanliness analysis, the quantitative result of the EDX measurement on the particle is rather compromised and it will typically show elements that are false or unwanted quantifications. Reasons:
- Short acquisition time, therefore high noise or neighboring peaks
- Secondary contamination on the particle (oil, corrosion layer, other small particles)
- Elements from the filter background
-Especially the quantification of the Oxygen is tricky. On a cellulose or polymer membrane, we will measure a certain amount of Oxygen on any particle. However, we do not want to exclude Oxygen because it is decisive to distinguish between metals and minerals (for example Aluminum and the Corundum = Aluminum Oxide.
-It is important to get rid of such false content because it will complicate the classification very much. Aspex used a second set of rules that they called "Zero-element rules" that will specify when a certain element shall be set to Zero. This concept worked very well and be have included around 30 "Zero-element rules" in the RJL data base for cleanliness. However, we like to stay open for other ideas coming from Jieshi. 
-2.5 Ultra-Fast EDX Acquisition
-As proposed by Jieshi, there is a new way for ultra-fast classification with EDX. This method is not based on the quantitative composition but rather on the absolute presence of the element ("element is present/is not present") and the acquisition time can be less than 0.1 seconds. There should be a discussion how to marry this concept with the traditional concept in a clever way. 
-2.6 Minimum Counts
-It might be useful to reject the EDX spectrum in case the minimum counts (user-defined) are not reached
-2.7 Material Properties
-For each class, we need to be able to manually enter physical material properties:
- Hardness (HV)
- Density (g/cm3)
- Electrical conductivity (S/m)
-The properties need to be displayed on the tables of the report.
-
-
-Part 3  -  Data Presentation and Reporting Software ("Report")
-3.1 General Items in the Report
-The report must be a spread-sheet output for Microsoft Excel, other options on top are possible. 
-
-
-This is a must-be
-

Document/RJL Micro & Analytic - Software Requirements SELPA OTS - v1.1.pdf

@@ -1,369 +0,0 @@
-                                                                                               Im Entenfang 11, 76689 Karlsdorf-Neuthard, Germany
-                                                                                                                  Tel: +49-7251-36790-0, Fax: -36790-79
-                                                                                                                           Web: www.rjl-microanalytic.de
-
-MAKING THE WORLD'S BEST SEM-EDX PARTICLE
-ANALYSER FOR CLEANLINESS TESTING
-
-Compiled by: Markus J. Heneka
-Addressed to: Jieshi Tong, Junhee Lee
-Last Edited: 9/19/2019
-Version Number: 1.1
-
-Part 1 – Automated Feature Collection Software ("Measure")
-
-1.1 Ease of Use
-
-The automotive industry will accept the instrument only if it is easy to use. Therefore, we should aim for a simplistic
-user interface the allows the operator to start the routine measurement easily. Also, the OTS software needs to come
-up with automated functions that ensure the quality and reproducibility of the result.
-In the ideal case, the standard user will open the OTS Measure software, type-in the sample information and load a
-pre-defined protocol for each position and press Start. FEI has made a big effort reach this point in their latest edition
-of the ASPEX Perception.
-On the other hand, we need to provide another user interface for the expert user that will enable this user to adapt
-the parameters in the protocol. In most cases, the expert user will be an application specialist from Opton, Coxem, RJL
-or from the local distributor. It is our job to adapt the protocol to the needs of the different customers.
-
-1.2 Speed
-
-The automotive industry will accept the instrument only if the result is obtained fast. On a 47 mm membrane, we can
-obtain the result for particles > 50 µm typically in 30-45 minutes, for particles from 5 µm in 4 hours with the ASPEX. In
-order to make the particle measurement speedy, RJL has developed a very successful strategy for the ASPEX that uses
-several runs at different magnifications which has proven to be very successful.
-
-© RJL Micro & Analytic GmbH, 2019, strictly confidential information, internal use authorized for COXEM and OPTON only
-                                                                                               Im Entenfang 11, 76689 Karlsdorf-Neuthard, Germany
-                                                                                                                  Tel: +49-7251-36790-0, Fax: -36790-79
-                                                                                                                           Web: www.rjl-microanalytic.de
-
-1.2.1 Concept of Multiple Runs
-The large particles are scanned a lowest magnification (for example 40x), the smaller particles are scanned at higher
-magnification (for example 80x and 160x). In cleanliness analysis, the large particles are decisive for the cleanliness
-level of the component, and therefore, we must collect all the particles > 50 µm on the filter. The smaller particles <
-50 µm have a mere statistical character, it is often enough to scan a representative part of the filter and project the
-result to the total filter area.
