CMeasure.cs 19 KB

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  1. using System.Collections.Generic;
  2. using OTSDataType;
  3. using System;
  4. using System.Drawing;
  5. using static OTSDataType.otsdataconst;
  6. using OTSModelSharp.ImageProcess;
  7. using OTSModelSharp.ServiceInterface;
  8. namespace OTSModelSharp
  9. {
  10. // enum and struct used for send message to App
  11. public enum ENUM_MSG_TYPE
  12. {
  13. MTHREADSTATUS = 1001,
  14. MSAMPLESTATUS = 1002,
  15. MSAMPLERESULT = 1003
  16. };
  17. public enum MSAMPLE_RET
  18. {
  19. BSE_DATA = 0,
  20. FIELD_DATA = 1,
  21. START_MSR_FIELD = 2
  22. };
  23. public struct SMSR_COMPLETE_DATA
  24. {
  25. public OTS_MSR_THREAD_STATUS MsrStatus;
  26. public string csMsrStartTime;
  27. public int iMsrCompleteSampleCount;
  28. public int iMsrCompleteFieldCount;
  29. public int iParticleCount;
  30. public TimeSpan MsrUsedTime;
  31. public string csMsrEndTime;
  32. };
  33. public struct STMThreadStatus
  34. {
  35. public OTS_MSR_THREAD_STATUS iMsrStatu; //OTS_MSR_THREAD_STATUS
  36. public string csMsrStartTime; //MSR_START_TIME
  37. public string csMsrEndTime; //MSR_END_TIME
  38. public SMSR_COMPLETE_DATA SMsrCompleteData;
  39. };
  40. public struct STMSampleStatus
  41. {
  42. public OTS_MSR_SAMPLE_STATUS iMsrSampleStatu; //OTS_MSR_SAMPLE_STATUS
  43. public string cSampleName;
  44. public string csSampleMsrStartTime;
  45. public List<Point> BCompleteFieldList;
  46. };
  47. public struct STMSampleResultData
  48. {
  49. public MSAMPLE_RET iRetDataType; //ENUM_MEASURE_SAMPLE_RESULT
  50. public struct RBSEDATA
  51. {
  52. public System.Drawing.Point pos;
  53. public int iBSEDataHeight;
  54. public int iBSEDataWidth;
  55. public byte[] lpBSEData;
  56. };
  57. public struct SAMPLEFIELDDATA
  58. {
  59. public System.Drawing.Point FieldPos;
  60. public int iMeasureFieldCount;
  61. public int iCompleteFieldCount;
  62. public int iSParticleCount; // Field particle count
  63. public TimeSpan TUsedTime;
  64. };
  65. public struct StartToMsrField
  66. {
  67. public System.Drawing.Point FieldPos;
  68. };
  69. public RBSEDATA BSEData;
  70. public SAMPLEFIELDDATA SFieldData;
  71. public StartToMsrField SMsrField;
  72. };
  73. public struct ST_MSTMsg
  74. {
  75. public ENUM_MSG_TYPE iMsgType;
  76. public STMThreadStatus STMThreadStu;
  77. public STMSampleStatus STMSampleStu;
  78. public STMSampleResultData STMSampleRetData;
  79. };
  80. public class CMeasure
  81. {
  82. private const string UNTITLED_FILE_NAME = "Untitled";
  83. public delegate void ProgressEventHandler(ST_MSTMsg msg);
  84. public event ProgressEventHandler ProgressEvent;
  85. COTSMsrPrjResultData m_pProjData;
  86. List< COTSSample> m_listMeasurableSamples;
  87. string m_strWorkingFolder;
  88. CMsrThreadStatus m_ThreadStatus;
  89. SemController m_SemController;// there is no correspondense clr,so use this instead temporarilly
  90. protected static NLog.Logger loger = NLog.LogManager.GetCurrentClassLogger();
  91. public CMeasure()
  92. {
  93. m_strWorkingFolder = "";
  94. m_ThreadStatus = new CMsrThreadStatus();
  95. m_SemController = SemController.GetSEMController();
  96. }
  97. public COTSMsrPrjResultData GetProjResultData()
  98. {
  99. return m_pProjData;
  100. }
  101. public ISemController GetSEMController()
  102. {
  103. // get SEM, scanner and x-ray controller via hardware manager
  104. return m_SemController;
  105. }
  106. public CMsrThreadStatus GetMsrThreadStatus() { return m_ThreadStatus; }
  107. public void Init(COTSMsrPrjResultData a_pProjMgrFile)
  108. {
  109. m_pProjData = a_pProjMgrFile;
  110. m_listMeasurableSamples = a_pProjMgrFile.GetSampleList() ;
  111. return ;
  112. }
  113. void ThreadOver()
  114. {
  115. DateTime timeEnd = m_ThreadStatus.GetEndTime();
  116. ST_MSTMsg MsrMsg = new ST_MSTMsg();
  117. MsrMsg.iMsgType = ENUM_MSG_TYPE.MTHREADSTATUS;
  118. MsrMsg.STMThreadStu.iMsrStatu = m_ThreadStatus.GetStatus();
  119. //MsrMsg.STMThreadStu.csMsrEndTime = timeEnd.ToShortDateString();
  120. MsrMsg.STMThreadStu.csMsrEndTime = timeEnd.ToString("yyyy-MM-dd HH:mm:ss");
  121. ProgressEvent(MsrMsg);
  122. //disconnect the semcontroller when we exit this task.
