CMeasure.cs 18 KB

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  1. using System.Collections.Generic;
  2. using OTSDataType;
  3. using System;
  4. using System.Drawing;
  5. using static OTSDataType.otsdataconst;
  6. using OTSModelSharp.ImageProcess;
  7. using OTSModelSharp.ServiceInterface;
  8. namespace OTSModelSharp
  9. {
  10. // enum and struct used for send message to App
  11. public enum ENUM_MSG_TYPE
  12. {
  13. MTHREADSTATUS = 1001,
  14. MSAMPLESTATUS = 1002,
  15. MSAMPLERESULT = 1003
  16. };
  17. public enum MSAMPLE_RET
  18. {
  19. BSE_DATA = 0,
  20. FIELD_DATA = 1,
  21. START_MSR_FIELD = 2
  22. };
  23. public struct SMSR_COMPLETE_DATA
  24. {
  25. public OTS_MSR_THREAD_STATUS MsrStatus;
  26. public string csMsrStartTime;
  27. public int iMsrCompleteSampleCount;
  28. public int iMsrCompleteFieldCount;
  29. public int iParticleCount;
  30. public TimeSpan MsrUsedTime;
  31. public string csMsrEndTime;
  32. };
  33. public struct STMThreadStatus
  34. {
  35. public OTS_MSR_THREAD_STATUS iMsrStatu; //OTS_MSR_THREAD_STATUS
  36. public string csMsrStartTime; //MSR_START_TIME
  37. public string csMsrEndTime; //MSR_END_TIME
  38. public SMSR_COMPLETE_DATA SMsrCompleteData;
  39. };
  40. public struct STMSampleStatus
  41. {
  42. public OTS_MSR_SAMPLE_STATUS iMsrSampleStatu; //OTS_MSR_SAMPLE_STATUS
  43. public string cSampleName;
  44. public string csSampleMsrStartTime;
  45. public List<Point> BCompleteFieldList;
  46. };
  47. public struct STMSampleResultData
  48. {
  49. public MSAMPLE_RET iRetDataType; //ENUM_MEASURE_SAMPLE_RESULT
  50. public struct RBSEDATA
  51. {
  52. public System.Drawing.Point pos;
  53. public int iBSEDataHeight;
  54. public int iBSEDataWidth;
  55. public byte[] lpBSEData;
  56. };
  57. public struct SAMPLEFIELDDATA
  58. {
  59. public System.Drawing.Point FieldPos;
  60. public int iMeasureFieldCount;
  61. public int iCompleteFieldCount;
  62. public int iSParticleCount; // Field particle count
  63. public TimeSpan TUsedTime;
  64. };
  65. public struct StartToMsrField
  66. {
  67. public System.Drawing.Point FieldPos;
  68. };
  69. public RBSEDATA BSEData;
  70. public SAMPLEFIELDDATA SFieldData;
  71. public StartToMsrField SMsrField;
  72. };
  73. public struct ST_MSTMsg
  74. {
  75. public ENUM_MSG_TYPE iMsgType;
  76. public STMThreadStatus STMThreadStu;
  77. public STMSampleStatus STMSampleStu;
  78. public STMSampleResultData STMSampleRetData;
  79. };
  80. public class CMeasure
  81. {
  82. private const string UNTITLED_FILE_NAME = "Untitled";
  83. public delegate void ProgressEventHandler(ST_MSTMsg msg);
  84. public event ProgressEventHandler ProgressEvent;
  85. COTSMsrPrjResultData m_pProjData;
  86. List< COTSSample> m_listMeasurableSamples;
  87. string m_strWorkingFolder;
  88. CMsrThreadStatus m_ThreadStatus;
  89. SemController m_SemController;// there is no correspondense clr,so use this instead temporarilly
  90. protected static NLog.Logger loger = NLog.LogManager.GetCurrentClassLogger();
  91. public CMeasure()
  92. {
  93. m_strWorkingFolder = "";
  94. m_ThreadStatus = new CMsrThreadStatus();
  95. m_SemController = new SemController();
  96. }