-It is very important to compute the filter area from which the particles are collected precisely because this number is
-needed to project the number to the total filter area. For the report, all runs from one membrane will be fused to a
-single representation.
-A typical SEM-EDX filter scan consists of 1, 2 or 3 runs. In the SELPA, we will have four membrane positions (sample A,
-B, C, D) and one additional position for standards (see also filter holder drawing as proposed by RJL). In total, we will
-have 16 runs at maximum (A#1 to D#3).
-1.2.2 Stopping Criteria for the Individual Runs
-It is very important to implement criteria to stop the current run and proceed to the next scheduled analysis. The
-individual criteria need check boxes to be turned on and off.
-• Proceed to the next field after ___ particles are collected for EDS.
-• Proceed to the next field after ___ percent of the particles are collected for EDS.
-• Proceed to the next field after ___ percent of field is collected for EDS.
-• Proceed to the next field after ___ seconds of collection.
-• Proceed to the next run after ___ particles are collected for EDS.
-• Proceed to the next run after ___ percent of the particles are collected for EDS.
-• Proceed to the next run after ___ percent total area is collected for EDS.
-• Proceed to the next run after ___ fields are completed.
-• Proceed to the next run after ___ percent of the fields are completed.
-• Proceed to the next run after ___ minutes of total collection.
-1.2.3 Field Scan Order
-From our experience, the best way to do the scanning of the fields is in Maeander order. This approach is fast and it
-reduces the backlash errors of the mechanical stage.
-
-© RJL Micro & Analytic GmbH, 2019, strictly confidential information, internal use authorized for COXEM and OPTON only
-                Im Entenfang 11, 76689 Karlsdorf-Neuthard, Germany
-                                  Tel: +49-7251-36790-0, Fax: -36790-79
-                                            Web: www.rjl-microanalytic.de
-
-1.2.4 Standard and New Fast Acquisition Mode
-
-The magnification used in the runs #2 and #3 are typically a multiple of the magnification used in the first run #1. This
-will ensure that the field borders of the individual runs will stay aligned to each other.
-
-The standard approach to perform the three runs will be a serial sequence from low to high magnification, shown in
-the figure in blue, green and red color. In each run, we can choose to measure up to 100% of the particles or less to
-make it faster. It is a very flexible approach but we have to move the stage three times over the membrane.
-
-Run #1  Run #2  Run #3
-
-For SELPA, we propose to implement an additional new method that will be faster. The idea is to acquire the three
-runs in parallel. On each field, we will collect data for run #1, then switch to magnifications from run #2 and #3 and
-collect data without moving the stage. It means that we will not be able to cover 100% of the area in run #2 and #3
-but this is anyway intended for most of the cases.
-
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-
-1.3 Reproducibility
-
-The reproducibly is closely related to the stability of the SEM instrument. Coxem will make their best effort to provide
-a stable instrument. However, we believe that it will be impossible to get an instrument that is perfectly stable over
-many hours (for example 24 hours). Therefore, we need to implement routines to maintain stability.
-
-1.3.1 Video Level and Threshold
-
-In order to get reproducible results of counting and sizing, we need to ensure a stable video level of the image and
-threshold for the particle detection.
-
-As we cannot guarantee 100% stability of the SEM instrument, we need to use an automated function to regularly set
-brightness and contrast. In order to do so, we need to implement a standard sample for video setup, typically Carbon
-and Copper in the case of organic filter membranes. The BE signal of the two materials can be used to regulate
-brightness and contrast of the SEM instrument to achieve stable video levels.
-
-Also, we recommend to use not only absolute thresholds values but also thresholds that are calculated relative to the
-BE background peak of the filter material. We have implemented this method in our optical scanner and it works very
-reliable.