  123. //m_SemController.DisConnect();
  124. }
  125. void ThreadOverWithoutDisConnect()
  126. {
  127. DateTime timeEnd = m_ThreadStatus.GetEndTime();
  128. ST_MSTMsg MsrMsg = new ST_MSTMsg();
  129. MsrMsg.iMsgType = ENUM_MSG_TYPE.MTHREADSTATUS;
  130. MsrMsg.STMThreadStu.iMsrStatu = m_ThreadStatus.GetStatus();
  131. //MsrMsg.STMThreadStu.csMsrEndTime = timeEnd.ToShortDateString();
  132. MsrMsg.STMThreadStu.csMsrEndTime = timeEnd.ToString("yyyy-MM-dd HH:mm:ss");
  133. ProgressEvent(MsrMsg);
  134. }
  135. void SetWorkingFolderStr()
  136. {
  137. // get project file pathname
  138. string strSettingFilePathName = m_pProjData.GetPathName();
  139. strSettingFilePathName.Trim();
  140. if (strSettingFilePathName == "")
  141. {
  142. loger .Error("SetWorkingFolderStr: project file pathname is an empty string");
  143. return ;
  144. }
  145. else if (strSettingFilePathName==UNTITLED_FILE_NAME)
  146. {
  147. loger .Error ("SetWorkingFolderStr: project file pathname is an invalid string");
  148. return ;
  149. }
  150. // working folder string
  151. m_strWorkingFolder = FileHelper.GetFolderName(strSettingFilePathName);
  152. return ;
  153. }
  154. public void SendMessageToMeasureApp(ST_MSTMsg msg)
  155. {
  156. ProgressEvent(msg);
  157. }
  158. public bool IsMeasureStopped()
  159. {
  160. return m_ThreadStatus.GetStatus() == OTS_MSR_THREAD_STATUS.STOPPED;
  161. }
  162. public bool IsMeasureRunning() { return m_ThreadStatus.GetStatus() == OTS_MSR_THREAD_STATUS.INPROCESS; }
  163. public bool IsMeasureFailed() { return m_ThreadStatus.GetStatus() == OTS_MSR_THREAD_STATUS.FAILED; }
  164. public bool IsMeasureCompleted() { return m_ThreadStatus.GetStatus() == OTS_MSR_THREAD_STATUS.COMPLETED; }
  165. public void DoMeasure()
  166. {
  167. // start measurement, creat thread measure status class, let the main thread know that measurement started
  168. SortedDictionary<string , CSmplMeasure> mapSmplMsr=new SortedDictionary<string, CSmplMeasure>();//use this map to hold all the smplMeasure object
  169. m_ThreadStatus.SetStartTime(System.DateTime.Now);
  170. DateTime timeStart = m_ThreadStatus.GetStartTime();
  171. ST_MSTMsg MsgMsrStart=new ST_MSTMsg();
  172. MsgMsrStart.iMsgType = ENUM_MSG_TYPE.MTHREADSTATUS;
  173. MsgMsrStart.STMThreadStu.iMsrStatu = OTS_MSR_THREAD_STATUS.INPROCESS;
  174. MsgMsrStart.STMThreadStu.csMsrStartTime = timeStart.ToShortDateString();
  175. ProgressEvent (MsgMsrStart);
  176. loger.Info("Measurement started!");
  177. // connect hardware
  178. loger.Info("Connect SEM!");
  179. if (!m_SemController.Connect())
  180. {
  181. loger .Error("DoMeasure: failed to connect hardware.");
  182. m_ThreadStatus.SetStatus(OTS_MSR_THREAD_STATUS.FAILED);
  183. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  184. ThreadOver();
  185. return;
  186. }
  187. // set working directory which is the same directory of the setting file
  188. SetWorkingFolderStr();
  189. List <string > listMeasuredSamples = m_ThreadStatus.GetCompletedSamples();
  190. // got through measure list
  191. foreach (var pSample in m_listMeasurableSamples)