  97. public COTSMsrPrjResultData GetProjResultData()
  98. {
  99. return m_pProjData;
  100. }
  101. public ISemController GetSEMController()
  102. {
  103. // get SEM, scanner and x-ray controller via hardware manager
  104. return m_SemController;
  105. }
  106. public CMsrThreadStatus GetMsrThreadStatus() { return m_ThreadStatus; }
  107. public void Init(COTSMsrPrjResultData a_pProjMgrFile)
  108. {
  109. m_pProjData = a_pProjMgrFile;
  110. m_listMeasurableSamples = a_pProjMgrFile.GetSampleList() ;
  111. return ;
  112. }
  113. void ThreadOver()
  114. {
  115. DateTime timeEnd = m_ThreadStatus.GetEndTime();
  116. ST_MSTMsg MsrMsg = new ST_MSTMsg();
  117. MsrMsg.iMsgType = ENUM_MSG_TYPE.MTHREADSTATUS;
  118. MsrMsg.STMThreadStu.iMsrStatu = m_ThreadStatus.GetStatus();
  119. MsrMsg.STMThreadStu.csMsrEndTime = timeEnd.ToShortDateString();
  120. ProgressEvent(MsrMsg);
  121. //disconnect the semcontroller when we exit this task.
  122. m_SemController.DisConnect();
  123. }
  124. void SetWorkingFolderStr()
  125. {
  126. // get project file pathname
  127. string strSettingFilePathName = m_pProjData.GetPathName();
  128. strSettingFilePathName.Trim();
  129. if (strSettingFilePathName == "")
  130. {
  131. loger .Error("SetWorkingFolderStr: project file pathname is an empty string");
  132. return ;
  133. }
  134. else if (strSettingFilePathName==UNTITLED_FILE_NAME)
  135. {
  136. loger .Error ("SetWorkingFolderStr: project file pathname is an invalid string");
  137. return ;
  138. }
  139. // working folder string
  140. m_strWorkingFolder = FileHelper.GetFolderName(strSettingFilePathName);
  141. return ;
  142. }
  143. public void SendMessageToMeasureApp(ST_MSTMsg msg)
  144. {
  145. ProgressEvent(msg);
  146. }
  147. public bool IsMeasureStopped()
  148. {
  149. return m_ThreadStatus.GetStatus() == OTS_MSR_THREAD_STATUS.STOPPED;
  150. }
  151. public bool IsMeasureRunning() { return m_ThreadStatus.GetStatus() == OTS_MSR_THREAD_STATUS.INPROCESS; }
  152. public bool IsMeasureFailed() { return m_ThreadStatus.GetStatus() == OTS_MSR_THREAD_STATUS.FAILED; }
  153. public bool IsMeasureCompleted() { return m_ThreadStatus.GetStatus() == OTS_MSR_THREAD_STATUS.COMPLETED; }
  154. public void DoMeasure()
  155. {
  156. // start measurement, creat thread measure status class, let the main thread know that measurement started
  157. SortedDictionary<string , CSmplMeasure> mapSmplMsr=new SortedDictionary<string, CSmplMeasure>();//use this map to hold all the smplMeasure object
  158. m_ThreadStatus.SetStartTime(System.DateTime.Now);
  159. DateTime timeStart = m_ThreadStatus.GetStartTime();
  160. ST_MSTMsg MsgMsrStart=new ST_MSTMsg();
  161. MsgMsrStart.iMsgType = ENUM_MSG_TYPE.MTHREADSTATUS;
  162. MsgMsrStart.STMThreadStu.iMsrStatu = OTS_MSR_THREAD_STATUS.INPROCESS;
  163. MsgMsrStart.STMThreadStu.csMsrStartTime = timeStart.ToShortDateString();
  164. ProgressEvent (MsgMsrStart);
  165. loger.Info("Measurement started!");
  166. // connect hardware
  167. loger.Info("Connect SEM!");
  168. if (!m_SemController.Connect())
  169. {
  170. loger .Error("DoMeasure: failed to connect hardware.");
  171. m_ThreadStatus.SetStatus(OTS_MSR_THREAD_STATUS.FAILED);