-
-1.3.2 Focus
-
-Another issue is the focus on the filter. From our experience, the users do not want to setup the focus because it
-requires expert knowledge and every user will do it a bit different. Therefore, an automated focus function is crucial
-for better reproducibility. The particle membranes from cleanliness analysis can be quite uneven, therefore, there
-they focus should be able to be setup several times during one scan of a membrane.
-
-1.3.3 EDX Stability
-
-Although the EDX manufacturers claim stability of the energy peak position, we know that this is not really the case
-because of temperature changes in the pre-amplifier. At least once a day, we should calibrate the energy range. The
-ASPEX tool offered an automated calibration of the peak position on Copper that can be carried out before starting
-the analysis automatically. Very helpful!
-
-Another equally important issue is the sensitivity of the EDX detector that changes due to contamination of the
-window. In cleanliness testing, we have residual oil and grease in the membrane and these will contaminate the EDX
-window with a growing carbon layer over time (not to be avoided). Thus, the low-energy sensitivity is changed over
-time. This will affect the ability to distinguish between metals and oxides or carbides. For example: Aluminum is an
-uncritical particle because metallic Aluminum is soft. However, Corundum is Aluminum Oxide and it is one of the
-hardest minerals in cleanliness testing. If the detector is contaminated, the Oxygen content is measured too low and
-we will classify Corundum as Aluminum. Ouch! The same is true with Silicon Carbide and many others. We need to
-implement a function to avoid this (very critical, needs to be discussed).
-
-1.3.4 Warm-up phase
-
-In case that the SEM was turned off before the analysis, it will take some time for the system to reach a stable working
-temperature. The user shall be able to start the automated particle collection and specify a delay time before the
-actual particle collection will start.
-
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-
-1.4 Particle Features to be Measured
-
-1.4.1 Parameters from Imaging
-From the BSE image, we propose a minimum set of parameters to be computed and saved for each particle:
-
-• AREA: Surface area of the particle
-• PERIMETER
-• D_MAX: Maximum Feret Diameter (equal to "length" according to VDA and ISO norm)
-• D_MIN: Minimum Feret Diameter (equal to "width" according to VDA and ISO norm)
-• D_PERP: Diameter perpendicular on DMAX
-• D_INSCR: Maximum Inscribed Circle Diameter
-• D_MEAN: Mean value of all Inscribed Circle Diameters
-• D_ELONG: Elongation is the stretched length of a fiber or particle with curled shape
-• ASPECT_MAX: Aspect Ratio is DMAX divided by DMEAN
-• ASPECT_ELONG: Aspect Ratio is DELONG divided by DMEAN
-• VIDEO: Mean gray value of the particle
-• X and Y: Coordinates of the center of mass of the particle
-1.4.2 Parameters from Spectroscopy
-From the BSE image, we propose a minimum set of parameters to be measured and saved for each particle:
-
-• Original spectrum data
-• Quantitative data for elements
-• Material as classified by data base (see Part 2)
-For larger particles, it is best to acquire the EDX spectrum within the complete surface area of the particles (mind to
-use safety boundary a 5-10 µm on the edge). For smaller particles, point mode EDX acquisition has proven to be more
-stable. Both options should be possible.
-1.4.3 Particles in Multiple Fields
-In cleanliness, we will have to deal with large particles that stretch over two or more fields. It is mandatory that we
-detect the particle fragments and stitch them together to a single feature.
-We propose a post-processing step that is taking place after the acquisition. First, the images of the field shall be used
-to compose a large mosaic image. On the mosaic image, the fragments that belong to a single particle can be detected
-easily. Then, the particle fragments need to be stitched to a single particle and the parameters in section 1.4.1 and
-1.4.2 need to be updated for the particle. The spectral data of the fragments can be fused by adding the results
-weighted by the particle surface area.
-The computing process is time consuming, therefore, we propose that the stitching takes place in an independent
-process in parallel to the acquisition in order to gain speed.
-Stitching might not be needed for the very small particles. Therefore, we recommend that the stitching can be turned
-on and off for the individual runs in order to save time in the post-processing.
-
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-
-1.4.4 Multiple Runs
-In cleanliness, we have the strategy to use several runs to make the analysis of the membrane fast. The aim is to
-collect all large particles but only a fraction of the smaller particles. The number of the smaller particles will be
-projected to the total filter area. However, the data of all runs will be displayed in a common report.