  192. {// check and break if stop button is clicked
  193. if (m_ThreadStatus.GetStatus()== OTS_MSR_THREAD_STATUS.STOPPED )
  194. {
  195. // stop button clicked
  196. loger .Info("DoMeasure: stop button is clicked.");
  197. // record end time
  198. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  199. ThreadOver();
  200. return;
  201. }
  202. if (!pSample.GetSwitch())
  203. {
  204. continue;
  205. }
  206. CSmplMeasure pSmplMeasure;
  207. if (!mapSmplMsr.ContainsKey(pSample.GetName()))
  208. {// create a sample measure object for the sample
  209. switch (m_pProjData.m_nPackId)
  210. {
  211. case OTS_SysType_ID.IncA:
  212. pSmplMeasure = new CSmplMeasureInclution(m_strWorkingFolder, pSample);
  213. break;
  214. case OTS_SysType_ID.CleannessA:
  215. pSmplMeasure = new CSmplMeasureCleanliness(m_strWorkingFolder, pSample);
  216. break;
  217. default:
  218. pSmplMeasure = new CSmplMeasureInclution(m_strWorkingFolder, pSample);
  219. break;
  220. }
  221. // set measure thread
  222. pSmplMeasure.SetMsrThread(this);
  223. mapSmplMsr[pSample.GetName()] = pSmplMeasure;
  224. }
  225. else
  226. {
  227. pSmplMeasure = mapSmplMsr[pSample.GetName()];
  228. pSample.GetMsrStatus().SetStatus(OTS_MSR_SAMPLE_STATUS.INPROCESS);
  229. m_ThreadStatus.SetStatus(OTS_MSR_THREAD_STATUS.INPROCESS);
  230. }
  231. pSmplMeasure.DoMeasureForOneSample();
  232. // check if measurement is successful
  233. if (pSample.GetMsrStatus().GetStatus() == OTS_MSR_SAMPLE_STATUS.STOPPED)
  234. {// record end time
  235. m_ThreadStatus.SetStatus(OTS_MSR_THREAD_STATUS.STOPPED);
  236. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  237. // update thread measure status class, let the main thread know that this sample measurement stopped
  238. ST_MSTMsg MsgSmpStop = new ST_MSTMsg();
  239. MsgSmpStop.iMsgType = ENUM_MSG_TYPE.MSAMPLESTATUS;
  240. MsgSmpStop.STMThreadStu.iMsrStatu= OTS_MSR_THREAD_STATUS.STOPPED;
  241. MsgSmpStop.STMSampleStu.iMsrSampleStatu = OTS_MSR_SAMPLE_STATUS.STOPPED;
  242. MsgSmpStop.STMThreadStu.csMsrEndTime = DateTime .Now .ToShortDateString();
  243. MsgSmpStop.STMThreadStu.iMsrStatu= OTS_MSR_THREAD_STATUS.STOPPED;
  244. ProgressEvent(MsgSmpStop);
  245. ThreadOver();
  246. return;
  247. }
  248. else if (pSample.GetMsrStatus().GetStatus() == OTS_MSR_SAMPLE_STATUS.FAILED)
  249. {
  250. // measurement failed
  251. m_ThreadStatus.SetStatus(OTS_MSR_THREAD_STATUS.FAILED);
  252. // record end time
  253. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  254. // update thread measure status class, let the main thread know that this sample measurement failed
  255. ST_MSTMsg MsgSmpFailed=new ST_MSTMsg();
  256. MsgSmpFailed.iMsgType = ENUM_MSG_TYPE.MSAMPLESTATUS;
  257. MsgSmpFailed.STMSampleStu.iMsrSampleStatu = OTS_MSR_SAMPLE_STATUS.FAILED;
  258. ProgressEvent(MsgSmpFailed);
  259. ThreadOver();
  260. return;
  261. }
  262. // record end time
  263. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  264. // update thread measure status class, let the main thread know that this sample measurement successes
  265. ST_MSTMsg MsgSmpSuccess=new ST_MSTMsg();