  172. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  173. ThreadOver();
  174. return;
  175. }
  176. // set working directory which is the same directory of the setting file
  177. SetWorkingFolderStr();
  178. List <string > listMeasuredSamples = m_ThreadStatus.GetCompletedSamples();
  179. // got through measure list
  180. foreach (var pSample in m_listMeasurableSamples)
  181. {// check and break if stop button is clicked
  182. if (m_ThreadStatus.GetStatus()== OTS_MSR_THREAD_STATUS.STOPPED )
  183. {
  184. // stop button clicked
  185. loger .Info("DoMeasure: stop button is clicked.");
  186. // record end time
  187. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  188. ThreadOver();
  189. return;
  190. }
  191. if (!pSample.GetSwitch())
  192. {
  193. continue;
  194. }
  195. CSmplMeasure pSmplMeasure;
  196. if (!mapSmplMsr.ContainsKey(pSample.GetName()))
  197. {// create a sample measure object for the sample
  198. switch (m_pProjData.m_nPackId)
  199. {
  200. case OTS_SysType_ID.IncA:
  201. pSmplMeasure = new CSmplMeasureInclution(m_strWorkingFolder, pSample);
  202. break;
  203. case OTS_SysType_ID.CleanlinessA:
  204. pSmplMeasure = new CSmplMeasureCleanliness(m_strWorkingFolder, pSample);
  205. break;
  206. default:
  207. pSmplMeasure = new CSmplMeasureInclution(m_strWorkingFolder, pSample);
  208. break;
  209. }
  210. // set measure thread
  211. pSmplMeasure.SetMsrThread(this);
  212. mapSmplMsr[pSample.GetName()] = pSmplMeasure;
  213. }
  214. else
  215. {
  216. pSmplMeasure = mapSmplMsr[pSample.GetName()];
  217. pSample.GetMsrStatus().SetStatus(OTS_MSR_SAMPLE_STATUS.INPROCESS);
  218. m_ThreadStatus.SetStatus(OTS_MSR_THREAD_STATUS.INPROCESS);
  219. }
  220. pSmplMeasure.DoMeasureForOneSample();
  221. // check if measurement is successful
  222. if (pSample.GetMsrStatus().GetStatus() == OTS_MSR_SAMPLE_STATUS.STOPPED)
  223. {// record end time
  224. m_ThreadStatus.SetStatus(OTS_MSR_THREAD_STATUS.STOPPED);
  225. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  226. // update thread measure status class, let the main thread know that this sample measurement stopped
  227. ST_MSTMsg MsgSmpStop = new ST_MSTMsg();
  228. MsgSmpStop.iMsgType = ENUM_MSG_TYPE.MSAMPLESTATUS;
  229. MsgSmpStop.STMThreadStu.iMsrStatu= OTS_MSR_THREAD_STATUS.STOPPED;
  230. MsgSmpStop.STMSampleStu.iMsrSampleStatu = OTS_MSR_SAMPLE_STATUS.STOPPED;
  231. MsgSmpStop.STMThreadStu.csMsrEndTime = DateTime .Now .ToShortDateString();
  232. MsgSmpStop.STMThreadStu.iMsrStatu= OTS_MSR_THREAD_STATUS.STOPPED;
  233. ProgressEvent(MsgSmpStop);
  234. ThreadOver();
  235. return;
  236. }
  237. else if (pSample.GetMsrStatus().GetStatus() == OTS_MSR_SAMPLE_STATUS.FAILED)
  238. {
  239. // measurement failed
  240. m_ThreadStatus.SetStatus(OTS_MSR_THREAD_STATUS.FAILED);
  241. // record end time
  242. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  243. // update thread measure status class, let the main thread know that this sample measurement failed
  244. ST_MSTMsg MsgSmpFailed=new ST_MSTMsg();
  245. MsgSmpFailed.iMsgType = ENUM_MSG_TYPE.MSAMPLESTATUS;
  246. MsgSmpFailed.STMSampleStu.iMsrSampleStatu = OTS_MSR_SAMPLE_STATUS.FAILED;
  247. ProgressEvent(MsgSmpFailed);