-At the end of each run, a projection number must be calculated that is equal to the total filter area divided by the
-scanned area. For all histograms and diagrams, the number of particles need to be multiplied with the correct
-projection number.
-Upon the fusion of two or three runs, there is a risk that we measure duplicate particles. The X and Y coordinates and
-the D_INSCR in section 1.4.1 need to be used to sort out and exclude the duplicate particles.
-
-1.5 Re-Visiting Particles
-
-It is an important requirement in the VDA and ISO norm that the operator is able to re-visit particles and change the
-measurements by hand. The user needs to check the critical particles (for example the large particles or the very hard
-particles) and verify that sizing and classification is correct.
-Typically, the user will sort the particles by size and/or classification and check the individual particles either by
-looking at the acquired data ("offline") or by driving the instrument to the particle and doing a SEM-EDX analysis in
-case of any doubt.
-In both cases, the user needs to be able to edit the measurement by hand:
-• Ruler tool for D_MAX and D_MIN measurement
-• Duplicate particle tool, it will allow to separate two overlapping particles an do separate measurements
-• Acquisition of a new EDX spectrum by hand
-• Manual re-classification of particle material
-• Enter user comment for each particle
-
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-
-1.6 Other Important Features
-
-1.6.1 Status and Log
-
-During the scanning, the user needs to able to see basic information on the actual status of the instrument and
-analysis:
-
-• time that the current run and total analysis is already running
-• estimated time to finish the current run and the total analysis
-• material classes and particle numbers acquired so far in the current run
-• critical messages regarding the workflow and stability of the system
-
-Also, the information needs to be written into a log file, so the user can scroll retrospectively to check whether the last
-work has been completed successfully:
-
-• including a summary of the completed runs, particle counts, material classes and warning messages
-
-1.6.2 Particle Sizing Only
-
-It is a regular requirement for some customers to do analysis without EDX. We need to offer an option for particle
-counting and sizing only. Basic material classification can be done using the gray value of the particle.
-
-1.6.3 Stop Analysis by User Command
-
-At any point during the analysis, the user needs to have the possibility to stop the particle collection. The reason is
-that in an industrial production scenario, there will come up critical tasks which need urgent priority. This will require
-to stop the current analysis. The data from the run that is stopped shall not be discarded but rather saved and closed
-properly to be used for later reporting as it might contain valuable data.
-
-Also, the stopping feature is a very important feature for the development and testing of new protocols.
-
-1.6.4 Alternative Membranes
-
-The typical substrates are membranes made from cellulose, plastic mesh or carbon tape. However, about 10% of the
-analysis is carried out on metallic membranes (for example silver or gold) which will enable to use SEM-EDX to detect
-light-weight materials such as plastics and abrasive minerals more easily. Please make sure that the thresholds can be
-applied to dark and bright background.
-
-1.6.5 Identification Strings
-
-In the user interface, the user needs to enter strings to identify sample, customer, laboratory and operator. The
-laboratory is a general information that has to be entered independent from the sample (general information tab).
-The other information needs to be entered for each analysis. We recommend to use these fields:
-
-• Sample Position (A, B, C, D)
-• Analysis Reference Number
-• Customer Name
-• Sample Name
-• Sample Description
-• Operator Name
-• Comment
-
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-
-1.6.6 Protocol templates
-All the parameters that define the measuring protocol of one analysis containing up to three runs and including the
-identification strings from section 1.6.5 shall be stored in a template file for later re-use. In the expert user mode, the
-customer can edit all parameters and save new protocols. in the standard user mode, only the identification strings
-can be edited and a protocol template file can be loaded.
-
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-
-Part 2 – EDX-Classification and Hierarchical Data Base ("Classify")
-
-2.1 Element Selection
-In cleanliness, we use membranes to collect the particles and these membranes are either organic or metallic. If we
-measure an EDX spectrum in low pressure vacuum condition, we will get signal from the surrounding membrane
-because of stray electrons. In order to exclude these signals, we need to have an element selector that allows to
-unselect specific elements. For example, we would unselect Carbon on organic membranes. Also, we can unselect all
-rare elements that can be excluded by pure logic.