  266. MsgSmpSuccess.iMsgType = ENUM_MSG_TYPE.MSAMPLESTATUS;
  267. MsgSmpSuccess.STMSampleStu.iMsrSampleStatu = OTS_MSR_SAMPLE_STATUS.SUCCESSED;
  268. ProgressEvent(MsgSmpSuccess);
  269. // continue to the next sample
  270. listMeasuredSamples.Add (pSample.GetName());
  271. }
  272. // measurement completed
  273. m_ThreadStatus.SetStatus(OTS_MSR_THREAD_STATUS.COMPLETED);
  274. // record end time
  275. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  276. ThreadOver();
  277. }
  278. // hole preview
  279. public void DoHolePreview(int a_nHoleID, CDomain a_pMeasureArea)
  280. {
  281. // start measurement, creat thread measure status class, let the main thread know that measurement started
  282. // set measure status to in-process
  283. //record time
  284. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.START);
  285. DateTime timeStart = m_ThreadStatus.GetStartTime();
  286. ST_MSTMsg MsgMsrStart = new ST_MSTMsg();
  287. MsgMsrStart.iMsgType = ENUM_MSG_TYPE.MTHREADSTATUS;
  288. MsgMsrStart.STMThreadStu.iMsrStatu =OTS_MSR_THREAD_STATUS.INPROCESS;
  289. SendMessageToMeasureApp(MsgMsrStart);
  290. // connect hardware
  291. if (!m_SemController.Connect())
  292. {
  293. // failed to connect hardware
  294. SetMsrLoopStatus(otsdataconst.OTS_MSR_THREAD_STATUS.FAILED);
  295. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  296. ThreadOverWithoutDisConnect();
  297. }
  298. COTSSample pSampleHole = CreateHoleSample(a_pMeasureArea);
  299. // create a sample measure object for the sample
  300. CSmplMeasure pSmplMeasure = new CSmplMeasureCleanliness(m_strWorkingFolder,pSampleHole);
  301. // set measure thread
  302. pSmplMeasure.SetMsrThread(this);
  303. // update thread measure status class, let the main thread know that this sample measurement starts
  304. // set working folder string
  305. pSmplMeasure.SetSample(pSampleHole);
  306. pSmplMeasure.SetWorkingFolder(m_strWorkingFolder);
  307. // do measure
  308. pSmplMeasure.DoHolePreview(a_nHoleID);
  309. // check if measurement is successful
  310. if (pSampleHole.GetMsrStatus().GetStatus() == OTS_MSR_SAMPLE_STATUS.STOPPED)
  311. {
  312. // record end time
  313. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  314. // measurement stopped
  315. SetMsrLoopStatus(otsdataconst.OTS_MSR_THREAD_STATUS.STOPPED);
  316. // update thread measure status class, let the main thread know that this sample measurement stopped
  317. ST_MSTMsg MsgSmpStop = new ST_MSTMsg();
  318. MsgSmpStop.iMsgType = ENUM_MSG_TYPE.MSAMPLESTATUS;
  319. MsgSmpStop.STMSampleStu.iMsrSampleStatu = OTS_MSR_SAMPLE_STATUS.STOPPED;
  320. SendMessageToMeasureApp(MsgSmpStop);
  321. ThreadOverWithoutDisConnect();
  322. return;
  323. }
  324. else if (pSampleHole.GetMsrStatus().GetStatus() == OTS_MSR_SAMPLE_STATUS.FAILED)
  325. {
  326. // measurement failed
  327. SetMsrLoopStatus(otsdataconst.OTS_MSR_THREAD_STATUS.FAILED);
  328. // record end time
  329. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  330. // update thread measure status class, let the main thread know that this sample measurement failed