  248. ThreadOver();
  249. return;
  250. }
  251. // record end time
  252. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  253. // update thread measure status class, let the main thread know that this sample measurement successes
  254. ST_MSTMsg MsgSmpSuccess=new ST_MSTMsg();
  255. MsgSmpSuccess.iMsgType = ENUM_MSG_TYPE.MSAMPLESTATUS;
  256. MsgSmpSuccess.STMSampleStu.iMsrSampleStatu = OTS_MSR_SAMPLE_STATUS.SUCCESSED;
  257. ProgressEvent(MsgSmpSuccess);
  258. // continue to the next sample
  259. listMeasuredSamples.Add (pSample.GetName());
  260. }
  261. // measurement completed
  262. m_ThreadStatus.SetStatus(OTS_MSR_THREAD_STATUS.COMPLETED);
  263. // record end time
  264. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  265. ThreadOver();
  266. }
  267. // hole preview
  268. public void DoHolePreview(int a_nHoleID, CDomain a_pMeasureArea)
  269. {
  270. // start measurement, creat thread measure status class, let the main thread know that measurement started
  271. // set measure status to in-process
  272. //record time
  273. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.START);
  274. DateTime timeStart = m_ThreadStatus.GetStartTime();
  275. ST_MSTMsg MsgMsrStart = new ST_MSTMsg();
  276. MsgMsrStart.iMsgType = ENUM_MSG_TYPE.MTHREADSTATUS;
  277. MsgMsrStart.STMThreadStu.iMsrStatu =OTS_MSR_THREAD_STATUS.INPROCESS;
  278. SendMessageToMeasureApp(MsgMsrStart);
  279. // connect hardware
  280. if (!m_SemController.Connect())
  281. {
  282. // failed to connect hardware
  283. SetMsrLoopStatus(otsdataconst.OTS_MSR_THREAD_STATUS.FAILED);
  284. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  285. ThreadOver();
  286. }
  287. COTSSample pSampleHole = CreateHoleSample(a_pMeasureArea);
  288. // create a sample measure object for the sample
  289. CSmplMeasure pSmplMeasure = new CSmplMeasureCleanliness(m_strWorkingFolder,pSampleHole);
  290. // set measure thread
  291. pSmplMeasure.SetMsrThread(this);
  292. // update thread measure status class, let the main thread know that this sample measurement starts
  293. // set working folder string
  294. pSmplMeasure.SetSample(pSampleHole);
  295. pSmplMeasure.SetWorkingFolder(m_strWorkingFolder);
  296. // do measure
  297. pSmplMeasure.DoHolePreview(a_nHoleID);
  298. // check if measurement is successful
  299. if (pSampleHole.GetMsrStatus().GetStatus() == OTS_MSR_SAMPLE_STATUS.STOPPED)
  300. {
  301. // record end time
  302. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  303. // measurement stopped
  304. SetMsrLoopStatus(otsdataconst.OTS_MSR_THREAD_STATUS.STOPPED);
  305. // update thread measure status class, let the main thread know that this sample measurement stopped
  306. ST_MSTMsg MsgSmpStop = new ST_MSTMsg();
  307. MsgSmpStop.iMsgType = ENUM_MSG_TYPE.MSAMPLESTATUS;
  308. MsgSmpStop.STMSampleStu.iMsrSampleStatu = OTS_MSR_SAMPLE_STATUS.STOPPED;
  309. SendMessageToMeasureApp(MsgSmpStop);
  310. ThreadOver();
  311. return;
  312. }
  313. else if (pSampleHole.GetMsrStatus().GetStatus() == OTS_MSR_SAMPLE_STATUS.FAILED)
  314. {
  315. // measurement failed
  316. SetMsrLoopStatus(otsdataconst.OTS_MSR_THREAD_STATUS.FAILED);
  317. // record end time