-2.2 Hierarchical Data Base and Rule Interpretation
-We propose to use a hierarchical data base that sorts particles into classes by means of user-editable rules. A rule is
-logical description of the material class that can be verified or falsified for individual particles. Hierarchical means that
-the particle will be checked against each rule on the list from top to bottom. The particle will be sorted into the class
-of the first rule that matches.
-The rules are very powerful if we can use Boolean and elementary arithmetical operators to combine elemental with
-geometrical properties. Here is an example rule for a glass fiber detection:
-"(Si+Al+Na) > 60 and O > 15 and ASPECT > 10 and D_MEAN < 20"
-This rule shall be interpreted like this: The particle will be classified if the sum of the contents of Silicon, Aluminum
-and Sodium is larger than 60% and the Oxygen content is larger than 15% and the aspect ratio is larger than 10 and
-the mean inner circle diameter is smaller than 20.
-The advantage of the hierarchical data base concept is that we can use very specific rules in the top of the data base
-to classify for example certain steel types ("18Mn-18Cr"). On the bottom of the list, we can use very simple rules to
-classify the remaining steel particles into a general class ("Iron rich particles"). By this way, we can remove almost all
-"unclassified" particles that will occur with non-hierarchical data base systems from our competitors (Oxford, Zeiss).
-Here is an example rule for an iron rich particle:
-"Element#1=Fe"
-This rule shall be interpreted like this: The particle will be classified if the element with highest content is Iron.
-2.3 Refined EDX Collection Time
-During the measurement process, the data base rules can be used to refine the EDX analysis for individual particles.
-For example, if we find a steel particle containing mainly Iron, we want to know the composition of the steel. Using a
-short EDX measurement time, it will be impossible to accurately measure the alloy contents. Of course, it is not an
-option to use a longer EDX acquisition times for all particles because it will make the overall time too long.
-Therefore, we need an option to define extra EDX acquisition time (2 times, 3 times, X times) for the individual classes.
-If the particle is recorded, the OTS-Measure software will call the rule interpreter to classify the particle and add EDX
-measurement time in case the option is checked for the specific class.
-
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-
-2.4 False Element Contents
-In cleanliness analysis, the quantitative result of the EDX measurement on the particle is rather compromised and it
-will typically show elements that are false or unwanted quantifications. Reasons:
-• Short acquisition time, therefore high noise or neighboring peaks
-• Secondary contamination on the particle (oil, corrosion layer, other small particles)
-• Elements from the filter background
-Especially the quantification of the Oxygen is tricky. On a cellulose or polymer membrane, we will measure a certain
-amount of Oxygen on any particle. However, we do not want to exclude Oxygen because it is decisive to distinguish
-between metals and minerals (for example Aluminum and the Corundum = Aluminum Oxide.
-It is important to get rid of such false content because it will complicate the classification very much. Aspex used a
-second set of rules that they called "Zero-element rules" that will specify when a certain element shall be set to Zero.
-This concept worked very well and be have included around 30 "Zero-element rules" in the RJL data base for
-cleanliness. However, we like to stay open for other ideas coming from Jieshi.
-2.5 Ultra-Fast EDX Acquisition
-As proposed by Jieshi, there is a new way for ultra-fast classification with EDX. This method is not based on the
-quantitative composition but rather on the absolute presence of the element ("element is present/is not present")
-and the acquisition time can be less than 0.1 seconds. There should be a discussion how to marry this concept with
-the traditional concept in a clever way.
-2.6 Minimum Counts
-It might be useful to reject the EDX spectrum in case the minimum counts (user-defined) are not reached
-2.7 Material Properties
-For each class, we need to be able to manually enter physical material properties:
-• Hardness (HV)
-• Density (g/cm3)
-• Electrical conductivity (S/m)
-The properties need to be displayed on the tables of the report.
-
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-                                                                                                                  Tel: +49-7251-36790-0, Fax: -36790-79
-                                                                                                                           Web: www.rjl-microanalytic.de
-
-Part 3 – Data Presentation and Reporting Software ("Report")
-
-3.1 General Items in the Report
-The report must be a spread-sheet output for Microsoft Excel, other options on top are possible.
-This is a must-be
-
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