  331. ST_MSTMsg MsgSmpFailed = new ST_MSTMsg();
  332. MsgSmpFailed.iMsgType = ENUM_MSG_TYPE.MSAMPLESTATUS;
  333. MsgSmpFailed.STMSampleStu.iMsrSampleStatu = OTS_MSR_SAMPLE_STATUS.FAILED;
  334. SendMessageToMeasureApp(MsgSmpFailed);
  335. ThreadOverWithoutDisConnect();
  336. return;
  337. }
  338. // record end time
  339. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  340. // update thread measure status class, let the main thread know that this sample measurement successes
  341. ST_MSTMsg MsgSmpSuccess = new ST_MSTMsg();
  342. MsgSmpSuccess.iMsgType = ENUM_MSG_TYPE.MSAMPLESTATUS;
  343. MsgSmpSuccess.STMSampleStu.iMsrSampleStatu = OTS_MSR_SAMPLE_STATUS.SUCCESSED;
  344. SendMessageToMeasureApp(MsgSmpSuccess);
  345. // measurement completed
  346. SetMsrLoopStatus(otsdataconst.OTS_MSR_THREAD_STATUS.COMPLETED);
  347. // record end time
  348. m_ThreadStatus.ComputeTime(OTS_THREAD_TIME_TYPE.STOPPED);
  349. ThreadOverWithoutDisConnect();
  350. }
  351. public COTSSample CreateHoleSample(CDomain a_pMsrArea)
  352. {
  353. COTSSample pHoleSample = new COTSSample();
  354. pHoleSample.SetMsrArea(a_pMsrArea);
  355. // get min magnification
  356. CSEMStageData pSEMStageData = m_pProjData.GetSEMStageData();
  357. double dMinMag = pSEMStageData.GetMinMag();
  358. // get scan field size 100
  359. int nScanFieldSize100 = pSEMStageData.GetScanFieldSize100();
  360. // get working distance
  361. double dWorkingDistance = 0.0;
  362. if (!GetSEMWorkingDistanceFromHW(ref dWorkingDistance))
  363. {
  364. return null;
  365. }
  366. CSEMDataMsr poSEMDataMsr = new CSEMDataMsr();
  367. poSEMDataMsr.SetScanFieldSize100(nScanFieldSize100);
  368. poSEMDataMsr.SetWorkingDistance(dWorkingDistance);
  369. poSEMDataMsr.SetMagnification(dMinMag);
  370. pHoleSample.SetSEMDataMsr(poSEMDataMsr);
  371. // Set image scan param
  372. COTSImgScanPrm poImageScanParam = new COTSImgScanPrm();
  373. poImageScanParam.SetStopMode(OTS_MEASURE_STOP_MODE.CoverMode);
  374. poImageScanParam.SetStartImageMode(OTS_GET_IMAGE_MODE.FROM_CENTER);
  375. poImageScanParam.SetScanImageSpeed(OTS_IMAGE_SCANSPEED_OPTIONS.low);
  376. //poImageScanParam.SetImagePixelSize(OTS_FIVE_TIES_OPTIONS.TIE1);
  377. CSampleParam poMsrParams = pHoleSample.GetMsrParams();
  378. poImageScanParam.SetImageResulotion(m_listMeasurableSamples[0].GetMsrParams().GetImageScanParam().GetImageResulotion());//由于各样品分辨率应该一致,故此处没有读取选取的特定样品孔样品
  379. poMsrParams.SetImageScanParam(poImageScanParam);
  380. pHoleSample.SetMsrParams(poMsrParams);
  381. return pHoleSample;
  382. }
  383. public bool GetSEMWorkingDistanceFromHW(ref double a_dWorkingDistance)
  384. {
  385. m_SemController.GetWorkingDistance(ref a_dWorkingDistance);
  386. return true;
  387. }
  388. // measure status
  389. public void SetMsrLoopStatus(otsdataconst.OTS_MSR_THREAD_STATUS a_nMsrLoopStatus)
  390. {
  391. //if (a_nMsrLoopStatus >= otsdataconst.OTS_MSR_THREAD_STATUS.MIN && a_nMsrLoopStatus <= otsdataconst.OTS_MSR_THREAD_STATUS.MAX)
  392. //{
  393. m_ThreadStatus.SetStatus( a_nMsrLoopStatus);
  394. //}
  395. }
  396. }
  397. }