  318. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  319. // update thread measure status class, let the main thread know that this sample measurement failed
  320. ST_MSTMsg MsgSmpFailed = new ST_MSTMsg();
  321. MsgSmpFailed.iMsgType = ENUM_MSG_TYPE.MSAMPLESTATUS;
  322. MsgSmpFailed.STMSampleStu.iMsrSampleStatu = OTS_MSR_SAMPLE_STATUS.FAILED;
  323. SendMessageToMeasureApp(MsgSmpFailed);
  324. ThreadOver();
  325. return;
  326. }
  327. // record end time
  328. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  329. // update thread measure status class, let the main thread know that this sample measurement successes
  330. ST_MSTMsg MsgSmpSuccess = new ST_MSTMsg();
  331. MsgSmpSuccess.iMsgType = ENUM_MSG_TYPE.MSAMPLESTATUS;
  332. MsgSmpSuccess.STMSampleStu.iMsrSampleStatu = OTS_MSR_SAMPLE_STATUS.SUCCESSED;
  333. SendMessageToMeasureApp(MsgSmpSuccess);
  334. // measurement completed
  335. SetMsrLoopStatus(otsdataconst.OTS_MSR_THREAD_STATUS.COMPLETED);
  336. // record end time
  337. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  338. ThreadOver();
  339. }
  340. public COTSSample CreateHoleSample(CDomain a_pMsrArea)
  341. {
  342. COTSSample pHoleSample = new COTSSample();
  343. pHoleSample.SetMsrArea(a_pMsrArea);
  344. // get min magnification
  345. CSEMStageData pSEMStageData = m_pProjData.GetSEMStageData();
  346. double dMinMag = pSEMStageData.GetMinMag();
  347. // get scan field size 100
  348. int nScanFieldSize100 = pSEMStageData.GetScanFieldSize100();
  349. // get working distance
  350. double dWorkingDistance = 0.0;
  351. if (!GetSEMWorkingDistanceFromHW(ref dWorkingDistance))
  352. {
  353. return null;
  354. }
  355. CSEMDataMsr poSEMDataMsr = new CSEMDataMsr();
  356. poSEMDataMsr.SetScanFieldSize100(nScanFieldSize100);
  357. poSEMDataMsr.SetWorkingDistance(dWorkingDistance);
  358. poSEMDataMsr.SetMagnification(dMinMag);
  359. pHoleSample.SetSEMDataMsr(poSEMDataMsr);
  360. // Set image scan param
  361. COTSImgScanPrm poImageScanParam = new COTSImgScanPrm();
  362. poImageScanParam.SetStopMode(OTS_MEASURE_STOP_MODE.CoverMode);
  363. poImageScanParam.SetStartImageMode(OTS_GET_IMAGE_MODE.FROM_CENTER);
  364. poImageScanParam.SetScanImageSpeed(OTS_IMAGE_SCANSPEED_OPTIONS.low);
  365. //poImageScanParam.SetImagePixelSize(OTS_FIVE_TIES_OPTIONS.TIE1);
  366. CSampleParam poMsrParams = pHoleSample.GetMsrParams();
  367. poImageScanParam.SetImageResulotion(m_listMeasurableSamples[0].GetMsrParams().GetImageScanParam().GetImageResulotion());//由于各样品分辨率应该一致,故此处没有读取选取的特定样品孔样品
  368. poMsrParams.SetImageScanParam(poImageScanParam);
  369. pHoleSample.SetMsrParams(poMsrParams);
  370. return pHoleSample;
  371. }
  372. public bool GetSEMWorkingDistanceFromHW(ref double a_dWorkingDistance)
  373. {
  374. m_SemController.GetWorkingDistance(ref a_dWorkingDistance);
  375. return true;
  376. }
  377. // measure status
  378. public void SetMsrLoopStatus(otsdataconst.OTS_MSR_THREAD_STATUS a_nMsrLoopStatus)
  379. {
  380. //if (a_nMsrLoopStatus >= otsdataconst.OTS_MSR_THREAD_STATUS.MIN && a_nMsrLoopStatus <= otsdataconst.OTS_MSR_THREAD_STATUS.MAX)
  381. //{
  382. m_ThreadStatus.SetStatus( a_nMsrLoopStatus);
  383. //}
  384. }
  385. }
  386. }